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    Charged particle beam device
    1.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US07964845B2

    公开(公告)日：2011-06-21

    申请号：US12289089

    申请日：2008-10-20

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： H01J37/28 ,  G01N13/10

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    2.
    发明申请
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US20070235645A1

    公开(公告)日：2007-10-11

    申请号：US11240391

    申请日：2005-10-03

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    IPC分类号： G21K7/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    3.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US07456403B2

    公开(公告)日：2008-11-25

    申请号：US11240391

    申请日：2005-10-03

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

    IPC分类号： H01J37/26 ,  H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    4.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US06963069B2

    公开(公告)日：2005-11-08

    申请号：US10767262

    申请日：2004-01-30

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： H01J37/09 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Charged particle beam device
    5.
    发明申请
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US20090050803A1

    公开(公告)日：2009-02-26

    申请号：US12289089

    申请日：2008-10-20

    申请人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    发明人： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto ,  Akinari Morikawa

    IPC分类号： G21K7/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

    Thermal transfer image-receiving sheet
    8.
    发明授权
    Thermal transfer image-receiving sheet 失效
    热转印图像接收片

    公开(公告)号：US5856270A

    公开(公告)日：1999-01-05

    申请号：US891207

    申请日：1997-07-10

    申请人： Atsushi Muto

    发明人： Atsushi Muto

    IPC分类号： B41M5/382 ,  B41M5/00 ,  B41M5/395 ,  B41M5/44 ,  B41M5/50 ,  B41M5/52 ,  B41M5/035 ,  B41M5/38

    CPC分类号： B41M5/44 ,  B41M5/38214 ,  Y10S428/913 ,  Y10S428/914 ,  Y10T428/24942 ,  Y10T428/2495 ,  Y10T428/31913

    摘要： A thermal transfer image-receiving sheet which has excellent printability such as high printing sensitivity and which is not curled greatly when stored even in a high-temperature and/or high-humidity environment.In the thermal transfer image-receiving sheet in which at least a coloring-material-receptive layer 2 (which will be the face of the image-receiving sheet), a resin layer 3 having minute voids, a support 4, and a backing layer 5 useful for preventing curling are successively laminated in the mentioned order, the backing layer is formed as a laminate of at least two layers 5a and 5b made from different resins. For instance, in the case where a polypropylene film having minute voids is used as the resin layer 3 having minute voids, it is preferable to form the backing layer 5 by the combination use of a polyethylene layer whose behavior in shrinkage is relatively similar to that of the polypropylene film having minute voids, especially a high-density polyethylene layer excellent in water vapor barrier characteristics, and a polypropylene layer excellent in thermal stability, by taking the balance between the total thickness of the layers provided on the surface of the support and the thickness of the backing layer into consideration.

    摘要翻译： 一种热转印图像接收片材，其具有优异的可印刷性，例如高印刷灵敏度，并且即使在高温和/或高湿度环境下储存时也不会大大卷曲。 在其中至少着色材料接收层2（将成为图像接收片的表面）的热转印图像接收片材，具有微小空隙的树脂层3，支撑体4和背衬层 可用于防止卷曲的粘合剂5以上述顺序依次层压，背衬层形成为由不同树脂制成的至少两层5a和5b的叠层。 例如，在使用具有微小空隙的聚丙烯膜作为具有微小空隙的树脂层3的情况下，优选通过组合使用聚乙烯层形成背衬层5，聚乙烯层的收缩行为与 的具有微小空隙的聚丙烯膜，特别是水蒸气阻隔特性优异的高密度聚乙烯层，以及热稳定性优异的聚丙烯层，通过将设置在载体表面上的层的总厚度与 考虑背衬层的厚度。

    LIQUID EJECTING APPARATUS
    9.
    发明申请
    LIQUID EJECTING APPARATUS 有权
    液体喷射装置

    公开(公告)号：US20120200644A1

    公开(公告)日：2012-08-09

    申请号：US13361813

    申请日：2012-01-30

    申请人： Atsushi Muto

    发明人： Atsushi Muto

    IPC分类号： B41J2/175

    CPC分类号： B41J2/17509 ,  B41J2/175 ,  B41J2/17596

    摘要： A liquid ejecting apparatus includes a liquid ejection head that reciprocates, a liquid supplying flow channel supplies a ink to the liquid ejection head, a non-return valve in the liquid supplying flow channel that opens when ink flows from an upstream region to a downstream region where the liquid ejection head is located and closes when ink flows from the downstream region to the upstream region, a volume changing unit that changes a volume of an inner space, and a stirring unit that stirs ink stored therein in accordance with the volume change of the volume changing unit, the stirring unit being disposed separately from the volume changing unit and they are disposed in the liquid supplying flow channel between the non-return valve and the liquid ejection head.

    摘要翻译： 一种液体喷射装置，包括：一个液体喷射头，其往复运动，一个液体供应流动通道将一个墨水供应到该液体喷射头;一个液体供应流动通道中的一个止回阀，当油墨从上游区域流向下游区域时， 当墨水从下游区域流向上游区域时，液体喷射头位于并关闭的位置，改变内部空间体积的体积变化单元和搅拌单元，其根据体积变化来搅拌储存在其中的墨水 体积改变单元，搅拌单元与体积改变单元分开设置，并且它们设置在止回阀和液体喷射头之间的液体供应流动通道中。

    Scanning Electron Microscope
    10.
    发明申请
    Scanning Electron Microscope 有权
    扫描电子显微镜

    公开(公告)号：US20080191135A1

    公开(公告)日：2008-08-14

    申请号：US12021810

    申请日：2008-01-29

    申请人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

    发明人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

    IPC分类号： G01N23/00

    CPC分类号： G01N23/203 ,  G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

    摘要： An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

    摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括用于降低到达样品的电子束的能量的减速电场形成装置，并且能够以高效率选择性地检测BSE。 为此，包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分，并且远离SE的轨迹远离电子束的光轴 。