公开(公告)号：US08642477B2

公开(公告)日：2014-02-04

申请号：US12129978

申请日：2008-05-30

Applicant: Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

Inventor： Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

IPC: H01L21/302 ,  C23F1/00

CPC classification number: H01L21/3065 ,  H01L21/02057 ,  H01L21/02063

Abstract: A method for clearing native oxide is described. A substrate is provided, including an exposed portion whereon a native oxide layer has been formed. A clearing process is performed to the substrate using nitrogen trifluoride (NF3) and ammonia (NH3) as a reactant gas, wherein the volumetric flow rate of NF3 is greater than that of NH3.

Abstract translation: 描述了清除天然氧化物的方法。 提供了一种衬底，包括其中形成有自然氧化物层的暴露部分。 使用三氟化氮（NF 3）和氨（NH 3）作为反应气体对基板进行清除处理，其中NF 3的体积流量大于NH 3的体积流量。

公开(公告)号：US20110019868A1

公开(公告)日：2011-01-27

申请号：US12560453

申请日：2009-09-16

Applicant: Yen-Chu Chen ,  Kuo-Tung Kao ,  Hung-Sheng Tien ,  Chi-Bin Wu

Inventor： Yen-Chu Chen ,  Kuo-Tung Kao ,  Hung-Sheng Tien ,  Chi-Bin Wu

IPC: G06K9/00

CPC classification number: A61B90/36 ,  A61B34/20 ,  A61B90/39 ,  A61B2090/364 ,  A61B2090/376

Abstract: A method for image positioning is provided. The method is configured for positioning image data captured by a C-arm device and includes the steps of: providing an indication module, providing a database, reading the image data, comparing the image data, deriving a coordinate conversion system, and calculating the image data. Steel balls in the indication module have known template coordinates. Plural sets of template triangle data, each set composed by three of the steel balls, are stored in the database. Steel ball image data presented in the image data form indication triangle data. The indication triangle data are compared with the template triangle data to produce comparison results. The coordinate conversion system is derived from the comparison result with the highest similarity. Thus, image coordinates in the image data can be converted into and from the template coordinates via the coordinate conversion system, allowing the image to be orientated precisely.

Abstract translation: 提供了一种用于图像定位的方法。 该方法被配置用于定位由C臂装置捕获的图像数据，并且包括以下步骤：提供指示模块，提供数据库，读取图像数据，比较图像数据，导出坐标转换系统以及计算图像 数据。 指示模块中的钢球具有已知的模板坐标。 由三个钢球组成的多组模板三角形数据存储在数据库中。 钢球图像数据呈现在图像数据形式中，指示三角形数据。 将指示三角形数据与模板三角形数据进行比较以产生比较结果。 坐标转换系统是从具有最高相似度的比较结果得出的。 因此，可以经由坐标转换系统将图像数据中的图像坐标转换成模板坐标，从而允许图像精确地定向。

公开(公告)号：US20070269908A1

公开(公告)日：2007-11-22

申请号：US11383761

申请日：2006-05-17

Applicant: Hsin-Kun Chu ,  Yen-Chu Chen ,  Teng-Chun Tsai ,  Chia-Hsi Chen

Inventor： Hsin-Kun Chu ,  Yen-Chu Chen ,  Teng-Chun Tsai ,  Chia-Hsi Chen

IPC: H01L21/66

CPC classification number: H01L22/26 ,  H01L21/31053 ,  H01L21/76229

Abstract: A hybrid CMP system having a first platen and a second platen is provided. Two types of polish pads are mounted on the first platen and second platen. A lot of pattern wafers is prepared. Each pattern wafer has patterned features, and a first dielectric layer is disposed over a second dielectric layer and the patterned features. At least three foregoing pattern wafers of the lot are sequentially polished on the first platen to remove different amount of the first dielectric layer. Removal amount of each said foregoing pattern wafer is in-line measured and calculated to output a linear fitting curve of removal amount vs. polish time thereof. Based on the linear fitting curve, the rest of the pattern wafers of the same lot are sequentially polished on the first platen to reach a target thickness of remaining said first dielectric layer.

Abstract translation: 提供了具有第一压板和第二压板的混合CMP系统。 两种类型的抛光垫安装在第一压板和第二压板上。 准备了许多图案晶圆。 每个图案晶片具有图案化特征，并且第一介电层设置在第二介电层和图案化特征之上。 批次的至少三个前述图案晶片在第一压板上顺序研磨以除去不同量的第一介电层。 每个所述上述图案晶片的去除量被在线测量和计算，以输出去除量对其抛光时间的线性拟合曲线。 基于线性拟合曲线，将相同批次的其余图案晶片在第一压板上顺序抛光，以达到剩余所述第一介电层的目标厚度。

