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    METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE
    1.
    发明申请
    METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE 审中-公开
    制造压电振动器，压电振动器，振荡器，电子设备和无线电控制时序的方法

    公开(公告)号：US20110148249A1

    公开(公告)日：2011-06-23

    申请号：US13035426

    申请日：2011-02-25

    申请人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    发明人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    IPC分类号： H01L41/04 ,  H01L41/22

    CPC分类号： H03H9/1021 ,  H01L2224/16225 ,  H01L2924/16152 ,  H03H3/04 ,  H03H9/21 ,  H03H2003/026 ,  H03H2003/0442 ,  Y10T29/42

    摘要： Provided is method of manufacturing a piezoelectric vibrator, which includes a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to the pair of vibration arm portions, the piezoelectric vibrator being capable of improving a degree of vacuum in the package by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method having a frequency measurement process of measuring the frequency of the piezoelectric vibrating reed, and a gettering process of evaporating a part of a regulation film of a position corresponding to a front end side of the vibration arm portion when the measured frequency is higher than a permissible range and evaporating a part of the regulation film of a position of a proximal portion side of the vibration arm portion when the measured frequency is lower than the permissible range.

    摘要翻译： 提供一种制造压电振动器的方法，其包括包括一对振动臂部分的音叉型压电振动片，容纳压电振动片的封装以及沿着纵向方向形成的一对调节膜 所述振动臂部对应于所述一对振动臂部，所述压电振动器能够通过用激光照射所述调节膜来蒸发所述调节膜的一部分来提高所述封装中的真空度。 该方法具有测量压电振动片的频率的频率测量过程，以及当测量的频率高于振动臂部分的前端侧的相应位置时蒸发调节膜的一部分的吸气过程 允许范围，并且当测量的频率低于允许范围时，蒸发振动臂部分的近侧部分侧的位置的调节膜的一部分。

    Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
    2.
    发明授权
    Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece 有权
    制造压电振动器，压电振子，振荡器，电子设备和无线电控制时计的方法

    公开(公告)号：US08633775B2

    公开(公告)日：2014-01-21

    申请号：US13035519

    申请日：2011-02-25

    申请人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    发明人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    IPC分类号： H03H9/24 ,  H01L41/053 ,  H03B5/32

    CPC分类号： H03H3/04 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492

    摘要： Provided is a method of manufacturing a piezoelectric vibrator of the invention, the piezoelectric vibrator including a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to each of the pair of vibration arm portions, the piezoelectric vibrator being capable of regulating a degree of vacuum in the package more than a certain level by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method includes a gettering process of irradiating a laser in symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films.

    摘要翻译： 提供本发明的压电振动器的制造方法，所述压电振子包括具有一对振动臂部的音叉型压电振动片，容纳所述压电振动片的封装以及形成的一对调节膜 沿着与所述一对振动臂部中的每一个对应的振动臂部的纵向方向，压电振动器能够通过用激光照射调节膜来将包装中的真空度调节到一定程度以上，从而蒸发 部分调节膜。 该方法包括通过一对调节膜中的一对振动臂部的中心轴在对称位置照射激光的吸气处理。

    METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE
    3.
    发明申请
    METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE 有权
    制造压电振动器，压电振动器，振荡器，电子设备和无线电控制时序的方法

    公开(公告)号：US20110140795A1

    公开(公告)日：2011-06-16

    申请号：US13035519

    申请日：2011-02-25

    申请人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    发明人： Yumi Yamaguchi ,  Kazuyoshi Sugama

    IPC分类号： H01L41/053 ,  H03B5/32 ,  H01L41/22

    CPC分类号： H03H3/04 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026 ,  H03H2003/0492

    摘要： Provided is a method of manufacturing a piezoelectric vibrator of the invention, the piezoelectric vibrator including a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to each of the pair of vibration arm portions, the piezoelectric vibrator being capable of regulating a degree of vacuum in the package more than a certain level by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method includes a gettering process of irradiating a laser in symmetrical positions via a center axis of the pair of vibration arm portions in the pair of regulation films.

    摘要翻译： 提供本发明的压电振动器的制造方法，所述压电振子包括具有一对振动臂部的音叉型压电振动片，容纳所述压电振动片的封装以及形成的一对调节膜 沿着与所述一对振动臂部中的每一个对应的振动臂部的纵向方向，压电振动器能够通过用激光照射调节膜来将包装中的真空度调节到一定程度以上，从而蒸发 部分调节膜。 该方法包括通过一对调节膜中的一对振动臂部的中心轴在对称位置照射激光的吸气处理。

    Method of manufacturing a piezoelectric vibrator
    4.
    发明授权
    Method of manufacturing a piezoelectric vibrator 失效
    制造压电振子的方法

