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公开(公告)号:US09330953B2
公开(公告)日:2016-05-03
申请号:US14005880
申请日:2012-03-23
申请人: Yukio Miura , Shinichi Maeta , Takashi Satou , Kei Furuuchi
发明人: Yukio Miura , Shinichi Maeta , Takashi Satou , Kei Furuuchi
IPC分类号: H05B3/68 , C23C16/00 , H01L21/683 , H01L21/67
CPC分类号: H01L21/6833 , H01L21/67109 , H01L21/6831 , Y10T279/23
摘要: An electrostatic chuck device (1) according to the invention includes an electrostatic chuck section (2) that has a principal surface as a placement surface on which a plate-shaped sample is placed, and is made to have an internal electrode for electrostatic adsorption built-in, and a cooling plate section (3) that cools the electrostatic chuck section (2), wherein a heating member (5) is bonded to a principal surface on the opposite side to the placement surface of the electrostatic chuck section (2) through a first adhesive material layer (4), and the electrostatic chuck section (2) and the heating member (5) are bonded to and integrated with the cooling plate section (3) through an acrylic adhesive layer (9) having flexibility and insulation properties.
摘要翻译: 根据本发明的静电吸盘装置(1)包括:静电吸盘部分(2),其具有主表面作为其上放置板形样品的放置表面,并且制成具有用于静电吸附的内部电极 以及冷却静电卡盘部(2)的冷却板部(3),其中,在静电卡盘部(2)的配置面的相反侧的主面上接合有加热部件(5) 通过第一粘合材料层(4),并且静电吸盘部分(2)和加热部件(5)通过具有柔性和绝缘性的丙烯酸粘合剂层(9)与冷却板部分(3)结合并与其一体化 属性。
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公开(公告)号:US20140008880A1
公开(公告)日:2014-01-09
申请号:US14005880
申请日:2012-03-23
申请人: Yukio Miura , Shinichi Maeta , Takashi Satou , Kei Furuuchi
发明人: Yukio Miura , Shinichi Maeta , Takashi Satou , Kei Furuuchi
IPC分类号: H01L21/683
CPC分类号: H01L21/6833 , H01L21/67109 , H01L21/6831 , Y10T279/23
摘要: An electrostatic chuck device (1) according to the invention includes an electrostatic chuck section (2) that has a principal surface as a placement surface on which a plate-shaped sample is placed, and is made to have an internal electrode for electrostatic adsorption built-in, and a cooling plate section (3) that cools the electrostatic chuck section (2), wherein a heating member (5) is bonded to a principal surface on the opposite side to the placement surface of the electrostatic chuck section (2) through a first adhesive material layer (4), and the electrostatic chuck section (2) and the heating member (5) are bonded to and integrated with the cooling plate section (3) through an acrylic adhesive layer (9) having flexibility and insulation properties.
摘要翻译: 根据本发明的静电吸盘装置(1)包括:静电吸盘部分(2),其具有主表面作为其上放置板形样品的放置表面,并且制成具有用于静电吸附的内部电极 以及冷却静电卡盘部(2)的冷却板部(3),其中,在静电卡盘部(2)的配置面的相反侧的主面上接合有加热部件(5) 通过第一粘合材料层(4),并且静电吸盘部分(2)和加热部件(5)通过具有柔性和绝缘性的丙烯酸粘合剂层(9)与冷却板部分(3)结合并与其一体化 属性。
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公开(公告)号:US20100026119A1
公开(公告)日:2010-02-04
申请号:US12533393
申请日:2009-07-31
申请人: Yukio Miura , Mitsuaki Shioiri
发明人: Yukio Miura , Mitsuaki Shioiri
IPC分类号: H02K5/16
CPC分类号: H02K5/1732 , F16C19/06 , F16C35/067 , F16C2226/10 , F16C2380/26
摘要: A motor, in which a creep phenomenon can be prevented and a ball bearing can readily be mounted, is provided. A pair of end brackets each have a bearing hole in which a ball bearing is fitted. A pair of ball bearings are fitted into the bearing holes of the end brackets such that an outer race portion of each ball bearing may abut on a first wall surface and a second wall surface of the end bracket. A stopper fitting is pushed into a recessed portion of the end bracket until a ring portion of the stopper fitting abuts on the outer race portion of the ball bearing. Six engaging pieces of the stopper fitting are engaged in a fourth wall surface defining the recessed portion due to a restoring force of the engaging pieces, which have been resiliently bent or warped, to restore from the bent or warped state. Thus, each ball bearing is tightly fixed in the bearing hole by means of the stopper fitting.