公开(公告)号：US08311365B2

公开(公告)日：2012-11-13

申请号：US12562159

申请日：2009-09-18

Applicant: Yen-Chu Chen ,  Kuo-Tung Kao ,  Hong-Yu Zhu ,  Chi-Bin Wu

Inventor： Yen-Chu Chen ,  Kuo-Tung Kao ,  Hong-Yu Zhu ,  Chi-Bin Wu

IPC: G06K9/00 ,  G06K9/20 ,  H05G1/28 ,  G01D18/00

CPC classification number: G06T7/74 ,  G06T2207/10121 ,  G06T2207/30204

Abstract: An analysis method for a regional image is disclosed for an image datum from a C-arm device. The analysis method includes: providing an indication module, reading the image datum, selecting a plurality of ROIs (Regions of Interest), calculating an average brightness of each of the ROIs, searching every of the steel ball image data, comparing each of the steel ball image data and analyzing each of the steel ball image data. By individually analyzing the regional image datum, the brighter or darker image signal can be excluded so that it can improve precision during searching the steel ball image data. Moreover, it is also more effective for comparing an image profile of the steel ball image datum with a real profile of the steel ball of the indication module. Thus, the steel ball image can be readily defined by its correspondence with the steel ball of the indication module.

Abstract translation: 公开了一种用于区域图像的分析方法，用于来自C臂装置的图像数据。 分析方法包括：提供指示模块，读取图像数据，选择多个ROI（感兴趣区域），计算每个ROI的平均亮度，搜索每个钢球图像数据，比较每个钢 球图像数据并分析每个钢球图像数据。 通过单独分析区域图像基准，可以排除更亮或更暗的图像信号，以便在搜索钢球图像数据期间提高精度。 此外，将钢球图像数据的图像轮廓与指示模块的钢球的实际轮廓进行比较也更有效。 因此，可以通过其与指示模块的钢球的对应关系来容易地定义钢球图像。

公开(公告)号：US20120220134A1

公开(公告)日：2012-08-30

申请号：US13468042

申请日：2012-05-10

Applicant: Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

Inventor： Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

IPC: H01L21/461 ,  B08B5/00

CPC classification number: H01L21/3065 ,  H01L21/02057 ,  H01L21/02063

Abstract: A method for clearing native oxide is described. A substrate is provided, including an exposed portion whereon a native oxide layer has been formed. A clearing process is performed to the substrate using nitrogen trifluoride (NF3) and ammonia (NH3) as a reactant gas, wherein the volumetric flow rate of NF3 is greater than that of NH3.

Abstract translation: 描述了清除天然氧化物的方法。 提供了一种衬底，包括其中形成有自然氧化物层的暴露部分。 使用三氟化氮（NF 3）和氨（NH 3）作为反应气体对基板进行清除处理，其中NF 3的体积流量大于NH 3的体积流量。

公开(公告)号：US20090061623A1

公开(公告)日：2009-03-05

申请号：US11850506

申请日：2007-09-05

Applicant: Yu-Lan Chang ,  Chien-Chung Huang ,  Yen-Chu Chen ,  Yi-Wei Chen

Inventor： Yu-Lan Chang ,  Chien-Chung Huang ,  Yen-Chu Chen ,  Yi-Wei Chen

IPC: H01L21/477

CPC classification number: H01L21/76814 ,  H01L21/02063

Abstract: A method of forming an electrical connection structure is described. A dielectric layer is formed covering a first conductor on a substrate, and then an opening is formed in the dielectric layer exposing the first conductor. A first cleaning step is conducted using fluorine-containing plasma to clean the surfaces of the dielectric layer and the exposed first conductor, and then at least one low-temperature annealing step is conducted. A second cleaning step is conducted using argon plasma to clean the above surfaces. A second conductor is then formed in the opening.

Abstract translation: 描述形成电连接结构的方法。 形成覆盖在基板上的第一导体的介质层，然后在暴露第一导体的电介质层中形成开口。 使用含氟等离子体进行第一清洗步骤，以清洁介质层和暴露的第一导体的表面，然后进行至少一个低温退火步骤。 使用氩等离子体进行第二清洗步骤以清洁上述表面。 然后在开口中形成第二导体。

公开(公告)号：US5226193A

公开(公告)日：1993-07-13

申请号：US675960

申请日：1991-03-27

Applicant: Yen-Chu Chen

Inventor： Yen-Chu Chen

IPC: A41B13/06 ,  A41D15/04 ,  A47G9/08

CPC classification number: A41D15/04 ,  A41B13/06 ,  A47G9/083

Abstract: A child's sleeping garment including an envelope, a pillow detachably associated with upper edges of the envelope, an elongating bag detachably associated with lower edges of the envelope for elongating the length thereof, and two sleeves detachably secured to the envelope, wherein the envelope has a front wall, a rear wall, a neck opening formed at upper edge of the envelope and two arm openings respectively formed on two side edges thereof, the front wall of the envelope being divided into two flaps which are detachably connected by a zipper whereby a child or an infant in the envelope can be kept warm and comfortable without any possibility of strangling himself through his turning movements in sleep, the sleeping garment permitting the child to do free movement of the legs and arms without being entangled and exposed to cold.