    公开(公告)号：US08601656B2

    公开(公告)日：2013-12-10

    申请号：US13175189

    申请日：2011-07-01

    申请人： Yoichi Funabiki ,  Masashi Numata ,  Kazuyoshi Sugama

    发明人： Yoichi Funabiki ,  Masashi Numata ,  Kazuyoshi Sugama

    IPC分类号： H03H9/21 ,  H03H9/10

    CPC分类号： H03H9/21 ,  H01L2924/0002 ,  H03H9/1021 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49165 ,  H01L2924/00

    摘要： A method of manufacturing a piezoelectric vibrator according to the invention is a method of manufacturing a piezoelectric vibrator in which a piezoelectric vibrating reed is sealed in a cavity formed between a base substrate and a lid substrate bonded to each other, the method including the steps of: inserting a core portion of a conductive rivet member, which includes a planar head portion and the core portion extending in a direction vertically to the surface of the head portion, into a penetration hole of the base substrate and bringing the head portion of the rivet member into contact with a first surface of the base substrate; attaching a laminate material having elastic properties to the first surface of the base substrate so as to cover the head portion; applying a paste-like glass frit on a second surface of the base substrate and filling the glass frit in the penetration hole; and baking and curing the glass frit.

    摘要翻译： 根据本发明的制造压电振动器的方法是一种压电振动器的制造方法，其中压电振动片被密封在形成在彼此接合的基底基板和盖基板之间的空腔中，该方法包括以下步骤： 插入导电铆钉构件的芯部，其包括平面头部部分和沿着与头部部分表面垂直的方向延伸的芯部部分到基底基板的穿透孔中并使铆钉的头部部分 构件与所述基底基板的第一表面接触; 将具有弹性的层压材料附着到所述基底基板的第一表面以覆盖所述头部; 在基底基板的第二表面上涂敷糊状玻璃料并将玻璃料填充到穿透孔中; 并烘烤和固化玻璃料。

    Glass substrate polishing method, package manufacturing method, piezoelectric vibrator, oscillator, electronic device and radio timepiece
    5.
    发明授权
    Glass substrate polishing method, package manufacturing method, piezoelectric vibrator, oscillator, electronic device and radio timepiece 失效
    玻璃基板研磨方法，封装制造方法，压电振子，振荡器，电子装置和无线电钟表

    公开(公告)号：US08540550B2

    公开(公告)日：2013-09-24

    申请号：US13163096

    申请日：2011-06-17

    申请人： Youichi Fujihira ,  Kazuyoshi Sugama

    发明人： Youichi Fujihira ,  Kazuyoshi Sugama

    IPC分类号： B24B1/00

    CPC分类号： H03H9/1021 ,  B24B37/08 ,  C03C19/00

    摘要： A glass substrate polishing method having polishing processes for polishing a glass substrate surface while supplying a polishing agent. The glass substrate polishing method is characterized in that the polishing processes include a first polishing process in which the surface of the glass substrate is polished using a first polishing pad made from a polishing cloth and a second polishing process in which the surface of the glass substrate is polished using a second polishing pad made from urethane foam.

    摘要翻译： 一种具有用于在提供抛光剂的同时研磨玻璃基板表面的抛光工艺的玻璃基板抛光方法。 玻璃基板研磨方法的特征在于，研磨工序包括使用由研磨布构成的第一研磨垫来研磨玻璃基板的表面的第一研磨工序，以及第二研磨工序，其中，玻璃基板 使用由聚氨酯泡沫制成的第二抛光垫进行抛光。

    Piezoelectric vibrator having a restriction portion for restricting scattering of a getter material, oscillator, electronic equipment and radio-controlled timepiece
    6.
    发明授权
    Piezoelectric vibrator having a restriction portion for restricting scattering of a getter material, oscillator, electronic equipment and radio-controlled timepiece 失效
    具有用于限制吸气材料的散射的限制部分的压电振动器，振荡器，电子设备和无线电控制的钟表

    公开(公告)号：US08400050B2

    公开(公告)日：2013-03-19

    申请号：US13035408

    申请日：2011-02-25

    申请人： Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

    发明人： Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

    IPC分类号： H01L41/08 ,  H03H9/19

    CPC分类号： H03H9/1021 ,  H03H9/21 ,  Y10T29/42

    摘要： A piezoelectric vibrator includes a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel and is mounted on the base substrate within the cavity; and a getter material of a metallic film that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated. A restriction portion, which is arranged in the cavity and restricts a scattering direction of the getter material evaporated by the heating to suppress a scattering amount scattering toward the vibration arm portion, is formed in the base substrate or the lid substrate.

    摘要翻译： 一种压电振动器，包括：底座基板和盖基板，它们彼此接合并形成有腔; 压电振动片，其具有平行延伸并安装在所述空腔内的所述基底基板上的一对振动臂部; 以及金属膜的吸气材料，其形成在基底基板或盖基板上，以便布置在空腔内，并且通过加热来提高空腔内的真空度。 在基底或盖基板上形成有限制部，该限制部设置在空腔中，并且限制通过加热蒸发的吸气剂材料的散射方向，以抑制向振动臂部散射的散射量。