公开(公告)号：US07964845B2

公开(公告)日：2011-06-21

申请号：US12289089

申请日：2008-10-20

申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

IPC分类号： H01J37/28 ,  G01N13/10

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US06963069B2

公开(公告)日：2005-11-08

申请号：US10767262

申请日：2004-01-30

申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

IPC分类号： H01J37/09 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US20090050803A1

公开(公告)日：2009-02-26

申请号：US12289089

申请日：2008-10-20

申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US20070235645A1

公开(公告)日：2007-10-11

申请号：US11240391

申请日：2005-10-03

申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US07456403B2

公开(公告)日：2008-11-25

申请号：US11240391

申请日：2005-10-03

申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

IPC分类号： H01J37/26 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US06963067B2

公开(公告)日：2005-11-08

申请号：US10750838

申请日：2004-01-05

申请人： Shuichi Takeuchi ,  Mine Nakagawa ,  Mitsugu Sato ,  Atsushi Takane ,  Kazutaka Nimura

发明人： Shuichi Takeuchi ,  Mine Nakagawa ,  Mitsugu Sato ,  Atsushi Takane ,  Kazutaka Nimura

IPC分类号： G01B15/04 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/21 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  G21K7/00

CPC分类号： H01J37/21 ,  H01J37/28

摘要： The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.

摘要翻译： 本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。 本发明的观察方法，通过使焦点深度扩大获得的图像的整个图像的整个区域的高度（高度差）从不同的视野角的多张图像对焦在整个图像上。 功能，从而由每个像素创建高度信息的地图（Z图），并将三维图像显示为鸟瞰图。 该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射，这使得可以清楚地了解内部独特成分的物质的空间分布 例子。