Abstract translation: 一种儿童的睡衣，包括信封，可拆卸地与信封的上边缘相关的枕头，可拆卸地与信封的下边缘相连的伸长袋，用于延长其长度，以及可拆卸地固定到信封的两个袖子，其中， 前壁，后壁，形成在信封的上边缘处的颈部开口和分别形成在其两个侧边缘上的两个臂开口，信封的前壁被分成两个翼片，其通过拉链可拆卸地连接，由此儿童 或者信封中的婴儿可以保持温暖和舒适，而没有任何可能通过睡眠中的转动而扼住自己的身体，睡衣使得小孩能够自由移动腿和臂，而不会被缠结并暴露于寒冷。

公开(公告)号：US20110054449A1

公开(公告)日：2011-03-03

申请号：US12577767

申请日：2009-10-13

Applicant: Hung-Sheng Tien ,  Yen-Chu Chen ,  Jia-Jyun Hong ,  Chi-Bin Wu

Inventor： Hung-Sheng Tien ,  Yen-Chu Chen ,  Jia-Jyun Hong ,  Chi-Bin Wu

IPC: A61B17/00

CPC classification number: A61B34/20 ,  A61B2017/00725 ,  A61B2034/2068 ,  A61B2034/207

Abstract: A surgical tool calibrating device having an electronic sensing module is provided. The surgical tool calibrating device includes a calibration block, an electronic sensing module, and a signal communication module. The calibration block has at least one tool inserting portion, and the electronic sensing module is disposed on the bottom of the said tool inserting portion for generating an activating signal. The signal communication module is electrically connected to the electronic sensing module for transmitting the activating signal. With the electronic sensing module being provided in the calibration block, the activating signal is generated immediately when a surgical tool is inserted into the calibration block and makes contact with the electronic sensing module. Thus, the surgical tool calibrating device is activated in real time so as to determine the length of and the suitable bore diameter for the surgical tool.

Abstract translation: 提供具有电子感测模块的手术工具校准装置。 手术工具校准装置包括校准块，电子感测模块和信号通信模块。 校准块具有至少一个工具插入部分，并且电子感测模块设置在所述工具插入部分的底部以产生激活信号。 信号通信模块电连接到用于发送激活信号的电子感测模块。 当电子感测模块设置在校准块中时，当外科手术工具插入到校准块中并且与电子感测模块接触时立即产生激活信号。 因此，外科手术工具校准装置被实时地激活，以便确定外科工具的长度和合适的孔直径。

公开(公告)号：US08536060B2

公开(公告)日：2013-09-17

申请号：US13468042

申请日：2012-05-10

Applicant: Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

Inventor： Yen-Chu Chen ,  Teng-Chun Tsai ,  Chien-Chung Huang ,  Keng-Jen Liu

IPC: H01L21/302 ,  C23F1/00

CPC classification number: H01L21/3065 ,  H01L21/02057 ,  H01L21/02063

Abstract: A method for clearing native oxide is described. A substrate is provided, including an exposed portion whereon a native oxide layer has been formed. A clearing process is performed to the substrate using nitrogen trifluoride (NF3) and ammonia (NH3) as a reactant gas, wherein the volumetric flow rate of NF3 is greater than that of NH3.

Abstract translation: 描述了清除天然氧化物的方法。 提供了一种衬底，包括其中形成有自然氧化物层的暴露部分。 使用三氟化氮（NF 3）和氨（NH 3）作为反应气体对基板进行清除处理，其中NF 3的体积流量大于NH 3的体积流量。

公开(公告)号：US20110082467A1

公开(公告)日：2011-04-07

申请号：US12652079

申请日：2010-01-05

Applicant: Hung-Sheng Tien ,  Yen-Chu Chen ,  Jia-Jyun Hong ,  Chi-Bin Wu

Inventor： Hung-Sheng Tien ,  Yen-Chu Chen ,  Jia-Jyun Hong ,  Chi-Bin Wu

IPC: A61B19/00

CPC classification number: A61B90/06 ,  A61B2017/00725 ,  A61B2034/2055 ,  A61B2090/061

Abstract: A surgical tool calibrating device for calibrating a surgical tool is provided. The surgical tool calibrating device includes a calibration block, an electronic sensing module, a diameter measurement module, and a signal communication module. The calibration block has a tool inserting portion in which the surgical tool can be inserted. The electronic sensing module is disposed on the bottom of the tool inserting portion for sensing the tip of the surgical tool and generating a measuring signal accordingly. The diameter measurement module is mounted around the tool inserting portion. The diameter measurement module is actuated to sense the surgical tool and measure the diameter of the surgical tool upon reception of the measuring signal. The signal communication module is electrically connected to the electronic sensing module and the diameter measurement module for transmitting the measuring signal.

Abstract translation: 提供了一种用于校准外科手术工具的外科手术工具校准装置。 外科手术工具校准装置包括校准块，电子感测模块，直径测量模块和信号通信模块。 校准块具有可插入手术工具的工具插入部分。 电子感测模块设置在工具插入部分的底部，用于感测手术工具的尖端并相应地产生测量信号。 直径测量模块安装在工具插入部分周围。 直径测量模块被致动以感测外科手术工具，并且在接收到测量信号时测量外科手术工具的直径。 信号通信模块电连接到电子感测模块和用于发送测量信号的直径测量模块。