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    ORGANIC FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
    1.
    发明申请
    ORGANIC FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
    有机膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20120100282A1

    公开(公告)日：2012-04-26

    申请号：US13015357

    申请日：2011-01-27

    申请人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

    发明人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

    IPC分类号： B05B15/04 ,  B05D5/06

    CPC分类号： C23C14/243 ,  B05D5/06 ,  C23C14/042 ,  C23C14/12 ,  H01L51/0011 ,  H01L51/56

    摘要： An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.

    摘要翻译： 有机膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 与沉积源喷嘴单元间隔开并且具有沿垂直于第一方向的第二方向布置的多个图案化狭缝的图案化缝隙片; 在所述基板和所述沉积源之间的第一阻挡构件，并与所述基板一起移动以被定位以筛选所述基板的至少一部分; 以及在所述第一阻挡构件和所述基板之间并相对于所述沉积源固定地保持的第二阻挡构件，其中所述基板与所述有机膜沉积装置间隔开，并且所述基板或所述有机膜沉积装置中的至少一个相对于 另一个。

    Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
    2.
    发明授权
    Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
    有机膜沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法

    公开(公告)号：US09388488B2

    公开(公告)日：2016-07-12

    申请号：US13015357

    申请日：2011-01-27

    申请人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

    发明人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

    IPC分类号： B05D1/32 ,  B05D5/06 ,  C23C14/24 ,  C23C14/04 ,  C23C14/12 ,  H01L51/00 ,  H01L51/56

    CPC分类号： C23C14/243 ,  B05D5/06 ,  C23C14/042 ,  C23C14/12 ,  H01L51/0011 ,  H01L51/56

    摘要： An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.

    摘要翻译： 有机膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 与沉积源喷嘴单元间隔开并且具有沿垂直于第一方向的第二方向布置的多个图案化狭缝的图案化缝隙片; 在所述基板和所述沉积源之间的第一阻挡构件，并与所述基板一起移动以被定位以筛选所述基板的至少一部分; 以及在所述第一阻挡构件和所述基板之间并相对于所述沉积源固定地保持的第二阻挡构件，其中所述基板与所述有机膜沉积设备间隔开，并且所述基板或所述有机膜沉积设备中的至少一个相对于 另一个。

    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
    10.
    发明授权
    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
    薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置

    公开(公告)号：US08921831B2

    公开(公告)日：2014-12-30

    申请号：US12836760

    申请日：2010-07-15

    申请人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    发明人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    IPC分类号： H01L51/05 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.

    摘要翻译： 一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。