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公开(公告)号：US20140225206A1
公开(公告)日：2014-08-14
申请号：US13764246
申请日：2013-02-11
申请人： Yizhen Lin , Chad S. Dawson , Hemant D. Desai , Lisa H. Karlin , Keith L. Kraver , Mark E. Schlarmann
发明人： Yizhen Lin , Chad S. Dawson , Hemant D. Desai , Lisa H. Karlin , Keith L. Kraver , Mark E. Schlarmann
CPC分类号： B81B7/0038 , B81B7/02 , B81C2203/0109
摘要： A semiconductor die (20) includes a substrate (30) and microelectronic devices (22, 26) located at a surface (32) of the substrate (30). A cap (34) is coupled to the substrate (30), and the microelectronic device (22) is positioned in the cavity (24). An outgassing material structure (36) is located within a cavity (24) between the cap (34) and the substrate (30). The outgassing material structure (36) releases trapped gas (37) to increase the pressure within the cavity (24) from an initial pressure level (96) to a second pressure level (94). The cap (34) may include another cavity (28) containing another microelectronic device (26). A getter material (42) may be located within the cavity (28). The getter material (42) is activated to absorb residual gas (46) in the cavity (28) and decrease the pressure within the cavity (28) from the initial pressure level (96) to a third pressure level (92).
摘要翻译： 半导体管芯（20）包括位于衬底（30）的表面（32）处的衬底（30）和微电子器件（22,26）。 盖（34）耦合到基板（30），并且微电子器件（22）定位在空腔（24）中。 排气材料结构（36）位于盖（34）和基板（30）之间的空腔（24）内。 排气材料结构（36）释放截留的气体（37）以将空腔（24）内的压力从初始压力水平（96）增加到第二压力水平（94）。 盖（34）可以包括另一个包含另一微电子装置（26）的空腔（28）。 吸气材料（42）可以位于空腔（28）内。 吸气剂材料（42）被激活以吸收空腔（28）中的残余气体（46）并将空腔（28）内的压力从初始压力水平（96）降低到第三压力水平（92）。
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公开(公告)号：US09927266B2
公开(公告)日：2018-03-27
申请号：US13511974
申请日：2012-02-27
申请人： Chad S. Dawson , Phillipe Lance , Yizhen Lin , Mark E. Schlarmann
发明人： Chad S. Dawson , Phillipe Lance , Yizhen Lin , Mark E. Schlarmann
CPC分类号： G01D18/00 , G01D3/0365
摘要： A multi-die sensor system comprises a package and one or more transducer dies mounted in the package. Each transducer die includes one or more transducers, a temperature control element, and temperature sensor. The temperature control element changes the temperature of at least a portion of the transducer during operation of the temperature control element. A temperature sensor senses the temperature of at least the portion of the transducer. An output circuitry die mounted in the package receives transducer signals and a sensed temperature signal from the temperature sensor.
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3.发明申请MULTI-CHIP DEVICE WITH TEMPERATURE CONTROL ELEMENT FOR TEMPERATURE CALIBRATION 有权具有温度校准温度控制元件的多芯片器件公开(公告)号：US20140376586A1
公开(公告)日：2014-12-25
申请号：US13511974
申请日：2012-02-27
申请人： Chad S. Dawson , Phillipe Lance , Yizhen Lin , Mark E. Schlarmann
发明人： Chad S. Dawson , Phillipe Lance , Yizhen Lin , Mark E. Schlarmann
CPC分类号： G01D18/00 , G01D3/0365
摘要： A multi-die sensor system comprises a package and one or more transducer dies mounted in the package. Each transducer die includes one or more transducers, a temperature control element, and temperature sensor. The temperature control element changes the temperature of at least a portion of the transducer during operation of the temperature control element. A temperature sensor senses the temperature of at least the portion of the transducer. An output circuitry die mounted in the package receives transducer signals and a sensed temperature signal from the temperature sensor.
摘要翻译： 多管芯传感器系统包括封装和安装在封装中的一个或多个换能器管芯。 每个换能器管芯包括一个或多个换能器，温度控制元件和温度传感器。 温度控制元件在温度控制元件的操作期间改变换能器的至少一部分的温度。 温度传感器感测至少换能器部分的温度。 安装在封装中的输出电路管芯接收来自温度传感器的换能器信号和感测到的温度信号。
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公开(公告)号：US09285422B2
公开(公告)日：2016-03-15
申请号：US13465651
申请日：2012-05-07
IPC分类号： G01R31/317 , B81C99/00 , G01R31/06 , G01R31/28
CPC分类号： G01R31/31718 , B81B2207/03 , B81C99/0045 , B81C99/005 , G01R31/06 , G01R31/2829 , G01R31/2844
摘要： A tester configured to test a strip of devices is provided. The tester may include a communications system, a plurality of communication lines, a plurality of multiplexors, each multiplexor having at least two outputs, wherein each multiplexor is configured to receive a signal generated by the communications system via one of the plurality of communication lines, and each multiplexor may be selectably coupled to at least two of the devices in the strip of devices. The tester may be configured to index the plurality of communication lines to a first subset of the devices, initiate at least one test, command the devices to generate data for each of the at least one tests, retrieve data from a first set of the devices, and retrieve data from a second set of the devices.
