公开(公告)号：US20050150461A1

公开(公告)日：2005-07-14

申请号：US10910417

申请日：2004-08-04

申请人： Young-eal Kim ,  Sang-jun Choi ,  Dong-joon Ma

发明人： Young-eal Kim ,  Sang-jun Choi ,  Dong-joon Ma

IPC分类号： C23C14/24 ,  C23C14/00 ,  C23C14/50 ,  C23C16/00 ,  H01L21/68 ,  H01L21/687

CPC分类号： C23C14/505 ,  C23C14/243 ,  H01L21/68707

摘要： A deposition apparatus of depositing deposition material on a wafer in a vacuum chamber includes a deposition boat installed in the vacuum chamber to vaporize the deposition material, a wafer guide on which the wafer is loaded, the wafer guide having a rotational member rotating together with the wafer, a wafer-rotation device rotating the rotational member when the wafer guide approaches, and a wafer-transfer device reciprocating the wafer guide between an inlet of the vacuum chamber, the deposition boat and the wafer-rotation device.

摘要翻译： 在真空室中在晶片上沉积沉积材料的沉积设备包括安装在真空室中以蒸发沉积材料的沉积舟，加载晶片的晶片引导件，晶片引导件具有与 晶片转动装置，当晶片导向件接近时旋转旋转构件的晶片旋转装置以及在真空室的入口，沉积舟和晶片旋转装置之间使晶片导向件往复运动的晶片传送装置。

公开(公告)号：US20050129848A1

公开(公告)日：2005-06-16

申请号：US10902798

申请日：2004-08-02

申请人： Sang-jun Choi ,  Young-eal Kim ,  Dong-joon Ma

发明人： Sang-jun Choi ,  Young-eal Kim ,  Dong-joon Ma

IPC分类号： H01L21/203 ,  C23C14/24 ,  C23C16/00

CPC分类号： C23C14/243

摘要： Provided is a patterned deposition source unit for forming a thin film on a substrate and a deposition method using the same. The patterned deposition source unit includes a main body that includes a loading section for loading a deposition material and a cover unit, which covers openings of the loading section and has a plurality of line shaped openings. The deposition material vaporized through line shaped openings of the cover unit can be vertically deposited on the substrate which moves back and forth over the main body. The method enables the improvement in the uniformity of a thin film by preventing dispersion of the deposition material in a conventional depositor, and the improvement in the density of a thin film by increasing vapor flux per unit area by reducing the distance between the deposition source unit and the substrate.

摘要翻译： 提供了一种用于在基板上形成薄膜的图案化沉积源单元和使用其的沉积方法。 图案化沉积源单元包括主体，该主体包括用于装载沉积材料的装载部分和覆盖装置，其覆盖装载部分的开口并且具有多个线状开口。 通过盖单元的线形开口蒸发的沉积材料可以垂直地沉积在基板上，该基板在主体上前后移动。 该方法通过防止沉积材料在常规沉积物中的分散而提高薄膜的均匀性，并且通过减小沉积源单元之间的距离来提高薄膜的密度，通过增加单位面积的蒸气通量来提高薄膜的密度 和基板。

公开(公告)号：US06966952B2

公开(公告)日：2005-11-22

申请号：US10910417

申请日：2004-08-04

申请人： Young-eal Kim ,  Sang-jun Choi ,  Dong-joon Ma

发明人： Young-eal Kim ,  Sang-jun Choi ,  Dong-joon Ma

IPC分类号： C23C14/24 ,  C23C14/00 ,  C23C14/50 ,  C23C16/00 ,  H01L21/68 ,  H01L21/687

CPC分类号： C23C14/505 ,  C23C14/243 ,  H01L21/68707

摘要： A deposition apparatus of depositing deposition material on a wafer in a vacuum chamber includes a deposition boat installed in the vacuum chamber to vaporize the deposition material, a wafer guide on which the wafer is loaded, the wafer guide having a rotational member rotating together with the wafer, a wafer-rotation device rotating the rotational member when the wafer guide approaches, and a wafer-transfer device reciprocating the wafer guide between an inlet of the vacuum chamber, the deposition boat and the wafer-rotation device.

公开(公告)号：US20100200908A1

公开(公告)日：2010-08-12

申请号：US12656681

申请日：2010-02-12

申请人： Jung-hyun Lee ,  Young-eal Kim ,  Chang-soo Lee ,  Dong-joon Ma

发明人： Jung-hyun Lee ,  Young-eal Kim ,  Chang-soo Lee ,  Dong-joon Ma

IPC分类号： H01L27/115 ,  H01L21/8246

CPC分类号： H01L27/11578 ,  G11C16/0483 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11582

摘要： Provided are a nonvolatile memory device having a vertical folding structure and a method of manufacturing the nonvolatile memory device. A semiconductor structure includes first and second portions that are substantially vertical. A plurality of memory cells are arranged along the first and second portions of the semiconductor structure and are serially connected.