摘要翻译: 提供了可以防止蠕变现象并容易安装滚珠轴承的电动机。 一对端托架各有一个轴承孔,球轴承装在该轴承孔中。 一对滚珠轴承安装在端托架的轴承孔中,使得每个滚珠轴承的外圈部分可抵靠在端托架的第一壁面和第二壁面上。 止动器配件被推入端托架的凹入部分中,直到止动件配件的环形部分抵接在球轴承的外圈部分上。 止动配件的六个接合件由于已被弹性弯曲或翘曲的接合件的恢复力而啮合在限定凹部的第四壁表面中,以从弯曲或翘曲状态恢复。 因此,每个滚珠轴承通过止动器配件紧密地固定在轴承孔中。
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公开(公告)号:US07541949B2
公开(公告)日:2009-06-02
申请号:US12018502
申请日:2008-01-23
申请人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
发明人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
IPC分类号: H03M7/12
CPC分类号: H03M5/08
摘要: A receiving device is provided. A pulse width is measured, it is selected whether a determination process is performed for a pulse width having the length of one bit in accordance with the measured value of the pulse width or a pulse width having the length of ½ bit, it is discriminated whether a current pulse edge is a pulse edge at the center of the bit or a pulse edge at the boundary between bits while considering the bit data right before the determined bit, and when it is determined that the current pulse edge is the pulse edge at the center of the bit, the bit data is determined by the rising edge or the falling edge of the pulse edge.
摘要翻译: 提供接收装置。 测量脉冲宽度,根据脉冲宽度的测量值或长度为1/2位的脉冲宽度来选择是否对具有一位长度的脉冲宽度执行确定处理,判别是否 当前脉冲沿是比特的中心处的脉冲边缘或位置边界之间的脉冲边缘,同时考虑在确定的位之前的位数据,并且当确定当前脉冲沿是在 位的中心,位数据由脉冲沿的上升沿或下降沿决定。
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公开(公告)号:US20060256691A1
公开(公告)日:2006-11-16
申请号:US11418743
申请日:2006-05-04
申请人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
发明人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
IPC分类号: G11B20/10
CPC分类号: H03M5/08
摘要: A receiving device is provided. A pulse width is measured, it is selected whether a determination process is performed for a pulse width having the length of one bit in accordance with the measured value of the pulse width or a pulse width having the length of ½ bit, it is discriminated whether a current pulse edge is a pulse edge at the center of the bit or a pulse edge at the boundary between bits while considering the bit data right before the determined bit, and when it is determined that the current pulse edge is the pulse edge at the center of the bit, the bit data is determined by the rising edge or the falling edge of the pulse edge.
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公开(公告)号:US5498121A
公开(公告)日:1996-03-12
申请号:US243320
申请日:1994-05-16
申请人: Yoshinori Todo , Masami Sakamoto , Noriaki Ushijima , Akira Sonoda , Yukio Miura , Kyousuke Araki
发明人: Yoshinori Todo , Masami Sakamoto , Noriaki Ushijima , Akira Sonoda , Yukio Miura , Kyousuke Araki
CPC分类号: B25J19/0091 , B21J13/08 , B25J9/1065 , Y10S414/13 , Y10T74/20335
摘要: When an impact load is applied to a workpiece which is held by the robot, the impact force can be absorbed. The robot includes a grip 3 for holding a workpiece to which an impact load is applied and a buffer mechanism disposed between the grip 3 and a robot arm 2. The buffer mechanism 4 includes two parallel link mechanisms 5, 6 for enabling the grip 3 to be moved in various directions and hydraulic actuator mechanisms 7, 8 for relaxing the actuation of the parallel link mechanisms 5, 6. When an impact force is applied to the grip 3, two parallel link mechanisms 5, 6 are actuated so that the grip 3 is slightly displaced while the hydraulic actuator mechanisms 5, 6 relax the actuation of the parallel link mechanisms 7, 8. Therefore, the impact force which is applied to the grip 3 can be absorbed. Additionally, after the impact force is applied to the grip 3, the buffer mechanism 4 can immediately be returned automatically to the initial position.
