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1.发明申请IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME 有权IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD WITH SAME公开(公告)号：US20130056905A1
公开(公告)日：2013-03-07
申请号：US13603575
申请日：2012-09-05
IPC分类号： B29C59/02
CPC分类号： G03F7/70 , B29C59/002 , B29C59/022 , B29C2059/023 , B29K2909/08 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus molds an uncured resin on a substrate and cures the resin to form a pattern of the cured resin on the substrate. The apparatus includes a mold holding unit that holds the mold, a substrate holding unit that holds the substrate, a deforming unit that deforms the mold held by the mold holding unit into a convex shape toward the substrate, a driving unit that changes an attitude of the mold or the substrate during a releasing operation in which the mold deformed into the convex shape is released from the resin to thereby make the position of a contact region at which the mold is brought into contact with the resin movable, a measuring unit that acquires image information indicating a state of the contact region, and a control unit configured to control the operation of the driving unit based on the image information.
摘要翻译： 压印装置在基材上模塑未固化的树脂，并固化树脂以在基材上形成固化树脂的图案。 该装置包括保持模具的模具保持单元，保持基板的基板保持单元，使由模具保持单元保持的模具朝向基板变形为凸形的变形单元，改变姿势的驱动单元 模具或基板在模具变形为凸形的释放操作期间从树脂释放，从而使模具与可移动的树脂接触的接触区域的位置，获取 指示接触区域的状态的图像信息;以及控制单元，被配置为基于图像信息来控制驱动单元的操作。
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公开(公告)号：US09400426B2
公开(公告)日：2016-07-26
申请号：US13603575
申请日：2012-09-05
CPC分类号： G03F7/70 , B29C59/002 , B29C59/022 , B29C2059/023 , B29K2909/08 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus molds an uncured resin on a substrate and cures the resin to form a pattern of the cured resin on the substrate. The apparatus includes a mold holding unit that holds the mold, a substrate holding unit that holds the substrate, a deforming unit that deforms the mold held by the mold holding unit into a convex shape toward the substrate, a driving unit that changes an attitude of the mold or the substrate during a releasing operation in which the mold deformed into the convex shape is released from the resin to thereby make the position of a contact region at which the mold is brought into contact with the resin movable, a measuring unit that acquires image information indicating a state of the contact region, and a control unit configured to control the operation of the driving unit based on the image information.
摘要翻译： 压印装置在基材上模塑未固化的树脂，并固化树脂以在基材上形成固化树脂的图案。 该装置包括保持模具的模具保持单元，保持基板的基板保持单元，使由模具保持单元保持的模具朝向基板变形为凸形的变形单元，改变姿势的驱动单元 模具或基板在模具变形为凸形的释放操作期间从树脂释放，从而使模具与可移动的树脂接触的接触区域的位置，获取 指示接触区域的状态的图像信息;以及控制单元，被配置为基于图像信息来控制驱动单元的操作。
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公开(公告)号：US09285675B2
公开(公告)日：2016-03-15
申请号：US13603523
申请日：2012-09-05
CPC分类号： G03F7/0002 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00
摘要： An imprint apparatus includes a deforming unit configured to deform the mold held by the mold holding unit into a convex shape toward the substrate; a driving unit configured to change an attitude of the mold or the substrate during a pressing in which the mold deformed is pressed against the uncured resin to thereby make a position of a contact region at which the mold is brought into contact with the uncured resin movable; a control unit configured to calculate a plane coordinates of a centroid of the contact region based on an image information of the contact region acquired by a measuring unit and to control an operation of the driving unit such that the plane coordinates position of the centroid is directed toward the plane coordinates position of the centroid of a pattern-forming region on the substrate, which has been calculated or has been acquired in advance.
