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1.发明授权公开(公告)号：US07635529B2
公开(公告)日：2009-12-22
申请号：US11475862
申请日：2006-06-28
申请人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
发明人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
CPC分类号： G11B5/7315
摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.
摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。
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2.发明申请公开(公告)号：US20070003798A1
公开(公告)日：2007-01-04
申请号：US11475862
申请日：2006-06-28
申请人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
发明人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
IPC分类号： G11B5/706
CPC分类号： G11B5/7315
摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.
摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。
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公开(公告)号：US08221637B2
公开(公告)日：2012-07-17
申请号：US12829450
申请日：2010-07-02
IPC分类号： C23C14/46
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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公开(公告)号：US07771602B2
公开(公告)日：2010-08-10
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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5.发明授权Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造用于离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US07314833B2
公开(公告)日：2008-01-01
申请号：US11476038
申请日：2006-06-28
IPC分类号： H01L21/302
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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公开(公告)号：US20070000861A1
公开(公告)日：2007-01-04
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过离子计数器安装的入射颗粒的总数中，根据平坦化膜的材料相对于垂直于衬底的方向成角度θ。
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7.发明申请Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US20070001331A1
公开(公告)日：2007-01-04
申请号：US11476038
申请日：2006-06-28
IPC分类号： B29C45/76
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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公开(公告)号：US20100264019A1
公开(公告)日：2010-10-21
申请号：US12829450
申请日：2010-07-02
IPC分类号： C23C14/46
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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公开(公告)号：US20070065588A1
公开(公告)日：2007-03-22
申请号：US11520023
申请日：2006-09-13
CPC分类号： G11B5/855
摘要： A method of forming patterns includes coating a toroidal substrate having a center hole with an imprint material containing a precursor of a metal oxide film, selected from the group consisting of a metal alkoxide and a metal oxide, and an ether type nonionic surfactant containing fluorine or silicon, imprinting a stamper on the imprint material to transfer patterns of protrusions and recesses of the stamper to the imprint material, and removing organic components from the imprint material through plasma processing or heat treatment to form a metal oxide film having patterns of protrusions and recesses.
摘要翻译： 形成图案的方法包括用具有中心孔的环形基板涂覆含有金属氧化物膜的前体的压印材料，所述金属氧化物膜的前体选自金属醇盐和金属氧化物，以及含有氟的醚型非离子表面活性剂 硅，在压印材料上压印压模以将压模的突起和凹陷的图案转印到压印材料，以及通过等离子体处理或热处理从压印材料中去除有机组分以形成具有突起和凹陷图案的金属氧化物膜 。
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