EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
    1.
    发明申请
    EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE 失效
    曝光装置及其制造方法

    公开(公告)号:US20080062391A1

    公开(公告)日:2008-03-13

    申请号:US11849698

    申请日:2007-09-04

    IPC分类号: G03B27/68

    CPC分类号: G03B27/68 G03F7/70258

    摘要: An exposure apparatus which exposes a substrate to light is disclosed. The exposure apparatus for exposing a substrate to light, the apparatus comprises: a projection optical system configured to project light from a reticle onto the substrate, the projection optical system including at least one optical element driven to adjust aberration of the projection optical system; a driver configured to drive the at least one optical element; and a calculator configured to calculate a target amount to which the driver drives the at least one optical element, wherein the apparatus is configured so that the driver drives the at least one optical element a plurality of times based on outputs from the calculator in a non-exposure period during which the substrate is not exposed to light.

    摘要翻译: 公开了一种将基板曝光的曝光装置。 所述装置包括:投影光学系统,被配置为将光从标线投影到所述基板上,所述投影光学系统包括被驱动以调整所述投影光学系统的像差的至少一个光学元件; 被配置为驱动所述至少一个光学元件的驱动器; 以及计算器,其被配置为计算所述驱动器驱动所述至少一个光学元件的目标量,其中所述装置被配置为使得所述驱动器基于来自所述计算器的输出而非驱动所述至少一个光学元件多次, - 曝光期间,基板未曝光。

    Exposure apparatus and method of manufacturing device
    2.
    发明授权
    Exposure apparatus and method of manufacturing device 失效
    曝光装置及其制造方法

    公开(公告)号:US07804581B2

    公开(公告)日:2010-09-28

    申请号:US11849698

    申请日:2007-09-04

    IPC分类号: G03B27/68

    CPC分类号: G03B27/68 G03F7/70258

    摘要: An exposure apparatus for exposing a substrate to light during an exposure period. A projection optical system projects light from a pattern of a reticle onto the substrate. The projection optical system includes at least one optical element driven to adjust aberration of the projection optical system. A first calculator calculates compensation data based on a temporal characteristic of heat influence, which represents a change in aberration due to heat influence of the exposure in the projection optical system in accordance with (i) an elapsed time of a non-exposure period from a time when the exposure period shifts to a non-exposure period, and (ii) exposure period data which represents the time when the exposure period shifts to the non-exposure period. A second calculator calculates each of a plurality of driving amounts of the at least one optical element, based on the compensation data calculated by the first calculator, and each of a plurality of timing signals generated at a gradually decreasing interval upon a shift from the exposure period to the non-exposure period, on the basis of the exposure period data. A driver drives the at least one optical element during the non-exposure period based on each of the plurality of driving amounts calculated by the second calculator.

    摘要翻译: 一种用于在曝光期间使基板曝光的曝光装置。 投影光学系统将来自标线图案的光投射到基板上。 投影光学系统包括被驱动以调整投影光学系统的像差的至少一个光学元件。 第一计算器基于热影响的时间特性来计算补偿数据,其表示由于投影光学系统中的曝光的热影响引起的像差的变化,其根据(i)从非曝光时间段的经过时间 曝光期间变更为非曝光期间的时间,(ii)表示曝光期间变更为非曝光期间的时间的曝光期间数据。 第二计算器基于由第一计算器计算的补偿数据,以及在从曝光移位时以逐渐减小的间隔生成的多个定时信号中的每一个计算器计算至少一个光学元件的多个驱动量中的每一个 期间到非暴露期间,根据曝光期数据。 驱动器基于由第二计算器计算的多个驾驶量中的每一个在非曝光期间驱动至少一个光学元件。

    Mobile communication system
    3.
    发明授权
    Mobile communication system 有权
    移动通信系统

    公开(公告)号:US09288768B2

    公开(公告)日:2016-03-15

    申请号:US13367682

    申请日:2012-02-07

    摘要: In a mobile communication system, a mobile switching center 27 changes a transmission rate of communication data transmitted from a mobile station 16 and so on to a database 11 or a transmission rate of communication data transmitted from the data 11 to the mobile station 16 and so on, on a basis of request from the mobile station 16 and so on or the database 11, individually and independently.

