公开(公告)号：US20060228492A1

公开(公告)日：2006-10-12

申请号：US11100610

申请日：2005-04-07

申请人： Yoshiro Aoki ,  Mitsuru Sudo ,  Tetsuya Nakai

发明人： Yoshiro Aoki ,  Mitsuru Sudo ,  Tetsuya Nakai

IPC分类号： C23C14/00 ,  B05D3/02

CPC分类号： C23C8/80 ,  C23C8/12 ,  C23C14/48 ,  C30B29/06 ,  C30B33/005 ,  H01L21/76243

摘要： In the method for manufacturing a SIMOX wafer, oxygen ions are implanted into a silicon wafer, then the silicon wafer is subjected to a prescribed heat treatment so as to form a buried oxide layer in the silicon wafer. The prescribed heat treatment includes: a step of ramping up a temperature of the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%; either or both of a step of oxidizing the silicon wafer in a high oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of 5% or more and a step of annealing the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%; and a step of ramping down the temperature of the silicon wafer in a low oxygen partial pressure gas atmosphere having an oxygen partial pressure ratio of less than 5%. A hydrogen chloride gas is mixed with the low oxygen partial pressure gas having an oxygen partial pressure ratio of less than 5% in at least one step from among the ramp-up step, the anneal step and the ramp-down step.

摘要翻译： 在制造SIMOX晶片的方法中，将氧离子注入到硅晶片中，然后对硅晶片进行规定的热处理，以在硅晶片中形成掩埋氧化物层。 规定的热处理包括：在氧分压比小于5％的低氧分压气氛中升高硅晶片的温度的步骤; 在氧分压比为5％以上的高氧分压气氛中氧化硅晶片的步骤中的一个或两个，以及在具有氧部分的低氧分压气氛中退火硅晶片的步骤 压力比小于5％; 以及在氧分压比小于5％的低氧分压气体气氛中降低硅晶片的温度的步骤。 从斜坡上升步骤，退火步骤和斜坡下降步骤至少一个步骤，将氯化氢气体与氧分压比小于5％的低氧分压气体混合。

公开(公告)号：US20050104581A1

公开(公告)日：2005-05-19

申请号：US10920194

申请日：2004-08-18

申请人： Kenji Miyata ,  Masanori Kubota ,  Kenichi Katagishi ,  Kenji Ono ,  Masahiko Soshino ,  Mitsuru Sudo

发明人： Kenji Miyata ,  Masanori Kubota ,  Kenichi Katagishi ,  Kenji Ono ,  Masahiko Soshino ,  Mitsuru Sudo

IPC分类号： G01B7/30 ,  F02D9/00 ,  F02D11/10 ,  F02D35/00 ,  G01B7/00 ,  G01D5/14 ,  G01D5/16

CPC分类号： F02D11/106 ,  F02D2011/102 ,  F02D2400/22 ,  G01D5/145

摘要： A rotational position sensor having a compact and simple structure, in which a magnetic surface can be formed to have a more accurate shape, and an electronically controlled throttle device for an internal combustion engine, which employs the rotational position sensor. The rotational position sensor comprises a pair of substantially half disk-shaped magnetic cores disposed in an opposed relation to each other with a magnetic sensitive device interposed therebetween, a pair of substantially arc-shaped magnetic cores disposed in an opposed relation to each other along outer peripheries of the half disk-shaped magnetic cores, and a permanent magnet fixed in contact with at least one of the arc-shaped magnetic cores. Magnetic flux generating from the permanent magnet flows successively through one of the arc-shaped magnetic cores, the half disk-shaped magnetic cores, and the other of the arc-shaped magnetic cores, followed by returning to the permanent magnet. The half disk-shaped magnetic cores or the permanent magnet is rotatable, and the magnetic sensitive device detects an amount of the magnetic flux varying with rotation of the half disk-shaped magnetic cores or the permanent magnet.