摘要翻译： 提供了一种配置成测试一条设备的测试仪。 测试器可以包括通信系统，多个通信线路，多个多路复用器，每个多路复用器具有至少两个输出，其中每个多路复用器被配置为经由多条通信线路之一接收由通信系统产生的信号， 并且每个多路复用器可以可选地耦合到设备条带中的至少两个设备。 测试器可以被配置为将多个通信线路索引到设备的第一子集，启动至少一个测试，命令设备为每个测试生成数据，从第一组设备检索数据 并且从第二组设备检索数据。
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公开(公告)号：US20130297248A1
公开(公告)日：2013-11-07
申请号：US13465651
申请日：2012-05-07
IPC分类号： G06F19/00
CPC分类号： G01R31/31718 , B81B2207/03 , B81C99/0045 , B81C99/005 , G01R31/06 , G01R31/2829 , G01R31/2844
摘要： A tester configured to test a strip of devices is provided. The tester may include a communications system, a plurality of communication lines, a plurality of multiplexors, each multiplexor having at least two outputs, wherein each multiplexor is configured to receive a signal generated by the communications system via one of the plurality of communication lines, and each multiplexor may be selectably coupled to at least two of the devices in the strip of devices. The tester may be configured to index the plurality of communication lines to a first subset of the devices, initiate at least one test, command the devices to generate data for each of the at least one tests, retrieve data from a first set of the devices, and retrieve data from a second set of the devices.
摘要翻译： 提供了一种配置成测试一条设备的测试仪。 测试器可以包括通信系统，多个通信线路，多个多路复用器，每个多路复用器具有至少两个输出，其中每个多路复用器被配置为经由多条通信线路之一接收由通信系统产生的信号， 并且每个多路复用器可以可选地耦合到设备条带中的至少两个设备。 测试器可以被配置为将多个通信线路索引到设备的第一子集，启动至少一个测试，命令设备为每个测试生成数据，从第一组设备检索数据 并且从第二组设备检索数据。
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公开(公告)号：US08245562B2
公开(公告)日：2012-08-21
申请号：US12533644
申请日：2009-07-31
申请人： Chad S. Dawson
发明人： Chad S. Dawson
IPC分类号： G01L27/00
CPC分类号： G01L27/007
摘要： A method for testing a pressure sensor having a first node and a second node includes coupling the first node to a first input of an amplifier and coupling a reference voltage to a second input of the amplifier; applying a transfer function to an output of the amplifier to provide a first output voltage that is based on a difference in voltage between the first node and the reference voltage; coupling the reference voltage to the first input and coupling the second node to the second input; obtaining a second output voltage at the output of the amplifier; and determining, based on the first and second output voltages, whether the pressure sensor passed or failed. During normal operation, the first node is coupled to the first input and the second node to the second input, and a second transfer function is applied to the output of the amplifier.
摘要翻译： 一种用于测试具有第一节点和第二节点的压力传感器的方法包括：将所述第一节点耦合到放大器的第一输入端并将参考电压耦合到所述放大器的第二输入; 对放大器的输出施加传递函数以提供基于第一节点和参考电压之间的电压差的第一输出电压; 将参考电压耦合到第一输入并将第二节点耦合到第二输入端; 在放大器的输出处获得第二输出电压; 以及基于所述第一和第二输出电压确定所述压力传感器是通过还是失败。 在正常操作期间，第一节点耦合到第一输入端，第二节点耦合到第二输入端，第二传递函数被施加到放大器的输出。
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7.发明授权Method and system to compensate for temperature and pressure in piezo resistive devices 有权用于补偿压电器件温度和压力的方法和系统公开(公告)号：US09157826B2
公开(公告)日：2015-10-13
申请号：US14197221
申请日：2014-03-05
CPC分类号： G01L27/005 , G01L9/065 , G01L27/002
摘要： A method and system to calibrate temperature and pressure in piezo resistive devices for non-linear sensors having two variables, where a piezo resistive device such as a piezo resistive transducer (PRT) used for example in a pressure sensor system is calibrated to calculate actual/ambient temperature and pressure even though the PRT impedance is unbalanced relative to pressure.