摘要翻译： 压印装置包括变形单元，其被构造成将由模具保持单元保持的模具变形成朝向基板的凸形状; 驱动单元，其构造成在压模中改变模具或基板的姿态，其中模具变形压在未固化树脂上，从而形成与未固化树脂可移动接触的接触区域的位置 ; 控制单元，被配置为基于由测量单元获取的接触区域的图像信息来计算接触区域的质心的平面坐标，并且控制驱动单元的操作，使得质心的平面坐标位置被定向 朝向已经计算或已经被预先获取的基板上的图案形成区域的质心的平面坐标位置。
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4.发明申请IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME 有权IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD WITH SAME公开(公告)号：US20130056904A1
公开(公告)日：2013-03-07
申请号：US13603523
申请日：2012-09-05
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00
摘要： An imprint apparatus includes a deforming unit configured to deform the mold held by the mold holding unit into a convex shape toward the substrate; a driving unit configured to change an attitude of the mold or the substrate during a pressing in which the mold deformed is pressed against the uncured resin to thereby make a position of a contact region at which the mold is brought into contact with the uncured resin movable; a control unit configured to calculate a plane coordinates of a centroid of the contact region based on an image information of the contact region acquired by a measuring unit and to control an operation of the driving unit such that the plane coordinates position of the centroid is directed toward the plane coordinates position of the centroid of a pattern-forming region on the substrate, which has been calculated or has been acquired in advance.
摘要翻译： 压印装置包括变形单元，其被构造成将由模具保持单元保持的模具变形成朝向基板的凸形状; 驱动单元，其构造成在压模中改变模具或基板的姿态，其中模具变形压在未固化树脂上，从而形成与未固化树脂可移动接触的接触区域的位置 ; 控制单元，被配置为基于由测量单元获取的接触区域的图像信息来计算接触区域的质心的平面坐标，并且控制驱动单元的操作，使得质心的平面坐标位置被定向 朝向已经计算或已经被预先获取的基板上的图案形成区域的质心的平面坐标位置。
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公开(公告)号：US08678808B2
公开(公告)日：2014-03-25
申请号：US13268351
申请日：2011-10-07
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.
摘要翻译： 本发明的压印装置使用模具将压印材料模制在基板上，并固化压印材料以在基板上形成图案。 该装置包括：支架，其构造成吸引模具以保持模具; 以及减压装置，其构造成减小由所述保持器保持的模具的背压，其中所述装置构造成与所述压模材料的模具释放平行地减小所述减压装置的背压。
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公开(公告)号：US20080198346A1
公开(公告)日：2008-08-21
申请号：US12026628
申请日：2008-02-06
申请人： Akiko Iimura , Noriyasu Hasegawa
发明人： Akiko Iimura , Noriyasu Hasegawa
IPC分类号： G03B27/52
CPC分类号： G03B27/52 , G03F7/70341
摘要： An exposure apparatus, exposing a substrate via liquid, includes a projection optical system that projects a pattern of an original onto the substrate and a substrate stage that holds and moves the substrate. The substrate stage includes a chuck that holds the substrate, a top plate that surrounds the substrate held by the chuck, and a draining mechanism that drains liquid on the top plate. The top plate has a first area and a second area on the surface of the top plate. At least part of the first area is formed between the substrate held by the chuck and the second area. The contact angle of the first area with the liquid is smaller than the contact angle of the second area with the liquid. The draining mechanism drains liquid on the first area.
摘要翻译： 曝光装置，通过液体曝光基板，包括将原稿图案投影到基板上的投影光学系统和保持和移动基板的基板台。 衬底台包括夹持衬底的卡盘，围绕由卡盘保持的衬底的顶板以及排出顶板上的液体的排出机构。 顶板在顶板的表面上具有第一区域和第二区域。 第一区域的至少一部分形成在由卡盘保持的基板和第二区域之间。 第一区域与液体的接触角小于第二区域与液体的接触角。 排水机构在第一区域排出液体。
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公开(公告)号：US20080002169A1
公开(公告)日：2008-01-03
申请号：US11755380
申请日：2007-05-30
IPC分类号： G03B27/42
CPC分类号： G03B27/58 , G03F7/70341
摘要： At least one exemplary embodiment is directed to an exposure apparatus for exposing a substrate. The exposure apparatus includes a movable substrate stage, a projection optical system configured to project light from an original and including a final optical element, and a nozzle member provided around the final optical element and including an opposing surface opposing the substrate. The substrate is exposed via liquid filled between a final surface of the projection optical system and the substrate, the projection optical system, and the original. The opposing surface includes a supply port, a first recovery port provided farther from an optical axis of the final optical element than the supply port, and a first portion and a second portion provided between the supply port and the first recovery port. The distance between the first portion and the substrate is longer than the distance between the supply port and the substrate.
