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公开(公告)号：US20070176498A1
公开(公告)日：2007-08-02
申请号：US11602258
申请日：2006-11-21
申请人： Makiko Sugiura , Takahiko Yoshida , Yasuyuki Okuda , Ryonosuke Tera , Hiroshi Tanaka , Yuta Hasebe
发明人： Makiko Sugiura , Takahiko Yoshida , Yasuyuki Okuda , Ryonosuke Tera , Hiroshi Tanaka , Yuta Hasebe
摘要： An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
摘要翻译： 超声波发生装置包括基板，基板上的绝热层，绝热层上的膜加热部和加热部上的膜振荡器。 加热部分以预定的周期被电驱动，并产生用于热移置振荡器表面的热量。 振荡器从加热部分接收到具有预定周期的温度变化，并振荡以产生超声波。
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公开(公告)号：US07497121B2
公开(公告)日：2009-03-03
申请号：US11602262
申请日：2006-11-21
IPC分类号： G01S15/93
CPC分类号： G01N29/223 , G01H11/06 , G01N29/245 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01S7/521 , G01S7/526 , G01S15/003 , G01S15/42 , G01S2015/932 , G01S2015/939 , Y10S367/909
摘要： An ultrasonic sensor includes a sending element for sending an ultrasonic wave to an object to be detected, a receiving portion for receiving the ultrasonic wave reflected by the object, an oscillating portion that oscillates by the ultrasonic wave transmitted thereto, and a supporting portion for holding an end part of the oscillating portion. The receiving portion is exposed to a space where the object exists. The receiving portion and the oscillating portion are connected through the supporting portion such that the ultrasonic wave received by the receiving portion is transmitted to the oscillating portion through the supporting portion. The oscillating portion is separate from the receiving portion by the supporting portion.
摘要翻译： 超声波传感器包括用于向被检测物体发送超声波的发送元件，接收被物体反射的超声波的接收部，通过其发送的超声波振荡的振荡部，以及用于保持的支撑部 振荡部分的端部。 接收部分暴露于物体存在的空间。 接收部分和振荡部分通过支撑部分连接，使得由接收部分接收的超声波通过支撑部分传递到振荡部分。 振动部分通过支撑部分与接收部分分离。
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公开(公告)号：US07397167B2
公开(公告)日：2008-07-08
申请号：US11602258
申请日：2006-11-21
申请人： Makiko Sugiura , Takahiko Yoshida , Yasuyuki Okuda , Ryonosuke Tera , Hiroshi Tanaka , Yuta Hasebe
发明人： Makiko Sugiura , Takahiko Yoshida , Yasuyuki Okuda , Ryonosuke Tera , Hiroshi Tanaka , Yuta Hasebe
摘要： An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
摘要翻译： 超声波发生装置包括基板，基板上的绝热层，绝热层上的膜加热部和加热部上的膜振荡器。 加热部分以预定的周期被电驱动，并产生用于热移置振荡器表面的热量。 振荡器从加热部分接收到具有预定周期的温度变化，并振荡以产生超声波。
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公开(公告)号：US20070144261A1
公开(公告)日：2007-06-28
申请号：US11602262
申请日：2006-11-21
IPC分类号： G01N29/00
CPC分类号： G01N29/223 , G01H11/06 , G01N29/245 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01S7/521 , G01S7/526 , G01S15/003 , G01S15/42 , G01S2015/932 , G01S2015/939 , Y10S367/909
摘要： An ultrasonic sensor includes a sending element for sending an ultrasonic wave to an object to be detected, a receiving portion for receiving the ultrasonic wave reflected by the object, an oscillating portion that oscillates by the ultrasonic wave transmitted thereto, and a supporting portion for holding an end part of the oscillating portion. The receiving portion is exposed to a space where the object exists. The receiving portion and the oscillating portion are connected through the supporting portion such that the ultrasonic wave received by the receiving portion is transmitted to the oscillating portion through the supporting portion. The oscillating portion is separate from the receiving portion by the supporting portion.