    摘要翻译: 在移动通信系统中,移动交换中心27将从移动台16发送的通信数据的传输速度等改变为数据库11,或将数据11发送到移动站16的通信数据的传输速率等 基于来自移动站16等的请求或数据库11,单独且独立地进行。

    Transmission rate determination method, and base station apparatus, terminal apparatus, and communication system using the same
    5.
    发明授权
    Transmission rate determination method, and base station apparatus, terminal apparatus, and communication system using the same 失效
    传输速率确定方法,基站装置,终端装置和使用该装置的通信系统

    公开(公告)号:US07529555B2

    公开(公告)日:2009-05-05

    申请号:US10849214

    申请日:2004-05-20

    申请人: Yoshinori Uchida

    发明人: Yoshinori Uchida

    IPC分类号: H04B7/00

    摘要: The modulation/demodulation unit modulates information to be transmitted, or demodulates information received. The time slot control unit allocates time slots to the terminal apparatus. The control signal processing unit extracts a signal indicating a disconnection request from a signal for requesting time slot allocation, received from the terminal apparatus in an inactive state in particular. The modulation mode control unit determines a modulation mode suitable for channel quality derived by the quality derivation unit. The modulation mode control unit determines to use a predetermined modulation mode when it receives an instruction for performing disconnection from the control signal processing unit.

    摘要翻译: 调制/解调单元调制要发送的信息或解调所接收的信息。 时隙控制单元向终端装置分配时隙。 控制信号处理单元特别从处于非活动状态的终端装置接收到的用于请求时隙分配的信号中提取表示断开请求的信号。 调制模式控制单元确定适合由质量导出单元导出的信道质量的调制模式。 当调制模式控制单元从控制信号处理单元接收到用于执行断开的指令时,确定使用预定的调制模式。

    Mobile communication system
    6.
    发明申请
    Mobile communication system 有权
    移动通信系统

    公开(公告)号:US20060142042A1

    公开(公告)日:2006-06-29

    申请号:US11291950

    申请日:2005-12-02

    IPC分类号: H04B7/00 H04B1/00

    摘要: In a mobile communication system, a mobile switching center 27 changes a transmission rate of communication data transmitted from a mobile station 16 and so on to a database 11 or a transmission rate of communication data transmitted from the database 11 to the mobile station 16 and so on, on a basis of a request from the mobile station 16 and so on or the database 11, individually and independently.

    摘要翻译: 在移动通信系统中,移动交换中心27将从移动站16发送的通信数据的传输速度等改变为数据库11,或从数据库11向移动站16发送的通信数据的传输速率等 基于来自移动站16等的请求或数据库11,单独且独立地进行。

    Connector mating structure
    7.
    发明授权
    Connector mating structure 有权
    连接器配套结构

    公开(公告)号:US06193530B1

    公开(公告)日:2001-02-27

    申请号:US09293988

    申请日:1999-04-19

    IPC分类号: H01R1362

    CPC分类号: H01R13/62905

    摘要: A female connector is provided with a first moving member and a second moving member which are capable of moving independently of each other, and the female connector is further provided with an operating member which is rotatable. The operating member is provided with a pair of first cam grooves whose spiral groove shapes are formed oppositely, while the first and second moving members are provided with first cam pins which are respectively inserted in the pair of first cam grooves. As the operating member is rotated, the first and second moving members are moved in mutually opposite directions. The first and second moving members are each provided with a pair of second cam grooves whose angles of inclination are opposite, while a male connector is provided with second cam pins which are inserted in the second cam grooves. As the first and second moving members are moved in the mutually opposite directions, a moving force acting in a connector-inserting direction is applied to the male connector through the cooperative movement of the first and second moving members.

    摘要翻译: 阴连接器设置有能够彼此独立地移动的第一移动构件和第二移动构件,并且阴连接器还设置有可旋转的操作构件。 操作构件设置有一对第一凸轮槽,其螺旋形槽形状相对地形成,而第一和第二移动构件设置有分别插入在该对第一凸轮槽中的第一凸轮销。 当操作构件旋转时,第一和第二移动构件沿彼此相反的方向移动。 第一移动构件和第二移动构件各自设置有一对第二凸轮槽,其倾斜角相反,而阳连接器设置有插入第二凸轮槽中的第二凸轮销。 随着第一和第二移动构件在相互相反的方向上移动,通过第一和第二移动构件的协作运动,沿着连接器插入方向作用的移动力施加到阳连接器。

    Mobile communication system using various multiple access methods
    8.
    发明授权
    Mobile communication system using various multiple access methods 失效
    移动通信系统采用各种多种接入方式

    公开(公告)号:US5805581A

    公开(公告)日:1998-09-08

    申请号:US524974

    申请日:1995-09-08

    摘要: A mobile communication system in which various access methods may be selected according to the user's priority. In the mobile communication system, each of mobile stations and radio base stations has a radio processor, which has TDMA, CDMA and FDMA communication units. The CDMA communication unit comprises channel coders each for performing a primary modulation to a transmitting signal, spread-spectrum code generators for respectively generating different spread-spectrum signals, a clock generator/controller for controlling the generation of chip clocks to control the generation of the spread-spectrum codes, oscillators for setting different carrier frequencies to outputs calculated as products, and a CPU for generally controlling various parts or elements to control the assignment of a CDMA signal or a TDMA signal to an arbitrary time slot transmitted from the TDMA communication unit. The radio processor transmits different signals of different access methods existing in each time slot of the same frame different signals.