摘要翻译: 当对由机器人保持的工件施加冲击载荷时,可以吸收冲击力。 机器人包括用于保持施加冲击载荷的工件的手柄3和设置在把手3和机器人臂2之间的缓冲机构。缓冲机构4包括两个平行的连杆机构5,6, 在各个方向上移动和用于放松平行连杆机构5,6的致动的液压致动器机构7,8。当冲击力施加到把手3时,两个平行的连杆机构5,6被致动,使得把手3 在液压致动器机构5,6放松平行连杆机构7,8的致动时略微移动。因此,可以吸收施加到把手3的冲击力。 此外,在将冲击力施加到把手3之后,缓冲机构4可以立即自动返回到初始位置。
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公开(公告)号:US07342519B2
公开(公告)日:2008-03-11
申请号:US11418743
申请日:2006-05-04
申请人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
发明人: Yukio Miura , Noriyuki Honda , Hiroshi Ishikawa , Ryo Teramachi
IPC分类号: H03M7/12
CPC分类号: H03M5/08
摘要: A receiving device is provided. A pulse width is measured, it is selected whether a determination process is performed for a pulse width having the length of one bit in accordance with the measured value of the pulse width or a pulse width having the length of ½ bit, it is discriminated whether a current pulse edge is a pulse edge at the center of the bit or a pulse edge at the boundary between bits while considering the bit data right before the determined bit, and when it is determined that the current pulse edge is the pulse edge at the center of the bit, the bit data is determined by the rising edge or the falling edge of the pulse edge.
摘要翻译: 提供接收装置。 测量脉冲宽度,根据脉冲宽度的测量值或长度为1/2位的脉冲宽度来选择是否对具有一位长度的脉冲宽度执行确定处理,判别是否 当前脉冲沿是比特的中心处的脉冲边缘或位置边界之间的脉冲边缘,同时考虑在确定的位之前的位数据,并且当确定当前脉冲沿是在 位的中心,位数据由脉冲沿的上升沿或下降沿决定。
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公开(公告)号:US6034495A
公开(公告)日:2000-03-07
申请号:US274824
申请日:1999-03-23
申请人: Kenichi Tamagawa , Yukio Miura
发明人: Kenichi Tamagawa , Yukio Miura
CPC分类号: H02H7/0851
摘要: An apparatus for detecting the pinching of an object of a power window which stops the detection of the pinching when a normal pulse edge interval of a two-phase pulse is not obtained is disclosed. The apparatus comprises a motor 4 for opening/closing a window, a motor driving unit 3, a pulse generating unit 5 for generating a two-phase pulse, an MCU 2, and a switching arrangement 1. The MCU 2 detects a motor torque from an interval between pulse edges of the two-phase pulse at the time of opening and closing the window and compares the motor torque with a preset addition value. When the motor torque exceeds the addition value, the MCU 2 determines the occurrence of the pinching of an object and stops or reverses the driving of the motor 4. A timer 14 for resetting time each time the pulse edge in the two-phase pulse arrives is disposed in the MCU 2. When a pulse edge in the two-phase pulse arrives and the next pulse edge does not arrive within the set time of the timer 14, the MCU 2 stops the determination of the presence or absence of the pinching of an object in the window.
摘要翻译: 公开了一种用于检测当没有获得两相脉冲的正常脉冲边缘间隔时停止检测到电力窗口的物体的夹持的装置。 该装置包括用于打开/关闭窗户的电动机4,电动机驱动单元3,用于产生两相脉冲的脉冲发生单元5,MCU 2和开关装置1. MCU 2检测来自 在打开和关闭窗口时的两相脉冲的脉冲边缘之间的间隔,并将电动机转矩与预设的相加值进行比较。 当电动机转矩超过相加值时,MCU2确定物体夹持的发生,并停止或反转电动机4的驱动。每当两相脉冲中的脉冲沿到达时,定时器14用于复位时间 设置在MCU2中。当两相脉冲中的脉冲边缘到达定时器14的设定时间内下一个脉冲沿没有到达时,MCU2停止确定是否存在钳位 窗口中的一个对象。
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9.
