Plasma deposition apparatus and method
    2.
    发明授权
    Plasma deposition apparatus and method 有权
    等离子体沉积装置及方法

    公开(公告)号:US08973526B2

    公开(公告)日:2015-03-10

    申请号:US11953348

    申请日:2007-12-10

    CPC classification number: H01J37/3497 H01J37/3435

    Abstract: A plasma deposition apparatus includes a cathode assembly including a cathode disk and a water-coolable cathode holder supporting the cathode disk, an anode assembly including a water-coolable anode holder, a substrate mounted on the anode holder to serve as an anode, and a substrate holder mounting and supporting the substrate, and a reactor for applying a potential difference between opposing surfaces of the cathode assembly and the anode assembly under a vacuum state to form plasma of a raw gas. The cathode disk comes into thermal contact with the cathode holder using at least one of a self weight and a vacuum absorption force so as to permit thermal expansion of the cathode disk.

    Abstract translation: 等离子体沉积装置包括阴极组件,其包括阴极盘和支撑阴极盘的水冷阴极保持器,阳极组件,其包括水冷阳极保持器,安装在阳极保持器上用作阳极的衬底和 安装和支撑基板的基板支架,以及用于在真空状态下在阴极组件和阳极组件的相对表面之间施加电位差以形成原始气体的等离子体的反应器。 阴极盘使用自重和真空吸收力中的至少一种与阴极保持器热接触,以允许阴极盘的热膨胀。

    Method for preparing graphene ribbons
    3.
    发明授权
    Method for preparing graphene ribbons 有权
    制备石墨烯带的方法

    公开(公告)号:US08597607B2

    公开(公告)日:2013-12-03

    申请号:US12545740

    申请日:2009-08-21

    Abstract: Disclosed is a method for fabricating graphene ribbons, comprising: preparing a graphitic material comprising stacked graphene helices; and cutting the graphitic material in a short form by applying energy to the graphitic material; and simultaneously or afterward, decomposing the graphitic material into short graphene ribbons. This method provides a mass production route to graphene ribbons.

    Abstract translation: 公开了一种制造石墨烯带的方法,包括:制备包括堆积的石墨烯螺旋的石墨材料; 并通过向石墨材料施加能量来以短形式切割石墨材料; 同时或之后,将石墨材料分解成短的石墨烯带。 这种方法提供了石墨烯带的大规模生产路线。

    Diamond film depositing apparatus and method thereof
    4.
    发明授权
    Diamond film depositing apparatus and method thereof 失效
    金刚石膜沉积设备及其方法

    公开(公告)号:US06786176B2

    公开(公告)日:2004-09-07

    申请号:US10122459

    申请日:2002-04-15

    CPC classification number: H01J37/32027 H01J37/32009 H01J37/32541

    Abstract: A diamond film depositing apparatus and method are disclosed in which a uniform and large plasma is formed on a substrate having a diameter of larger than 100 mm without using a heated filament cathode, without applying a magnetic field thereto, and without using a ballast resistance. The thusly formed plasma is maintained stably for a long time, so that a diamond thick film having a diameter of larger than 4 inches and a thickness of over hundreds of &mgr;m can be deposited on a flat or curved substrate and also on a Si wafer.

    Abstract translation: 公开了一种金刚石膜沉积设备和方法,其中在不使用加热的灯丝阴极的情况下,在直径大于100mm的基板上形成均匀且大的等离子体,而不对其施加磁场,并且不使用耐镇流性。 这样形成的等离子体长时间保持稳定,使得直径大于4英寸,厚度超过数百个的金刚石厚膜可以沉积在平坦或弯曲的基板上以及Si晶片上。

    PLASMA DEPOSITION APPARATUS AND METHOD
    8.
    发明申请
    PLASMA DEPOSITION APPARATUS AND METHOD 有权
    等离子体沉积装置和方法

