THIN FILM TRANSISTOR PANEL AND FABRICATING METHOD THEREOF
    3.
    发明申请
    THIN FILM TRANSISTOR PANEL AND FABRICATING METHOD THEREOF 有权
    薄膜晶体管面板及其制作方法

    公开(公告)号:US20110272696A1

    公开(公告)日:2011-11-10

    申请号:US13092882

    申请日:2011-04-22

    摘要: A thin film transistor panel includes a substrate, a light blocking layer on the substrate, a first protective film on the light blocking layer, a first electrode and a second electrode on the first protective film, an oxide semiconductor layer on a portion of the first protective film exposed between the first electrode and the second electrode, an insulating layer, a third electrode overlapping with the oxide semiconductor layer and on the insulating layer, and a fourth electrode on the insulating layer. The light blocking layer includes first sidewalls, and the first protective film includes second sidewalls. The first and the second sidewalls are disposed along substantially the same line.

    摘要翻译: 薄膜晶体管面板包括基板,基板上的阻光层,遮光层上的第一保护膜,第一保护膜上的第一电极和第二电极,第一保护膜的一部分上的氧化物半导体层 在第一电极和第二电极之间暴露的保护膜,绝缘层,与氧化物半导体层重叠的绝缘层和绝缘层上的第四电极。 遮光层包括第一侧壁,并且第一保护膜包括第二侧壁。 第一和第二侧壁沿着基本相同的线设置。

    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF FABRICATING THE SAME
    4.
    发明申请
    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF FABRICATING THE SAME 有权
    薄膜晶体管阵列基板及其制造方法

    公开(公告)号:US20120037906A1

    公开(公告)日:2012-02-16

    申请号:US13115088

    申请日:2011-05-24

    IPC分类号: H01L29/786 H01L21/44

    摘要: A thin film transistor array substrate capable of reducing degradation of a device due to degradation of an oxide semiconductor pattern and a method of fabricating the same are provided. The thin film transistor array substrate may include an insulating substrate on which a gate electrode is formed, a gate insulating film formed on the insulating substrate, an oxide semiconductor pattern disposed on the gate insulating film, an anti-etching pattern formed on the oxide semiconductor pattern, and a source electrode and a drain electrode formed on the anti-etching pattern. The oxide semiconductor pattern may include an edge portion positioned between the source electrode and the drain electrode, and the edge portion may include at least one conductive region and at least one non-conductive region.

    摘要翻译: 提供了能够降低由于氧化物半导体图案的劣化引起的器件劣化的薄膜晶体管阵列基板及其制造方法。 薄膜晶体管阵列基板可以包括其上形成有栅极的绝缘基板,形成在绝缘基板上的栅极绝缘膜,设置在栅极绝缘膜上的氧化物半导体图案,形成在氧化物半导体上的抗蚀刻图案 图案,以及形成在防蚀刻图案上的源电极和漏电极。 氧化物半导体图案可以包括位于源电极和漏电极之间的边缘部分,并且边缘部分可以包括至少一个导电区域和至少一个非导电区域。