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公开(公告)号：US07964845B2
公开(公告)日：2011-06-21
申请号：US12289089
申请日：2008-10-20
申请人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
发明人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。
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公开(公告)号：US20070235645A1
公开(公告)日：2007-10-11
申请号：US11240391
申请日：2005-10-03
申请人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto
发明人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto
IPC分类号： G21K7/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。
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公开(公告)号：US20090050803A1
公开(公告)日：2009-02-26
申请号：US12289089
申请日：2008-10-20
申请人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
发明人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
IPC分类号： G21K7/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。
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公开(公告)号：US07456403B2
公开(公告)日：2008-11-25
申请号：US11240391
申请日：2005-10-03
申请人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto
发明人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto
IPC分类号： H01J37/26 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。
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公开(公告)号：US06963069B2
公开(公告)日：2005-11-08
申请号：US10767262
申请日：2004-01-30
申请人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
发明人： Yuusuke Tanba , Mitsugu Sato , Kaname Takahashi , Shunya Watanabe , Mine Nakagawa , Atsushi Muto , Akinari Morikawa
IPC分类号： H01J37/09 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。
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公开(公告)号：US20090133989A1
公开(公告)日：2009-05-28
申请号：US12083972
申请日：2006-10-06
IPC分类号： B65G35/08
CPC分类号： B23P21/004 , B62D65/18 , B65G35/06 , B65G35/08
摘要： (Object) The object of the present invention is to improve the productivity and make the assembling operation easier in a carrier apparatus for carrying a work while performing an assembling operation by making effective use of an inside region, even in the case where a conveyor line is provided in the form of a circling route.(Means of Solution) In a free flow type conveyor line (1) in which a work is loaded on a pallet (2) having a floor surface which travels substantially at the same level as a floor surface (5) for operation, a horizontal curved section (3) is provided in a section of the line (1), and the pallet (2) is divided into a first, a second and a third divided pallet elements (2A, 2B, 2C) in the carrying direction. The respectively divided pallet elements (2A, 2B, 2C) are mutually turnable in the horizontal plane by connecting the first divided pallet element (2A) to the second divided pallet elements (2B), and the second divided pallet element (2B) to the third divided pallet elements (2C), respectively through vertically extending pivot pins (9).
摘要翻译： （对象）本发明的目的是提高生产率，并且通过有效利用内部区域来进行组装操作的承载装置中的搬运装置更容易，即使在输送线 以循环路线的形式提供。 （解决方案）在自由流动式输送线（1）中，其中工件被装载在具有与用于操作的地板表面（5）基本上处于相同水平的地板表面的托盘（2）上，水平 弯曲部分（3）设置在线（1）的一部分中，并且托盘（2）沿传送方向被分成第一，第二和第三分开的托盘元件（2A，2B，2C）。 通过将第一分割的托盘元件（2A）连接到第二分割的托盘元件（2B），并且第二分割托盘元件（2B）连接到相应的分开的托盘元件（2A，2B，2C），在水平面中可相互转动 分别通过垂直延伸的枢轴销（9）分开第三分割托盘元件（2C）。
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公开(公告)号：US08907303B2
公开(公告)日：2014-12-09
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译： 在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。
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公开(公告)号：US20090060693A1
公开(公告)日：2009-03-05
申请号：US12224052
申请日：2007-02-20
IPC分类号： G05B19/418 , B25J13/00
CPC分类号： B25J9/0093 , B25J19/06 , B25J21/00
摘要： Provided is a working device wherein an operator is not required to enter a working area (K) of a robot (11) surrounded by a protection fence (21). The working device is provided with a tray (43) for placing a second work piece (18). The second work piece is placed on the tray (43) and transferred from inside to the outside of the protection fence.
摘要翻译： 提供了一种工作装置，其中操作者不需要进入由保护栅栏（21）包围的机器人（11）的工作区域（K）。 工作装置设置有用于放置第二工件（18）的托盘（43）。 第二工件被放置在托盘（43）上并从保护栅栏的内部传送到外部。
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公开(公告)号：US20130056636A1
公开(公告)日：2013-03-07
申请号：US13640563
申请日：2011-05-11
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/2001 , H01J2237/20221 , H01J2237/20278 , H02P29/60
摘要： Sample drift in a scanning electron microscope is suppressed which is caused by a change in room temperature or associated with operation of motors for driving a sample stage. Supply currents to the motors during movement of the sample and a stop of the sample movement are controlled so that the supply currents have the same level or so that a maximum difference in level between the supply currents is 20%. This lessens any changes in the amounts of heat generated by the motors, thereby reducing sample drift during observation.
摘要翻译： 扫描电子显微镜中的样品漂移被抑制，这是由于室温的变化或与用于驱动样品台的电机的操作相关联引起的。 控制在样品运动期间向电动机提供电流并停止样品运动，使得电源电流具有相同的电平或电源电流之间的最大电平差为20％。 这减少了电动机产生的热量的变化，从而减少了观察期间的样品漂移。
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公开(公告)号：US20140117251A1
公开(公告)日：2014-05-01
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译： 在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。
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