公开(公告)号:US4627553A
公开(公告)日:1986-12-09
申请号:US692913
申请日:1985-01-18
申请人: Takeomi Yoshida , Kazuhisa Yamashita , Yukio Miura
发明人: Takeomi Yoshida , Kazuhisa Yamashita , Yukio Miura
摘要: A fuel supplying apparatus comprises a fuel supplying hose having a fuel supplying nozzle provided on a tip end thereof, a preset switch comprising a fuel supplying quantity preset switch and a fuel supplying price preset switch provided on the fuel supplying hose at a position in a vicinity of the fuel supplying nozzle, where the fuel supplying quantity preset switch is for selectively and sequentially presetting the predetermined quantity of fuel for preset quantity fuel supplying operation in response to the number of manipulation times of the switch and the fuel supplying price preset switch is for selectively and sequentially presetting the predetermined price of fuel for preset price fuel supplying operation in response to the number of manipulation times of the switch, an indicator unit for indicating either one of the preset quantity and the preset price preset by the preset switch, and a control circuit for presetting either one of the preset quantity or the preset price selected from the predetermined plural number of preset quantities and the predetermined plural number of preset prices, in response to the selective manipulation of either one of the fuel supplying quantity preset switch and the fuel supplying price preset switch as well as to the number of manipulation times of the selected switch. The indicator unit indicates the preset fuel quantity or the preset fuel price preset in the control device.
摘要翻译: 燃料供给装置包括:燃料供给软管,其具有设置在其末端的燃料供给喷嘴,预设开关,其包括燃料供给量预设开关和设置在燃料供给软管上的燃料供给价格预置开关, 其中燃料供给量预设开关用于响应于开关的操作次数和燃料供应价格预设开关选择性地并且依次预设预定量的燃料以用于预设燃料供应操作,用于 响应于所述开关的操作次数,选择性地并且依次地预设所述预定价格的燃料以用于预设价格燃料供应操作;指示器单元,用于指示由所述预设开关预设的预设量和预设价格中的一个,以及 控制电路,用于预设预设数量或预设价格选择之一 响应于选择性地操纵燃料供应量预设开关和燃料供应价格预设开关中的任一个以及操作次数,预定的多个预设量和预定的多个预设价格 的选择开关。 指示器单元指示控制装置中预设的预设燃料量或预设燃料价格。
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公开(公告)号:US4627552A
公开(公告)日:1986-12-09
申请号:US663034
申请日:1984-10-19
申请人: Takeomi Yoshida , Kazuhisa Yamashita , Yukio Miura
发明人: Takeomi Yoshida , Kazuhisa Yamashita , Yukio Miura
CPC分类号: B67D7/303
摘要: A fuel supplying apparatus comprises a first circuit for measuring a flow quantity of fuel which passes through a fuel supplying hose, a single mode setting switch provided on the hose at a position in a vicinity of a nozzle, a second circuit for discriminating the state of the apparatus based on the existence of an output of the first circuit, and a third circuit for controlling the supply of fuel. The second circuit discriminates that the apparatus is set to a preset quantity supplying mode when the switch is manipulated in a state before a fuel supplying operation is started, and discriminates that the apparatus is set to an integral quantity supplying mode when the switch is manipulated in a state during the fuel supplying operation. The third circuit performs a control so that a fuel supplying quantity is preset responsive to a manipulation of the switch and a fuel supplying operation is performed with respect to the preset quantity when the apparatus is set to the preset quantity supplying mode, and an operation of supplying a minimum integral quantity of fuel which is greater than a quantity of supplied fuel at a point when the switch is manipulated is performed when the apparatus is set to the integral quantity supplying mode.
摘要翻译: 燃料供给装置包括:第一回路,其测量通过燃料供给软管的燃料的流量;在喷嘴附近的位置设置在软管上的单模设定开关;第二回路, 基于第一电路的输出的存在的装置和用于控制燃料供应的第三电路。 当在开始燃料供给操作之前的状态下操作开关时,第二电路鉴别设备被设置为预设量供应模式,并且当开关被操纵时判断该装置被设置为整体供给模式 在燃料供给操作期间的状态。 第三回路执行控制,使得响应于开关的操作而预设燃料供给量,并且当设备被设置为预设量供给模式时,相对于预设量执行燃料供给操作,并且操作 当设备被设置为整体供给模式时,执行在操作开关时提供大于供给燃料量的最小积分量的燃料。
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