摘要翻译： 超声波传感器包括用于向被检测物体发送超声波的发送元件，接收被物体反射的超声波的接收部，通过其发送的超声波振荡的振荡部，以及用于保持的支撑部 振荡部分的端部。 接收部分暴露于物体存在的空间。 接收部分和振荡部分通过支撑部分连接，使得由接收部分接收的超声波通过支撑部分传递到振荡部分。 振动部分通过支撑部分与接收部分分离。
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公开(公告)号：US07490517B2
公开(公告)日：2009-02-17
申请号：US11488140
申请日：2006-07-18
申请人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
发明人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
IPC分类号： G01H5/00
摘要： A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
摘要翻译： 传感器附接结构包括用于接收超声波的声音接收构件，附接到声音接收构件的超声波传感器。 超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部，以在半导体衬底中形成膜。 此外，盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。 此外，盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面，同时在盖构件和盖构件之间具有间隙 膜。
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公开(公告)号：US20070079661A1
公开(公告)日：2007-04-12
申请号：US11488140
申请日：2006-07-18
申请人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
发明人： Takahiko Yoshida , Makiko Sugiura , Yasuyuki Okuda , Yuta Hasebe
IPC分类号： G01D21/00
摘要： A sensor attachment structure includes a sound receiving member for receiving an ultrasound, an ultrasonic sensor attached to the sound receiving member. The ultrasonic sensor includes a semiconductor substrate having first and second surfaces opposite to each other and a substrate recess portion recessed from the first surface of the semiconductor substrate so as to form a membrane in the semiconductor substrate. Furthermore, a cap member is located between the sound receiving member and the semiconductor substrate to cover the second surface of the semiconductor substrate. In addition, the cap member has a first surface bonded to the sound receiving member, and a second surface that is bonded to the second surface of the semiconductor substrate at an outer periphery section of the membrane while having a gap between the cap member and the membrane.
摘要翻译： 传感器附接结构包括用于接收超声波的声音接收构件，附接到声音接收构件的超声波传感器。 超声波传感器包括具有彼此相对的第一和第二表面的半导体衬底和从半导体衬底的第一表面凹陷的衬底凹部，以在半导体衬底中形成膜。 此外，盖构件位于声音接收构件和半导体衬底之间以覆盖半导体衬底的第二表面。 此外，盖构件具有接合到声音接收构件的第一表面和在膜的外周部分处接合到半导体衬底的第二表面的第二表面，同时在盖构件和盖构件之间具有间隙 膜。
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公开(公告)号：US08616061B2
公开(公告)日：2013-12-31
申请号：US13425460
申请日：2012-03-21
申请人： Makiko Sugiura , Yasuyuki Okuda , Takaaki Kawai , Takahiko Yoshida , Hisanaga Matsuoka , Toshiki Isogai , Mitsuyasu Matsuura
发明人： Makiko Sugiura , Yasuyuki Okuda , Takaaki Kawai , Takahiko Yoshida , Hisanaga Matsuoka , Toshiki Isogai , Mitsuyasu Matsuura
CPC分类号： G01S7/52004 , G01S7/52 , G01S7/52006 , G01S7/521 , G01S15/003 , G01S15/876 , G01S15/931 , G01S2015/939
摘要： An ultrasonic sensor includes a transmitting device, a receiving device, and a circuit device. The circuit device determines that the receiving device receives an ultrasonic wave reflected from an object, when an output voltage of the receiving device is equal to or greater than a first threshold. The circuit device includes a humidity detection section configured to detect an ambient humidity of the transmitting and receiving devices and a threshold adjustment section configured to calculate, based on the detected ambient humidity, a sound pressure of the ultrasonic wave that is received by the receiving device after propagating over a round-trip distance between the ultrasonic sensor and the object. The threshold adjustment section reduces the first threshold, when the output voltage corresponding to the calculated sound pressure is less than a second threshold that is greater the first threshold.
