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    Silicon substrate having textured surface, and process for producing same
    1.
    发明授权
    Silicon substrate having textured surface, and process for producing same 有权
    具有纹理表面的硅衬底及其制造方法

    公开(公告)号：US09397242B2

    公开(公告)日：2016-07-19

    申请号：US14006357

    申请日：2012-03-28

    申请人： Yasushi Taniguchi ,  Shigeru Sankawa, Sr. ,  Kouji Arai ,  Hiroshi Tanabe ,  Ichiro Nakayama ,  Naoshi Yamaguchi

    发明人： Yasushi Taniguchi ,  Shigeru Sankawa, Sr. ,  Kouji Arai ,  Hiroshi Tanabe ,  Ichiro Nakayama ,  Naoshi Yamaguchi

    IPC分类号： H01L31/0236 ,  H01L21/306 ,  H01L29/04

    CPC分类号： H01L31/02363 ,  H01L21/30604 ,  H01L29/045 ,  Y02E10/50

    摘要： The present invention addresses the problem of providing a novel silicon substrate having a textured surface by dry-etching the surface of a silicon substrate having (111) orientation and thereby forming a texture thereon. The present invention provides a silicon substrate having (111) orientation, said silicon substrate having a textured surface that includes multiple protrusions which each comprise three slant faces and have heights of 100 to 8000 nm. This process for producing a silicon substrate includes: a step of preparing a silicon substrate having (111) orientation; and a step of blowing an etching gas onto the surface of the silicon substrate, said etching gas containing one or more gases selected from the group consisting of ClF3, XeF2, BrF3, BrF5 and NF3.

    摘要翻译： 本发明解决了通过干法蚀刻具有（111）取向的硅衬底的表面从而在其上形成纹理来提供具有纹理表面的新型硅衬底的问题。 本发明提供具有（111）取向的硅衬底，所述硅衬底具有纹理化表面，其包括多个突起，每个突出部包括三个倾斜面并且具有100至8000nm的高度。 该制造硅衬底的工艺包括：制备具有（111）取向的硅衬底的步骤; 以及将蚀刻气体吹送到硅衬底的表面上的步骤，所述蚀刻气体含有选自ClF 3，XeF 2，BrF 3，BrF 5和NF 3中的一种或多种气体。

    SILICON SUBSTRATE HAVING TEXTURED SURFACE, AND PROCESS FOR PRODUCING SAME
    2.
    发明申请
    SILICON SUBSTRATE HAVING TEXTURED SURFACE, AND PROCESS FOR PRODUCING SAME 有权
    具有纹理表面的硅衬底及其生产方法

    公开(公告)号：US20140020750A1

    公开(公告)日：2014-01-23

    申请号：US14006357

    申请日：2012-03-28

    申请人： Yasushi Taniguchi ,  Shigeru Sankawa ,  Kouji Arai ,  Hiroshi Tanabe ,  Ichiro Nakayama ,  Naoshi Yamaguchi

    发明人： Yasushi Taniguchi ,  Shigeru Sankawa ,  Kouji Arai ,  Hiroshi Tanabe ,  Ichiro Nakayama ,  Naoshi Yamaguchi

    IPC分类号： H01L31/0236 ,  H01L21/306 ,  H01L29/04

    CPC分类号： H01L31/02363 ,  H01L21/30604 ,  H01L29/045 ,  Y02E10/50

    摘要： The present invention addresses the problem of providing a novel silicon substrate having a textured surface by dry-etching the surface of a silicon substrate having (111) orientation and thereby forming a texture thereon. The present invention provides a silicon substrate having (111) orientation, said silicon substrate having a textured surface that includes multiple protrusions which each comprise three slant faces and have heights of 100 to 8000 nm. This process for producing a silicon substrate includes: a step of preparing a silicon substrate having (111) orientation; and a step of blowing an etching gas onto the surface of the silicon substrate, said etching gas containing one or more gases selected from the group consisting of ClF3, XeF2, BrF3, BrF5 and NF3.

    摘要翻译： 本发明解决了通过干法蚀刻具有（111）取向的硅衬底的表面从而在其上形成纹理来提供具有纹理表面的新型硅衬底的问题。 本发明提供具有（111）取向的硅衬底，所述硅衬底具有纹理化表面，其包括多个突起，每个突出部包括三个倾斜面并且具有100至8000nm的高度。 该制造硅衬底的工艺包括：制备具有（111）取向的硅衬底的步骤; 以及将蚀刻气体吹送到硅衬底的表面上的步骤，所述蚀刻气体含有选自ClF 3，XeF 2，BrF 3，BrF 5和NF 3中的一种或多种气体。

    Vehicular driving control apparatus and method
    3.
    发明授权
    Vehicular driving control apparatus and method 有权
    车辆驾驶控制装置及方法

    公开(公告)号：US07558662B2

    公开(公告)日：2009-07-07

    申请号：US11488725

    申请日：2006-07-19

    申请人： Naoshi Yamaguchi ,  Mitsuo Sasaki ,  Kazuya Yamano ,  Toru Takahashi ,  Motohiro Higuma