    公开(公告)号:US20090127102A1

    公开(公告)日:2009-05-21

    申请号:US11953348

    申请日:2007-12-10

    CPC classification number: H01J37/3497 H01J37/3435

    Abstract: A plasma deposition apparatus includes a cathode assembly including a cathode disk and a water-coolable cathode holder supporting the cathode disk, an anode assembly including a water-coolable anode holder, a substrate mounted on the anode holder to serve as an anode, and a substrate holder mounting and supporting the substrate, and a reactor for applying a potential difference between opposing surfaces of the cathode assembly and the anode assembly under a vacuum state to form plasma of a raw gas. The cathode disk comes into thermal contact with the cathode holder using at least one of a self weight and a vacuum absorption force so as to permit thermal expansion of the cathode disk.

    Abstract translation: 等离子体沉积装置包括阴极组件,其包括阴极盘和支撑阴极盘的水冷阴极保持器,阳极组件,其包括水冷阳极保持器,安装在阳极保持器上用作阳极的衬底和 安装和支撑基板的基板支架,以及用于在真空状态下在阴极组件和阳极组件的相对表面之间施加电位差以形成原始气体的等离子体的反应器。 阴极盘使用自重和真空吸收力中的至少一种与阴极保持器热接触,以允许阴极盘的热膨胀。

    Method for the deposition of diamond film by high density direct current
glow discharge
    9.
    发明授权
    Method for the deposition of diamond film by high density direct current glow discharge 失效
    通过高密度直流辉光放电沉积金刚石膜的方法

    公开(公告)号:US5476693A

    公开(公告)日:1995-12-19

    申请号:US348110

    申请日:1994-11-25

    CPC classification number: C23C16/272 Y10T428/30

    Abstract: There is disclosed a method for depositing a diamond film on a substrate which utilizes high density direct current glow discharge at a glow-arc transition region to form plasma between a cathode and an anode in a reactor, wherein the cathode maintains its temperature at a range of 2,100 to 2,300.degree. C. and is composed of a plurality of U-shaped filaments which are aligned parallel to one another to form an array and each of which is made by bending a conductive wire.

    Abstract translation: 公开了一种在衬底上沉积金刚石膜的方法,其在辉光弧过渡区域利用高密度直流辉光放电,以在反应器中在阴极和阳极之间形成等离子体,其中阴极保持其温度在一定范围内 为2100〜2300℃,并且由多个相互平行排列的U形长丝组成,形成阵列,并且各自通过弯曲导线制成。

    Method for DC plasma assisted chemical vapor deposition in the absence of a positive column
    10.
    发明授权
    Method for DC plasma assisted chemical vapor deposition in the absence of a positive column 有权
    在没有正性柱的情况下进行直流等离子体辅助化学气相沉积的方法

    公开(公告)号:US08334027B2

    公开(公告)日:2012-12-18

    申请号:US11833679

    申请日:2007-08-03

    CPC classification number: C23C16/503 C23C16/272 Y10T428/268

    Abstract: In the method for depositing a material in the absence of a positive column, a discharge is generated between a cathode and an anode disposed to face each other in a reaction chamber by applying a DC voltage therebetween, and introducing reaction gas into the reaction chamber, thereby depositing a material on a substrate mounted on the anode and serving as a part of the anode, wherein the deposition of the material on the substrate is performed under a state that a cathode glow and an anode glow exist in a form of thin layers coating respectively the surfaces of the cathode and the substrate, while a positive column does not exist or is so small as to be negligible.

    Abstract translation: 在不存在正极柱时沉积材料的方法中,通过在反应室中施加直流电压,在反应室内彼此面对的阴极和阳极之间产生放电,并将反应气体引入反应室, 从而将材料沉积在安装在阳极上并用作阳极的一部分的衬底上,其中材料在衬底上的沉积在阴极辉光和阳极辉光以薄层涂层形式存在的状态下进行 分别是阴极和衬底的表面,而正柱不存在或太小以致可以忽略。

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