摘要翻译： 具有紧凑且简单的结构的旋转位置传感器，其中可以形成磁性表面以具有更精确的形状，以及采用旋转位置传感器的内燃机的电子控制节流装置。 旋转位置传感器包括一对大致半圆形的磁芯，它们彼此相对地设置有一个介于它们之间的磁敏装置，一对基本上为弧形的磁芯，沿着外部彼此相对设置 半圆盘形磁芯的周边，以及与至少一个弧形磁芯固定的永久磁铁。 从永磁体产生的磁通依次通过弧形磁芯，半盘形磁芯和另一个弧形磁芯中的一个，然后返回到永磁体。 半圆盘形磁芯或永久磁铁是可旋转的，并且磁敏装置检测随半圆形磁芯或永久磁铁的旋转而变化的磁通量。

公开(公告)号：US07375510B2

公开(公告)日：2008-05-20

申请号：US10920194

申请日：2004-08-18

申请人： Kenji Miyata ,  Masanori Kubota ,  Kenichi Katagishi ,  Kenji Ono ,  Masahiko Soshino ,  Mitsuru Sudo

发明人： Kenji Miyata ,  Masanori Kubota ,  Kenichi Katagishi ,  Kenji Ono ,  Masahiko Soshino ,  Mitsuru Sudo

IPC分类号： G01B7/30

CPC分类号： F02D11/106 ,  F02D2011/102 ,  F02D2400/22 ,  G01D5/145

摘要： A rotational position sensor having a compact and simple structure, in which a magnetic surface can be formed to have a more accurate shape, and an electronically controlled throttle device for an internal combustion engine, which employs the rotational position sensor. The rotational position sensor comprises a pair of substantially half disk-shaped magnetic cores disposed in an opposed relation to each other with a magnetic sensitive device interposed therebetween, a pair of substantially arc-shaped magnetic cores disposed in an opposed relation to each other along outer peripheries of the half disk-shaped magnetic cores, and a permanent magnet fixed in contact with at least one of the arc-shaped magnetic cores. Magnetic flux generating from the permanent magnet flows successively through one of the arc-shaped magnetic cores, the half disk-shaped magnetic cores, and the other of the arc-shaped magnetic cores, followed by returning to the permanent magnet. The half disk-shaped magnetic cores or the permanent magnet is rotatable, and the magnetic sensitive device detects an amount of the magnetic flux varying with rotation of the half disk-shaped magnetic cores or the permanent magnet.

摘要翻译： 具有紧凑且简单的结构的旋转位置传感器，其中可以形成磁性表面以具有更精确的形状，以及采用旋转位置传感器的内燃机的电子控制节流装置。 旋转位置传感器包括一对大致半圆形的磁芯，它们彼此相对地设置有一个介于它们之间的磁敏装置，一对基本上为弧形的磁芯，沿着外部彼此相对设置 半圆盘形磁芯的周边，以及与至少一个弧形磁芯固定的永久磁铁。 从永磁体产生的磁通依次通过弧形磁芯，半盘形磁芯和另一个弧形磁芯中的一个，然后返回到永磁体。 半圆盘形磁芯或永久磁铁是可旋转的，并且磁敏装置检测随半圆形磁芯或永久磁铁的旋转而变化的磁通量。

公开(公告)号：US06293104B1

公开(公告)日：2001-09-25

申请号：US09570462

申请日：2000-05-12

申请人： Naoki Kangai ,  Kazuhiro Ohtomo ,  Mitsuru Sudo

发明人： Naoki Kangai ,  Kazuhiro Ohtomo ,  Mitsuru Sudo

IPC分类号： F01K1300

CPC分类号： F28F19/00 ,  F28B11/00 ,  F28F2265/16

摘要： A condenser for use in a power plant includes a steam condensing zone having a heat exchanger tube bundle for condensing steam into condensate and a hot well zone allowing the condensate to stay therein. A plurality of detectors for detecting the quality of the condensate and/or detection ports for taking out a sample of the condensate are provided in the hot well zone. The control valve is provided on a feed water system for adjusting the supply of the condensate to be supplied from the condenser to the feed water system on the basis of water quality detection values detected by the plurality of detectors and/or detection ports and a make-up water system is provided for supplying make-up water to the feed water system on the downstream side of the control valve.