    发明人： Naoshi Yamaguchi ,  Mitsuo Sasaki ,  Kazuya Yamano ,  Toru Takahashi ,  Motohiro Higuma

    IPC分类号： B62T8/24 ,  B62D5/00 ,  G06F19/00

    CPC分类号： B62D6/003 ,  B60T8/17552 ,  B60T2230/02 ,  B60T2260/02 ,  B60W30/045 ,  B60W40/101

    摘要： In vehicular driving control apparatus and method, a steering assistance force provided for steerable road wheels of the vehicle in a direction at which a sideslip angle is decreased when a vehicular sideslip angle which is a difference between a forwarding direction of the vehicle and a steering direction of a steering wheel of the vehicle is detected and a vehicular oversteer state is detected, and thereafter, each of road wheels of the vehicle is controlled to decrease the sideslip angle when the steering assistance force is provided in a direction at which the vehicular sideslip angle is decreased and when the sideslip angle is equal to or larger than a predetermined value.

    摘要翻译： 在车辆驾驶控制装置和方法中，当作为车辆的前进方向与转向方向的差的车辆侧滑角度时，在侧滑角减小的方向上设置用于车辆的可转向车轮的转向辅助力 检测到车辆的方向盘，检测到车辆过度转向状态，此后，当车辆侧滑角方向设置转向辅助力时，控制车辆的每个车轮，以减小侧滑角度 并且当侧滑角度等于或大于预定值时。

    Power steering system
    4.
    发明授权
    Power steering system 有权
    动力转向系统

    公开(公告)号：US07631722B2

    公开(公告)日：2009-12-15

    申请号：US11624286

    申请日：2007-01-18

    申请人： Ayumu Miyajima ,  Makoto Yamakado ,  Toru Takahashi ,  Naoshi Yamaguchi ,  Yoshitaka Sugiyama

    发明人： Ayumu Miyajima ,  Makoto Yamakado ,  Toru Takahashi ,  Naoshi Yamaguchi ,  Yoshitaka Sugiyama

    IPC分类号： B62D5/06

    CPC分类号： B62D5/065 ,  B62D5/0463 ,  B62D5/0472 ,  B62D6/008

    摘要： In a power steering system, the steering state of wheels is detected based on the steering speed to judge as to whether the steering state is in turning of the steering wheel or holding of steering speed is the steering wheels. At the time of the steering operation state, the control is executed so that a difference between a torque command value to an electric motor and the actual torque thereof will become smaller. Also, at the time of the holding operation state, the control is executed so that a difference between the revolution speed of the electric motor and a revolution-speed command value thereto will become smaller.

    摘要翻译： 在动力转向系统中，基于转向速度来检测车轮的转向状态，以判断转向状态是转向方向盘还是转向速度的保持是方向盘。 在转向操作状态时，执行控制，使得电动机的转矩指令值与其实际转矩之间的差异变小。 此外，在保持操作状态时，执行控制，使得电动机的转速与其转速指令值之间的差将变小。

    Vehicular driving control apparatus and method
    6.
    发明申请
    Vehicular driving control apparatus and method 有权
    车辆驾驶控制装置及方法

    公开(公告)号：US20070032937A1

    公开(公告)日：2007-02-08

    申请号：US11488725

    申请日：2006-07-19

    申请人： Naoshi Yamaguchi ,  Mitsuo Sasaki ,  Kazuya Yamano ,  Toru Takahashi ,  Motohiro Higuma

    发明人： Naoshi Yamaguchi ,  Mitsuo Sasaki ,  Kazuya Yamano ,  Toru Takahashi ,  Motohiro Higuma

    IPC分类号： G06F19/00

    CPC分类号： B62D6/003 ,  B60T8/17552 ,  B60T2230/02 ,  B60T2260/02 ,  B60W30/045 ,  B60W40/101

    摘要： In vehicular driving control apparatus and method, a steering assistance force provided for steerable road wheels of the vehicle in a direction at which a sideslip angle is decreased when a vehicular sideslip angle which is a difference between a forwarding direction of the vehicle and a steering direction of a steering wheel of the vehicle is detected and a vehicular oversteer state is detected, and thereafter, each of road wheels of the vehicle is controlled to decrease the sideslip angle when the steering assistance force is provided in a direction at which the vehicular sideslip angle is decreased and when the sideslip angle is equal to or larger than a predetermined value.

    摘要翻译： 在车辆驾驶控制装置和方法中，当作为车辆的前进方向与转向方向的差的车辆侧滑角度时，在侧滑角减小的方向上设置用于车辆的可转向车轮的转向辅助力 检测到车辆的方向盘，检测到车辆过度转向状态，此后，当车辆侧滑角方向设置转向辅助力时，控制车辆的每个车轮，以减小侧滑角度 并且当侧滑角度等于或大于预定值时。