摘要翻译： 提供一种具有垂直折叠结构的非易失性存储器件和制造非易失性存储器件的方法。 半导体结构包括基本垂直的第一和第二部分。 沿着半导体结构的第一和第二部分布置多个存储单元并串联连接。

公开(公告)号：US08299521B2

公开(公告)日：2012-10-30

申请号：US12656681

申请日：2010-02-12

申请人： Jung-hyun Lee ,  Young-eal Kim ,  Chang-soo Lee ,  Dong-joon Ma

发明人： Jung-hyun Lee ,  Young-eal Kim ,  Chang-soo Lee ,  Dong-joon Ma

IPC分类号： H01L29/72

CPC分类号： H01L27/11578 ,  G11C16/0483 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11582

摘要： Provided are a nonvolatile memory device having a vertical folding structure and a method of manufacturing the nonvolatile memory device. A semiconductor structure includes first and second portions that are substantially vertical. A plurality of memory cells are arranged along the first and second portions of the semiconductor structure and are serially connected.

摘要翻译： 提供一种具有垂直折叠结构的非易失性存储器件和制造非易失性存储器件的方法。 半导体结构包括基本垂直的第一和第二部分。 沿着半导体结构的第一和第二部分布置多个存储单元并串联连接。

公开(公告)号：US20060113928A1

公开(公告)日：2006-06-01

申请号：US11288386

申请日：2005-11-29

申请人： Won-taek Park ,  Vladimir Volynets ,  Young-eal Kim

发明人： Won-taek Park ,  Vladimir Volynets ,  Young-eal Kim

IPC分类号： H05H7/00

CPC分类号： H05H1/54 ,  H01J27/14

摘要： An electromagnetic induced accelerator based on coil-turn modulation, including inner and outer cylinders with different diameters, the cylinders being coaxially disposed to form a channel which is a spatial portion therebetween; a discharging coil wound spirally inward along the upper surface of the channel for generating plasma by inducing a magnetic field and secondary current in the channel; and inner and outer coils wound helically around along the inner surface of the inner cylinder and the outer surface of the outer cylinder in parallel with each other for accelerating plasma in the direction of a common axis of the inner and outer cylinders by offsetting the magnetic field induced in the direction of the axis.

摘要翻译： 一种基于线圈匝调制的电磁感应加速器，包括具有不同直径的内圆柱体和外圆柱体，该圆柱体同轴地设置以形成在其间的空间部分的通道; 沿着通道的上表面螺旋地向内缠绕的放电线圈，用于通过在通道中引起磁场和次级电流来产生等离子体; 并且内圈和外圈线圈沿着内筒的内表面和外筒的外表面螺旋地缠绕，彼此平行，以通过抵消磁场的方式在内筒和外筒的共同轴线的方向上加速等离子体 在轴的方向上感应。

公开(公告)号：US07253572B2

公开(公告)日：2007-08-07

申请号：US11288386

申请日：2005-11-29

申请人： Won-taek Park ,  Vladimir Volynets ,  Young-eal Kim

发明人： Won-taek Park ,  Vladimir Volynets ,  Young-eal Kim

IPC分类号： H05H7/00

CPC分类号： H05H1/54 ,  H01J27/14

摘要： An electromagnetic induced accelerator based on coil-turn modulation, including inner and outer cylinders with different diameters, the cylinders being coaxially disposed to form a channel which is a spatial portion therebetween; a discharging coil wound spirally inward along the upper surface of the channel for generating plasma by inducing a magnetic field and secondary current in the channel; and inner and outer coils wound helically around along the inner surface of the inner cylinder and the outer surface of the outer cylinder in parallel with each other for accelerating plasma in the direction of a common axis of the inner and outer cylinders by offsetting the magnetic field induced in the direction of the axis.

摘要翻译： 一种基于线圈匝调制的电磁感应加速器，包括具有不同直径的内圆柱体和外圆柱体，该圆柱体同轴地设置以形成在其间的空间部分的通道; 沿着通道的上表面螺旋地向内缠绕的放电线圈，用于通过在通道中引起磁场和次级电流来产生等离子体; 并且内圈和外圈线圈沿着内筒的内表面和外筒的外表面螺旋地缠绕，彼此平行，以通过抵消磁场的方式在内筒和外筒的共同轴线的方向上加速等离子体 在轴的方向上感应。