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    Charged particle beam device
    1.
    发明申请
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US20090050803A1

    公开(公告)日：2009-02-26

    申请号：US12289089

    申请日：2008-10-20

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： G21K7/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    2.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US07964845B2

    公开(公告)日：2011-06-21

    申请号：US12289089

    申请日：2008-10-20

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： H01J37/28 ,  G01N13/10

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    3.
    发明申请
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US20070235645A1

    公开(公告)日：2007-10-11

    申请号：US11240391

    申请日：2005-10-03

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    IPC分类号： G21K7/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    4.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US07456403B2

    公开(公告)日：2008-11-25

    申请号：US11240391

    申请日：2005-10-03

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    IPC分类号： H01J37/26 ,  H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    5.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US06963069B2

    公开(公告)日：2005-11-08

    申请号：US10767262

    申请日：2004-01-30

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： H01J37/09 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    CHARGED PARTICLE BEAM APPARATUS
    8.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权
    充电颗粒光束装置

    公开(公告)号：US20140131590A1

    公开(公告)日：2014-05-15

    申请号：US14232279

    申请日：2012-05-28

    申请人： Kunji Shigeto ,  Mitsugu Sato ,  Noriko Iizumi ,  Hiroyuki Noda ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi ,  Shinichi Tomita ,  Ryuichiro Tamochi

    发明人： Kunji Shigeto ,  Mitsugu Sato ,  Noriko Iizumi ,  Hiroyuki Noda ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi ,  Shinichi Tomita ,  Ryuichiro Tamochi

    IPC分类号： H01J37/153 ,  H01J37/10

    CPC分类号： H01J37/153 ,  H01J37/10 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/21

    摘要： In recent years, a range of users for a charged particle beam apparatus such as a scanning electron microscope has been broadened. All users want to learn a manual adjustment technology, but it is very difficult to adjust all parameters for observation to have an appropriate value. Therefore, a beginner is unlikely to sufficiently show a performance of an apparatus. This disclosure aims to provide the charged particle beam apparatus including a parameter adjustment practice function for allowing any user to easily learn the manual adjustment technology.In order to solve the above-described problem, there is provided means for practicing a focus adjustment and a stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.

    摘要翻译： 近年来，扫描型电子显微镜等带电粒子束装置的使用范围已经扩大。 所有用户想要学习手动调整技术，但是很难调整所有观察参数以获得适当的值。 因此，初学者不太可能充分显示设备的性能。 本公开旨在提供包括用于允许任何用户容易地学习手动调整技术的参数调整实践功能的带电粒子束装置。 为了解决上述问题，提供了用于实施焦点调整和柱头调节的装置。 根据使用者的操作设定物镜，X形扫描器和Y型标枪器的聚焦结构的控制条件。 根据一组焦点调整，设置了X字样调整和Y字符调整，从存储装置读出与控制条件相对应的实用目的图像，并将其显示在屏幕上。

    ION MILLING DEVICE AND ION MILLING PROCESSING METHOD
    10.
    发明申请
    ION MILLING DEVICE AND ION MILLING PROCESSING METHOD 有权
    离子切割装置和离子切割加工方法

    公开(公告)号：US20130240353A1

    公开(公告)日：2013-09-19

    申请号：US13988506

    申请日：2011-11-21

    申请人： Shunya Watanabe ,  Mami Konomi ,  Hisayuki Takasu ,  Atsushi Kamino

    发明人： Shunya Watanabe ,  Mami Konomi ,  Hisayuki Takasu ,  Atsushi Kamino

    IPC分类号： H01J37/305

    CPC分类号： H01J37/3053 ,  H01J37/20 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/2802 ,  H01J2237/31745

    摘要： The sample 3 is tilted/oscillated with respect to the optical axis (Z-axis) of the ion beam 2 to repeat tilt and tilt/restoration of a processing target surface 3a of the sample 3 between a surface state in which the processing target surface 3a of the sample 3 faces a tilt axis direction (Y-axis direction) and a tilted surface state in which a portion of the processing target surface 3a on the sample stage side protrudes in the tilt axis direction (Y-axis direction) than does a portion of the processing target surface 3 on the mask side, so that the processing target surface 3a is irradiated with the ion beam 2 at a low angle, and projections/recesses 63 derived from a void 61 or a dissimilar material 62 are suppressed. Accordingly, it is possible to suppress generation of projections/recesses derived from a void or dissimilar material in fabrication of a cross section sample, and thus fabricate a sample cross section suitable for observation/analysis.

    摘要翻译： 样品3相对于离子束2的光轴（Z轴）倾斜/振荡，以在样品3的处理目标表面3a之间重叠倾斜和倾斜/恢复处理目标表面 样品3的3a面向倾斜轴方向（Y轴方向）和倾斜表面状态，其中样品台侧的处理对象表面3a的一部分在倾斜轴线方向（Y轴方向）上突出于倾斜轴方向 处理对象面3的掩模侧的一部分，使得处理对象面3a以低角度照射离子束2，抑制从空隙61或异种材料62得到的突起/凹部63。 因此，在横截面试样的制造中，可以抑制从空隙或异种材料得到的突起/凹部的产生，从而制造适于观察/分析的试样截面。