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公开(公告)号：US20090054784A1
公开(公告)日：2009-02-26
申请号：US12230039
申请日：2008-08-21
IPC分类号： A61B8/14
CPC分类号： G01S7/521
摘要： An ultrasonic sensor for detecting an object includes: a piezoelectric element having a piezoelectric body and first and second electrodes for sandwiching the piezoelectric body; an acoustic matching element having a reception surface, which receives an ultrasonic wave reflected by the object; and a circuit electrically coupled with the piezoelectric element via a wire. The piezoelectric element is embedded in the acoustic matching element so that the acoustic matching element covers at least the first electrode, a part of a sidewall of the piezoelectric element and a part of the wire between the circuit and the piezoelectric element, and the sidewall of the piezoelectric element is adjacent to the first electrode.
摘要翻译： 一种用于检测物体的超声波传感器包括：具有压电体的压电元件和用于夹持压电体的第一和第二电极; 具有接收表面的声匹配元件，其接收由所述物体反射的超声波; 以及经由导线与压电元件电耦合的电路。 压电元件被嵌入在声匹配元件中，使得声匹配元件至少覆盖第一电极，压电元件的侧壁的一部分和电路与压电元件之间的线的一部分，以及侧壁 压电元件与第一电极相邻。
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公开(公告)号：US20070204697A1
公开(公告)日：2007-09-06
申请号：US11712511
申请日：2007-03-01
IPC分类号： G01H11/00
CPC分类号： G10K9/122
摘要： An ultrasonic sensor composed of a substrate and a piezoelectric vibrator mounted on the substrate is advantageously used as a sensor for detecting a distance to an object located in front of an automotive vehicle. Ultrasonic waves transmitted from the sensor are reflected by the object, and the reflected waves are received by the sensor. Based on the reflected waves, the distance from the vehicle to the object is calculated. To reduce rigidity and thereby to lower a resonant frequency of the substrate to a desirable level, grooves are formed in the substrate. A thickness of the substrate is not reduced to maintain its mechanical strength against an impact force. A resonant frequency which is desirable to realize a sufficiently high directivity and sensitivity is obtained in this manner without enlarging a size of the ultrasonic sensor.
摘要翻译： 作为用于检测到位于机动车辆前方的物体的距离的传感器，有利地使用由基板和安装在基板上的压电振动器构成的超声波传感器。 从传感器发射的超声波被物体反射，反射波被传感器接收。 基于反射波，计算从车辆到物体的距离。 为了降低刚性，从而将基板的谐振频率降低到期望的水平，在基板中形成凹槽。 不降低基板的厚度以保持其抵抗冲击力的机械强度。 以这种方式获得期望实现足够高的方向性和灵敏度的共振频率，而不扩大超声波传感器的尺寸。
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公开(公告)号：US07622849B2
公开(公告)日：2009-11-24
申请号：US11712511
申请日：2007-03-01
IPC分类号： H01L41/07
CPC分类号： G10K9/122
摘要： An ultrasonic sensor composed of a substrate and a piezoelectric vibrator mounted on the substrate is advantageously used as a sensor for detecting a distance to an object located in front of an automotive vehicle. Ultrasonic waves transmitted from the sensor are reflected by the object, and the reflected waves are received by the sensor. Based on the reflected waves, the distance from the vehicle to the object is calculated. To reduce rigidity and thereby to lower a resonant frequency of the substrate to a desirable level, grooves are formed in the substrate. A thickness of the substrate is not reduced to maintain its mechanical strength against an impact force. A resonant frequency which is desirable to realize a sufficiently high directivity and sensitivity is obtained in this manner without enlarging a size of the ultrasonic sensor.
摘要翻译： 作为用于检测到位于机动车辆前方的物体的距离的传感器，有利地使用由基板和安装在基板上的压电振动器构成的超声波传感器。 从传感器发射的超声波被物体反射，反射波被传感器接收。 基于反射波，计算从车辆到物体的距离。 为了降低刚性，从而将基板的谐振频率降低到期望的水平，在基板中形成凹槽。 不降低基板的厚度以保持其抵抗冲击力的机械强度。 以这种方式获得期望实现足够高的方向性和灵敏度的共振频率，而不扩大超声波传感器的尺寸。
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