THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF 有权
    薄膜晶体管阵列基板及其制造方法

    公开(公告)号:US20110168997A1

    公开(公告)日:2011-07-14

    申请号:US13006591

    申请日:2011-01-14

    IPC分类号: H01L29/786 H01L21/336

    摘要: A thin film transistor (TFT) array substrate and a manufacturing method thereof are provided. The TFT array substrate may include a gate line disposed on a substrate and including a gate line and a gate electrode, an oxide semiconductor layer pattern disposed on the gate electrode, a data line disposed on the oxide semiconductor layer pattern and including a source electrode and a drain electrode of a thin film transistor (TFT) together with the gate electrode, and a data line extending in a direction intersecting the gate line, and etch stop patterns disposed at an area where the TFT is formed between the source/drain electrodes and the oxide semiconductor layer pattern and at an area where the gate line and the data line overlap each other between the gate line and the data line.

    摘要翻译: 提供薄膜晶体管(TFT)阵列基板及其制造方法。 TFT阵列基板可以包括设置在基板上的栅极线,包括栅极线和栅电极,设置在栅电极上的氧化物半导体层图案,设置在氧化物半导体层图案上的数据线,并且包括源电极和 薄膜晶体管(TFT)的漏电极和栅电极以及沿着与栅极线交叉的方向延伸的数据线,以及蚀刻停止图案,设置在源极/漏极之间形成TFT的区域,以及 氧化物半导体层图案和栅极线与数据线在栅极线与数据线之间重叠的区域。