公开(公告)号：US20110223332A1

公开(公告)日：2011-09-15

申请号：US13047405

申请日：2011-03-14

申请人： Young Joon BAIK ,  Jong Keuk PARK ,  Wook Seong LEE

发明人： Young Joon BAIK ,  Jong Keuk PARK ,  Wook Seong LEE

IPC分类号： C23C16/00 ,  C23C14/35

CPC分类号： C23C14/0647 ,  C23C14/067

摘要： The present invention relates to a method for depositing a cBN thin film on a substrate to obtain an abrasive material by physical vapor deposition carried out under an atmosphere composed of an inert gas and hydrogen. The abrasive produced by the inventive method comprises the cBN thin film attached firmly to the substrate, which has excellent hardness and durability.

摘要翻译： 本发明涉及一种在基板上沉积cBN薄膜的方法，通过在由惰性气体和氢气组成的气氛下进行物理气相沉积来获得研磨材料。 通过本发明方法制造的磨料包括牢固地附着到基底上的cBN薄膜，其具有优异的硬度和耐久性。

公开(公告)号：US20090127102A1

公开(公告)日：2009-05-21

申请号：US11953348

申请日：2007-12-10

申请人： Wook Seong LEE ,  Young Joon BaiK ,  Jong-Keuk Park ,  Gyu Weon Hwang ,  Jeung-hyun Jeong

发明人： Wook Seong LEE ,  Young Joon BaiK ,  Jong-Keuk Park ,  Gyu Weon Hwang ,  Jeung-hyun Jeong

IPC分类号： C23C14/32

CPC分类号： H01J37/3497 ,  H01J37/3435

摘要： A plasma deposition apparatus includes a cathode assembly including a cathode disk and a water-coolable cathode holder supporting the cathode disk, an anode assembly including a water-coolable anode holder, a substrate mounted on the anode holder to serve as an anode, and a substrate holder mounting and supporting the substrate, and a reactor for applying a potential difference between opposing surfaces of the cathode assembly and the anode assembly under a vacuum state to form plasma of a raw gas. The cathode disk comes into thermal contact with the cathode holder using at least one of a self weight and a vacuum absorption force so as to permit thermal expansion of the cathode disk.

摘要翻译： 等离子体沉积装置包括阴极组件，其包括阴极盘和支撑阴极盘的水冷阴极保持器，阳极组件，其包括水冷阳极保持器，安装在阳极保持器上用作阳极的衬底和 安装和支撑基板的基板支架，以及用于在真空状态下在阴极组件和阳极组件的相对表面之间施加电位差以形成原始气体的等离子体的反应器。 阴极盘使用自重和真空吸收力中的至少一种与阴极保持器热接触，以允许阴极盘的热膨胀。

公开(公告)号：US20090047520A1

公开(公告)日：2009-02-19

申请号：US12191801

申请日：2008-08-14

申请人： Jae Kap LEE ,  Seung Cheol LEE ,  Phillip JOHN ,  Wook Seong LEE ,  Jeon Kook LEE

发明人： Jae Kap LEE ,  Seung Cheol LEE ,  Phillip JOHN ,  Wook Seong LEE ,  Jeon Kook LEE

IPC分类号： B32B9/00 ,  C23C16/26

CPC分类号： C30B29/02 ,  B82Y15/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/188 ,  C23C16/01 ,  C23C16/26 ,  C30B25/02 ,  C30B29/04 ,  Y10S977/742 ,  Y10T428/30

摘要： Disclosed herein are a graphene hybrid material and a method for preparing the graphene hybrid material, the graphene hybrid material comprising: a matrix having lattice planes disconnected on a surface thereof; and layers of graphene which are epitaxially grown along the lattice planes disconnected on the surface of the matrix such that the layers of graphene are oriented perpendicularly to the matrix, and which are spaced apart from each other and layered on the matrix in the same shape. The graphene hybrid material can be usefully used in the fields of next-generation semiconductor devices, biosensors, electrochemical electrodes and the like.

摘要翻译： 本发明公开了石墨烯混合材料和石墨烯混合材料的制备方法，所述石墨烯混合材料包括：具有在其表面上断开晶格面的矩阵; 以及沿着在基体表面上断开的晶格面外延生长的石墨烯层，使得石墨烯层垂直于矩阵定向，并且彼此间隔开并以相同形状层叠在基体上。 石墨烯混合材料可用于下一代半导体器件，生物传感器，电化学电极等领域。