    摘要翻译: 一种移动通信系统,其中可以根据用户的优先级选择各种接入方法。 在移动通信系统中,移动台和无线基站各有一个具有TDMA,CDMA和FDMA通信单元的无线电处理器。 CDMA通信单元包括各自用于对发送信号执行一次调制的信道编码器,用于分别生成不同扩频信号的扩频码发生器,用于控制生成芯片时钟以控制生成不同扩频信号的时钟发生器/ 扩频码,用于将不同载波频率设置为以产品计算的输出的振荡器,以及用于通常控制各种部件或元件以控制CDMA信号或TDMA信号到从TDMA通信单元发送的任意时隙的分配的CPU 。 无线电处理器发送存在于相同帧不同信号的每个时隙中的不同接入方式的不同信号。

    Mobile communication system with satellite communication hand off
capability
    9.
    发明授权
    Mobile communication system with satellite communication hand off capability 失效
    具有卫星通信功能的移动通信系统

    公开(公告)号:US5659878A

    公开(公告)日:1997-08-19

    申请号:US321609

    申请日:1994-10-12

    CPC分类号: H04B7/18541

    摘要: The mobile communication system comprising a public network, a private system connected to the public network and a satellite system connected to the public network. The private system includes a radio base station which has a communication zone, a first mobile telephone which is able to communicate with the radio base station in the communication zone and is able to communicate with the satellite system, and a private branch exchange connected to both the public network and the radio base station which performs communication processes between the public network and the private system. The radio base station and the first mobile telephone are able to process a private protocol and a public protocol. The satellite system includes a satellite station which relays radio waves on a satellite line, and a satellite ground station which is able to communicate with the satellite station and is connected to the public network. When the first mobile telephone roams to the satellite system, the private branch exchange transfers information of the first mobile telephone for roaming to the satellite ground station via the public network before changing communication lines.

    摘要翻译: 移动通信系统包括公共网络,连接到公共网络的专用系统和连接到公共网络的卫星系统。 私有系统包括具有通信区域的无线电基站,能够与通信区域中的无线电基站进行通信并能够与卫星系统通信的第一移动电话以及连接到两者的专用小交换机 公共网络和执行公共网络和私人系统之间的通信处理的无线电基站。 无线电基站和第一移动电话能够处理私人协议和公共协议。 该卫星系统包括卫星电台,卫星电台在卫星线路上继续发送无线电波,卫星地面站能够与卫星站通信并连接到公共网络。 当第一移动电话漫游到卫星系统时,专用小区交换机在改变通信线路之前经由公共网络将第一移动电话的信息传送到卫星地面站。

    SEMICONDUCTOR IMAGING INSTRUMENT AND MANUFACTURING METHOD THEREOF, AND CAMERA AND MANUFACTURING METHOD THEREOF
    10.
    发明申请
    SEMICONDUCTOR IMAGING INSTRUMENT AND MANUFACTURING METHOD THEREOF, AND CAMERA AND MANUFACTURING METHOD THEREOF 有权
    半导体成像仪器及其制造方法及其相机及其制造方法

    公开(公告)号:US20120104527A1

    公开(公告)日:2012-05-03

    申请号:US13347418

    申请日:2012-01-10

    申请人: Yoshinori Uchida

    发明人: Yoshinori Uchida

    IPC分类号: H01L31/0232

    摘要: A semiconductor imaging instrument is disclosed, including a prescribed substrate, an imaging device array provided on the substrate and having plural semiconductor imaging devices and electrodes for outputting a signal charge upon photoelectric conversion of received light, and a color filter layer provided on the imaging device array, with an infrared light absorbing dye being contained in the color filter layer.

    摘要翻译: 公开了一种半导体成像仪器,包括规定的基板,设置在基板上的成像装置阵列,具有多个半导体成像装置和用于在接收光的光电转换时输出信号电荷的电极,以及设置在成像装置上的滤色器层 阵列,其中包含在滤色器层中的红外光吸收染料。