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公开(公告)号:US6084716A
公开(公告)日:2000-07-04
申请号:US112641
申请日:1998-07-09
申请人: Yasushi Sanada , Toru Tojo , Mitsuo Tabata , Kyoji Yamashita , Hideo Nagai , Noboru Kobayashi , Hisakazu Yoshino , Makoto Taya , Akemi Miwa
发明人: Yasushi Sanada , Toru Tojo , Mitsuo Tabata , Kyoji Yamashita , Hideo Nagai , Noboru Kobayashi , Hisakazu Yoshino , Makoto Taya , Akemi Miwa
IPC分类号: G01B11/30 , G01N21/84 , G01N21/88 , G01N21/94 , G01N21/956 , G03F1/84 , G03F7/20 , H01L21/027 , H01L21/66 , G02B27/10 , G02B27/14
CPC分类号: G03F1/84 , G01N21/95607 , G03F7/70616
摘要: A single light emitted from a laser source is split into multiple beams. The multiple beams are illuminated by a multi-beam scanner to scan a substrate of interest. An optical system is provided for focusing the multiple beams independently on the substrate and directing a reflected light or a transmitted light of the multiple beams on the substrate. Aperture regulating members are disposed at equal intervals corresponding to the interval between the multiple beams for controlling the multiple beams directed from the substrate by the optical system. The multiple beams passed through their respective aperture regulating members are received by an optical detector assembly which detect a change in the amount of the multiple beams. The substrate is continuously moved by a movable table on a plane substantially vertical to the multiple beams and in a direction arranged at substantially a right angle to the scanning direction of the multiple beams. Then, a scanned image is produced by an image processor from a signal output of the detector assembly and data of the coordinate location of the movable table and compared by a comparator with a corresponding reference image.
摘要翻译: 从激光源发射的单个光被分成多个光束。 多光束被多光束扫描仪照射以扫描感兴趣的衬底。 提供了一种光学系统,用于将多个光束独立地聚焦在衬底上并且将多个光束的反射光或透射光引导到衬底上。 光圈调节构件以与多个光束之间的间隔相等的间隔设置,用于通过光学系统控制从衬底引导的多个光束。 通过其各自的孔径调节构件的多个光束被检测多个光束的量的变化的光学检测器组件接收。 基板在与多个光束大致垂直的平面上并且在与多个光束的扫描方向大致成直角的方向上由可移动台连续移动。 然后,扫描图像由图像处理器从检测器组件的信号输出和可移动表的坐标位置的数据产生,并由具有相应参考图像的比较器进行比较。
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公开(公告)号:US07566129B2
公开(公告)日:2009-07-28
申请号:US11767456
申请日:2007-06-22
申请人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
发明人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
CPC分类号: A61B3/102
摘要: An ophthalmologic apparatus is disclosed. In one aspect, the apparatus includes an ocular fundus photographing systems for forming an ocular fundus image of the examined eye, based on a reflective beam from the ocular fundus of the examined eye, and an ocular fundus tracking controller for detecting a gaze direction of the examined eye by receiving the reflective beam reflected at a reflective region of an illumination region illuminated on the ocular fundus and for tracking the ocular fundus based on the detection results of the gaze direction. The ocular fundus tracking controller may include scanning mirrors for scanning an area to detect a reflective beam from the ocular fundus, tracking mirrors for controlling tracking to the ocular fundus, an objective lens disposed opposite to the examined, and an offset mirror M19 for adjusting a detection axis in a gaze direction.