摘要翻译： 用于发电厂的冷凝器包括具有用于将蒸汽冷凝成冷凝物的热交换器管束和允许冷凝物留在其中的热井区域的蒸汽冷凝区域。 用于检测用于取出冷凝物样品的冷凝物和/或检测端口的质量的多个检测器设置在热井区域中。 控制阀设置在供水系统上，用于基于由多个检测器和/或检测端口检测到的水质检测值来调节从冷凝器供给到给水系统的冷凝物的供应， 供水系统用于将补充水供给到控制阀下游侧的给水系统。

公开(公告)号：US20110041503A1

公开(公告)日：2011-02-24

申请号：US12857988

申请日：2010-08-17

申请人： Yosuke HIRAKAWA ,  Mitsuru Sudo ,  Ichiro Hiraga ,  Tsugutomo Teranishi

发明人： Yosuke HIRAKAWA ,  Mitsuru Sudo ,  Ichiro Hiraga ,  Tsugutomo Teranishi

IPC分类号： F01D21/14

CPC分类号： F01D21/14 ,  F01D21/20 ,  F01K7/34 ,  F01K7/345 ,  F01K13/02 ,  F22D1/28

摘要： An object of the present invention is to provide a turbine protection device which can interrupt backflow from a deaerator to a turbine completely even if a check valve provided between the deaerator and the turbine can not interrupt the steam flow between the deaerator and the turbine completely. In order to achieve the above object, a control unit sends commands to a shutdown valve device so as to close the shutdown valve device when a differential pressure resulted from subtracting a pressure of a extraction steam from a pressure within the deaerator becomes greater than or equal to a first predetermined value. As a result, the backflow from the deaerator to the turbine is interrupted by a stop valve of the shutdown valve device.

摘要翻译： 本发明的目的是提供一种涡轮机保护装置，其即使在脱气器和涡轮机之间设置的止回阀也不能完全中断脱气器和涡轮机之间的蒸汽流动，因此可以完全中断从脱气器到涡轮机的回流。 为了实现上述目的，当从脱气器内的压力减去提取蒸汽的压力而产生的压差变得大于或等于一个时，控制单元向关闭阀装置发送命令以关闭关闭阀装置 到第一预定值。 结果，从脱气器到涡轮机的回流被关闭阀装置的截止阀中断。

公开(公告)号：US06655144B2

公开(公告)日：2003-12-02

申请号：US09920832

申请日：2001-08-03

申请人： Naoki Kangai ,  Kazuhiro Ohtomo ,  Mitsuru Sudo

发明人： Naoki Kangai ,  Kazuhiro Ohtomo ,  Mitsuru Sudo

IPC分类号： F01K1300

CPC分类号： F28F19/00 ,  F28B11/00 ,  F28F2265/16

摘要： Water quality detecting points for detecting sea water leakage are provided at a portion in a hot well zone right under a tube bundle of heat exchange tube forming a steam condensing zone and at a condenser outlet allowing the condensate to be led out of the condenser or in the vicinity thereof, and a difference between detection values at both detecting points is monitored. Further, when leakage of sea water occurred, a feed water stop valve or a condensate stop valve is stopped for separating the system in which the sea water is mixed, and at same time, make-up water is supplied to a steam generator. Further, chemical or chemical dilution water is injected into the condensate mixed with sea water.

摘要翻译： 用于检测海水泄漏的水质检测点设置在形成蒸汽冷凝区的热交换管的管束正下方的热井区域的一部分和冷凝器出口处，允许冷凝物从冷凝器引出或在 监视两个检测点的检测值之间的差异。此外，当发生海水泄漏时，停止供水停止阀或冷凝物停止阀，以分离其中混合海水的系统， 同时补充水供应给蒸汽发生器。 此外，将化学或化学稀释水注入与海水混合的冷凝水中。