摘要翻译： 一种用于校准具有两个变量的非线性传感器的压电器件中的温度和压力的方法和系统，其中压电电阻器件例如压力传感器系统中使用的压阻式换能器（PRT）被校准以计算实际/ 环境温度和压力即使PRT阻抗相对于压力不平衡。
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公开(公告)号：US20140287547A1
公开(公告)日：2014-09-25
申请号：US13848819
申请日：2013-03-22
申请人： Chad S. Dawson
发明人： Chad S. Dawson
IPC分类号： B81C1/00
CPC分类号： B81B7/0016 , B81B3/0078 , B81C2201/017
摘要： A microelectromechanical systems (MEMS) device (58) includes a structural layer (78) having a top surface (86). The top surface (86) includes surface regions (92, 94) that are generally parallel to one another but are offset relative to one another such that a stress concentration location (90) is formed between them. Laterally propagating shallow surface cracks (44) have a tendency to form in the structural layer (78), especially near the joints (102) between the surface regions (92, 94). A method (50) entails fabricating (52) the MEMS device (58) and forming (54) trenches (56) in the top surface (86) of the structural layer (78) of the MEMS device (58). The trenches (56) act as a crack inhibition feature to largely prevent the formation of deep cracks in structural layer (78) which might otherwise result in MEMS device failure.
摘要翻译： 微机电系统（MEMS）装置（58）包括具有顶表面（86）的结构层（78）。 顶表面（86）包括通常彼此平行但相对于彼此偏移的表面区域（92,94），使得在它们之间形成应力集中位置（90）。 横向传播的浅表面裂纹（44）在结构层（78）中尤其是在表面区域（92,94）之间的接头（102）附近形成倾向。 方法（50）需要在MEMS装置（58）的结构层（78）的顶表面（86）中制造（52）MEMS器件（58）并形成（54）沟槽（56）。 沟槽（56）用作裂纹抑制特征，以大大地防止在结构层（78）中形成深裂纹，否则可能导致MEMS器件失效。
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9.发明申请公开(公告)号：US20140210018A1
公开(公告)日：2014-07-31
申请号：US13753034
申请日：2013-01-29
申请人： Chad S. Dawson , Dubravka Bilic , Lianjun Liu , Andrew C. McNeil
发明人： Chad S. Dawson , Dubravka Bilic , Lianjun Liu , Andrew C. McNeil
CPC分类号： B81B3/0018 , B81B3/0072 , B81B2203/0127 , B81C1/00015
摘要： Methods for fabricating crack resistant Microelectromechanical (MEMS) devices are provided, as are MEMS devices produced pursuant to such methods. In one embodiment, the method includes forming a sacrificial body over a substrate, producing a multi-layer membrane structure on the substrate, and removing at least a portion of the sacrificial body to form an inner cavity within the multi-layer membrane structure. The multi-layer membrane structure is produced by first forming a base membrane layer over and around the sacrificial body such that the base membrane layer has a non-planar upper surface. A predetermined thickness of the base membrane layer is then removed to impart the base membrane layer with a planar upper surface. A cap membrane layer is formed over the planar upper surface of the base membrane layer. The cap membrane layer is composed of a material having a substantially parallel grain orientation.
摘要翻译： 提供了制造抗电微机电（MEMS）器件的方法，以及根据这些方法制造的MEMS器件。 在一个实施例中，该方法包括在衬底上形成牺牲体，在衬底上产生多层膜结构，以及去除牺牲体的至少一部分以在多层膜结构内形成内腔。 多层膜结构通过首先在牺牲体上方和周围形成基膜层使得基膜层具有非平面的上表面来制造。 然后去除预定厚度的基膜层，以使基膜层具有平坦的上表面。 在基膜层的平面上表面上形成盖膜层。 盖膜层由具有基本上平行的晶粒取向的材料构成。
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公开(公告)号：US20130317772A1
公开(公告)日：2013-11-28
申请号：US13479168
申请日：2012-05-23
申请人： Chad S. Dawson
发明人： Chad S. Dawson
CPC分类号： G01L9/065 , G01L27/002
摘要： Apparatus, systems, and fabrication methods are provided for sensing devices. An exemplary sensing device includes a first sensing arrangement to measure a first property and provide one or more measured values for the first property, a second sensing arrangement to measure a second property, a storage element coupled to the second sensing arrangement to maintain a stored value for the second property measured by the second sensing arrangement, and a control system coupled to the first sensing arrangement and the storage element to determine one or more calibrated measurement values for the first property using the one or more measured values for the first property from the first sensing arrangement and the stored value for the second property.
摘要翻译： 提供了用于感测装置的装置，系统和制造方法。 示例性感测装置包括用于测量第一属性并提供用于第一属性的一个或多个测量值的第一感测装置，用于测量第二属性的第二感测装置，耦合到第二感测装置的存储元件，以保持存储值 对于由第二感测装置测量的第二属性，以及耦合到第一感测装置和存储元件的控制系统，以使用来自第一感测装置的第一属性的一个或多个测量值来确定第一属性的一个或多个校准测量值 第一感测布置和第二属性的存储值。
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