摘要翻译: 公开了一种眼科装置。 一方面,该装置包括用于基于来自被检眼的眼底的反射光束形成被检查眼睛的眼底图像的眼底照明系统和用于检测眼睛的视线方向的眼底跟踪控制器 通过接收在照射在眼底上的照明区域的反射区域反射的反射光束,并且基于注视方向的检测结果跟踪眼底,检查眼睛。 眼底跟踪控制器可以包括用于扫描区域以检测来自眼底的反射束的扫描镜,用于控制对眼底的跟踪的跟踪镜,与被检查相对设置的物镜,以及用于调整眼底的偏移镜M19 检测轴在注视方向。
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公开(公告)号:US20070296919A1
公开(公告)日:2007-12-27
申请号:US11767456
申请日:2007-06-22
申请人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
发明人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
IPC分类号: A61B3/10
CPC分类号: A61B3/102
摘要: An opthalmologic apparatus is disclosed. In one aspect, the apparatus includes an ocular fundus photographing systems for forming an ocular fundus image of the examined eye, based on a reflective beam from the ocular fundus of the examined eye, and an ocular fundus tracking controller for detecting a gaze direction of the examined eye by receiving the reflective beam reflected at a reflective region of an illumination region illuminated on the ocular fundus and for tracking the ocular fundus based on the detection results of the gaze direction. The ocular fundus tracking controller may include scanning mirrors for scanning an area to detect a reflective beam from the ocular fundus, tracking mirrors for controlling tracking to the ocular fundus, an objective lens disposed opposite to the examined, and an offset mirror M19 for adjusting a detection axis in a gaze direction.
摘要翻译: 公开了一种眼科装置。 一方面,该装置包括用于基于来自被检眼的眼底的反射光束形成被检查眼睛的眼底图像的眼底照明系统和用于检测眼睛的视线方向的眼底跟踪控制器 通过接收在照射在眼底上的照明区域的反射区域反射的反射光束,并且基于注视方向的检测结果跟踪眼底,检查眼睛。 眼底跟踪控制器可以包括扫描镜,用于扫描区域以检测来自眼底的反射光束,用于控制对眼底的跟踪的跟踪镜,与被检查相对设置的物镜,以及用于调节的偏移镜M 19 在注视方向上的检测轴。
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公开(公告)号:US07533990B2
公开(公告)日:2009-05-19
申请号:US11767423
申请日:2007-06-22
申请人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
发明人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
CPC分类号: A61B3/102
摘要: An ophthalmologic apparatus is disclosed. In one aspect, the apparatus includes ocular fundus photographing systems for forming an ocular fundus image of the examined eye, based on a reflective beam from the ocular fundus of the examined eye, and a light receiving element for receiving the reflective beam reflected at a reflective region of an illumination region illuminated on the ocular fundus. The apparatus further may include a tracking detector having a scanning unit for detecting a gaze direction of the tested eye, and an ocular fundus tracking controller for tracking the ocular fundus photographing system to the gaze direction.
摘要翻译: 公开了一种眼科装置。 一方面,该装置包括用于基于来自被检眼的眼底的反射光束形成被检眼的眼底图像的眼底照明系统和用于接收以反射方式反射的反射光束的光接收元件 照射在眼底的照明区域。 该装置还可以包括跟踪检测器,其具有用于检测测试眼睛的注视方向的扫描单元,以及用于将目视眼摄影系统跟踪到目视方向的眼底跟踪控制器。
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公开(公告)号:US20080002151A1
公开(公告)日:2008-01-03
申请号:US11767423
申请日:2007-06-22
申请人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
发明人: Masayuki Hideshima , Kazuo Nunokawa , Makoto Fujino , Yoichiro Iwa , Akemi Miwa , Yoshiaki Goto , Gaku Takeuchi , Takao Tanabe
IPC分类号: A61B3/15
CPC分类号: A61B3/102
摘要: An ophthalmologic apparatus is disclosed. In one aspect, the apparatus includes ocular fundus photographing systems for forming an ocular fundus image of the examined eye, based on a reflective beam from the ocular fundus of the examined eye, and a light receiving element for receiving the reflective beam reflected at a reflective region of an illumination region illuminated on the ocular fundus. The apparatus further may include a tracking detector having a scanning unit for detecting a gaze direction of the tested eye, and an ocular fundus tracking controller for tracking the ocular fundus photographing system to the gaze direction.
摘要翻译: 公开了一种眼科装置。 一方面,该装置包括用于基于来自被检眼的眼底的反射光束形成被检眼的眼底图像的眼底照明系统和用于接收以反射方式反射的反射光束的光接收元件 照射在眼底的照明区域。 该装置还可以包括跟踪检测器,其具有用于检测测试眼睛的注视方向的扫描单元,以及用于将目视眼摄影系统跟踪到目视方向的眼底跟踪控制器。
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