摘要:
An exposure apparatus which exposes a substrate to light is disclosed. The exposure apparatus for exposing a substrate to light, the apparatus comprises: a projection optical system configured to project light from a reticle onto the substrate, the projection optical system including at least one optical element driven to adjust aberration of the projection optical system; a driver configured to drive the at least one optical element; and a calculator configured to calculate a target amount to which the driver drives the at least one optical element, wherein the apparatus is configured so that the driver drives the at least one optical element a plurality of times based on outputs from the calculator in a non-exposure period during which the substrate is not exposed to light.
摘要:
An exposure apparatus for exposing a substrate to light during an exposure period. A projection optical system projects light from a pattern of a reticle onto the substrate. The projection optical system includes at least one optical element driven to adjust aberration of the projection optical system. A first calculator calculates compensation data based on a temporal characteristic of heat influence, which represents a change in aberration due to heat influence of the exposure in the projection optical system in accordance with (i) an elapsed time of a non-exposure period from a time when the exposure period shifts to a non-exposure period, and (ii) exposure period data which represents the time when the exposure period shifts to the non-exposure period. A second calculator calculates each of a plurality of driving amounts of the at least one optical element, based on the compensation data calculated by the first calculator, and each of a plurality of timing signals generated at a gradually decreasing interval upon a shift from the exposure period to the non-exposure period, on the basis of the exposure period data. A driver drives the at least one optical element during the non-exposure period based on each of the plurality of driving amounts calculated by the second calculator.
摘要:
In a mobile communication system, a mobile switching center 27 changes a transmission rate of communication data transmitted from a mobile station 16 and so on to a database 11 or a transmission rate of communication data transmitted from the data 11 to the mobile station 16 and so on, on a basis of request from the mobile station 16 and so on or the database 11, individually and independently.
摘要:
The modulation/demodulation unit modulates information to be transmitted, or demodulates information received. The time slot control unit allocates time slots to the terminal apparatus. The control signal processing unit extracts a signal indicating a disconnection request from a signal for requesting time slot allocation, received from the terminal apparatus in an inactive state in particular. The modulation mode control unit determines a modulation mode suitable for channel quality derived by the quality derivation unit. The modulation mode control unit determines to use a predetermined modulation mode when it receives an instruction for performing disconnection from the control signal processing unit.
摘要:
In a mobile communication system, a mobile switching center 27 changes a transmission rate of communication data transmitted from a mobile station 16 and so on to a database 11 or a transmission rate of communication data transmitted from the database 11 to the mobile station 16 and so on, on a basis of a request from the mobile station 16 and so on or the database 11, individually and independently.
摘要:
A female connector is provided with a first moving member and a second moving member which are capable of moving independently of each other, and the female connector is further provided with an operating member which is rotatable. The operating member is provided with a pair of first cam grooves whose spiral groove shapes are formed oppositely, while the first and second moving members are provided with first cam pins which are respectively inserted in the pair of first cam grooves. As the operating member is rotated, the first and second moving members are moved in mutually opposite directions. The first and second moving members are each provided with a pair of second cam grooves whose angles of inclination are opposite, while a male connector is provided with second cam pins which are inserted in the second cam grooves. As the first and second moving members are moved in the mutually opposite directions, a moving force acting in a connector-inserting direction is applied to the male connector through the cooperative movement of the first and second moving members.
摘要:
A mobile communication system in which various access methods may be selected according to the user's priority. In the mobile communication system, each of mobile stations and radio base stations has a radio processor, which has TDMA, CDMA and FDMA communication units. The CDMA communication unit comprises channel coders each for performing a primary modulation to a transmitting signal, spread-spectrum code generators for respectively generating different spread-spectrum signals, a clock generator/controller for controlling the generation of chip clocks to control the generation of the spread-spectrum codes, oscillators for setting different carrier frequencies to outputs calculated as products, and a CPU for generally controlling various parts or elements to control the assignment of a CDMA signal or a TDMA signal to an arbitrary time slot transmitted from the TDMA communication unit. The radio processor transmits different signals of different access methods existing in each time slot of the same frame different signals.
摘要:
The mobile communication system comprising a public network, a private system connected to the public network and a satellite system connected to the public network. The private system includes a radio base station which has a communication zone, a first mobile telephone which is able to communicate with the radio base station in the communication zone and is able to communicate with the satellite system, and a private branch exchange connected to both the public network and the radio base station which performs communication processes between the public network and the private system. The radio base station and the first mobile telephone are able to process a private protocol and a public protocol. The satellite system includes a satellite station which relays radio waves on a satellite line, and a satellite ground station which is able to communicate with the satellite station and is connected to the public network. When the first mobile telephone roams to the satellite system, the private branch exchange transfers information of the first mobile telephone for roaming to the satellite ground station via the public network before changing communication lines.
摘要:
A semiconductor imaging instrument is disclosed, including a prescribed substrate, an imaging device array provided on the substrate and having plural semiconductor imaging devices and electrodes for outputting a signal charge upon photoelectric conversion of received light, and a color filter layer provided on the imaging device array, with an infrared light absorbing dye being contained in the color filter layer.