公开(公告)号：US5521522A

公开(公告)日：1996-05-28

申请号：US151367

申请日：1993-11-12

申请人： Yuichi Abe ,  Masao Yamaguchi ,  Munetosi Nagasaka

发明人： Yuichi Abe ,  Masao Yamaguchi ,  Munetosi Nagasaka

IPC分类号： G01R1/073 ,  G01R31/28 ,  H01L21/66 ,  H01R13/24 ,  G01R1/06

CPC分类号： G01R1/07314 ,  G01R1/073 ,  G01R31/2831

摘要： There is provided a probe apparatus with a stage for holding a wafer on which a plurality of chips are regularly arranged such that the chips are arranged substantially in an XY plane, a large number of contactors facing the wafer held on the stage, provided to corresponding to respective pads of the chips such as to be brought into contact collectively with the pads of all the device circuits on the wafer, tester for transmitting/receiving a test signal to/from the device via the contactors, elevator device for elevating the stage in a Z-axis direction, alignment device for moving the stage in an X-axis and/or Y-axis direction, and controller for controlling the alignment device and the elevator device.

摘要翻译： 提供了一种具有用于保持晶片的载台的探针装置，其上规则地布置有多个芯片，使得芯片基本上布置在XY平面中，大量接触器面对保持在载物台上的晶片，提供给相应的 到芯片的相应焊盘，以便与晶片上的所有器件电路的焊盘集体接触，用于经由接触器发送/接收来自器件的测试信号的测试器，用于将级的升高的电梯设备 Z轴方向，用于在X轴和/或Y轴方向上移动平台的对准装置，以及用于控制对准装置和电梯装置的控制器。