摘要翻译： 至少一个示例性实施例涉及用于曝光衬底的曝光装置。 曝光装置包括可移动基板台，投影光学系统，被配置为投射来自原稿的光并包括最终光学元件，以及设置在最终光学元件周围的喷嘴构件，并且包括与基板相对的相对表面。 基板通过投影光学系统的最终表面和基板，投影光学系统和原稿之间的液体曝光。 所述相对表面包括供给口，比所述供给口更远离所述最终光学元件的光轴提供的第一回收口以及设置在所述供给口与所述第一回收口之间的第一部分和第二部。 第一部分和基底之间的距离比供给口和基底之间的距离长。
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公开(公告)号：US20070291241A1
公开(公告)日：2007-12-20
申请号：US11755389
申请日：2007-05-30
申请人： Keita Sakai , Noriyasu Hasegawa
发明人： Keita Sakai , Noriyasu Hasegawa
IPC分类号： G03B27/42
CPC分类号： G03B27/42 , G03F7/70341
摘要： At least one exemplary embodiment is directed to an exposure apparatus configured to expose a substrate through a liquid comprising a projection optical and a nozzle unit. The nozzle unit has a liquid recovery port recovering the liquid and a liquid supply port arranged between a final lens and the liquid recovery port and supplying the liquid. A static contact angle of an outer-side second portion of the nozzle unit surface than the liquid recovery port with respect to the liquid is larger than that of an inner-side first portion of the nozzle unit surface than the liquid recovery port by 20° or more. A sliding angle of the second portion with respect to the liquid is 20° or less.
摘要翻译： 至少一个示例性实施例涉及被配置为通过包括投影光学和喷嘴单元的液体曝光基板的曝光装置。 喷嘴单元具有回收液体的液体回收口和布置在最终透镜和液体回收口之间并供应液体的液体供给口。 与液体回收口相比，喷嘴单元表面的外侧第二部分相对于液体的静态接触角比液体回收口的喷嘴单元表面的内侧第一部分的静态接触角大20° 或者更多。 第二部分相对于液体的滑动角度为20°或更小。
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公开(公告)号：US20070188721A1
公开(公告)日：2007-08-16
申请号：US11736502
申请日：2007-04-17
申请人： Noriyasu Hasegawa
发明人： Noriyasu Hasegawa
IPC分类号： G03B27/52
CPC分类号： G03F7/70808 , G03F7/70841 , G03F7/70916
摘要： An exposure apparatus includes a projection optical system for projecting a pattern of a mask onto an object using a light with wavelength of 20 nm or less from a light source, and first and second accommodating parts for accommodating the projection optical system and the mask or the object, said first and second accommodating part has different pressures, wherein said a Ps/Po≧100 and Ps≦10−3 Pa are met, where Po is the pressure of the first accommodating part, and Ps is the pressure of the second accommodating part.
摘要翻译： 曝光装置包括投影光学系统，用于使用来自光源的波长为20nm以下的光将掩模的图案投射到物体上，以及用于容纳投影光学系统和掩模的第一和第二容纳部分 所述第一和第二容纳部分具有不同的压力，其中满足Ps / Po> = 100和Ps <= 10 -3 -3 Pa，其中Po是第一容纳部分的压力， Ps是第二容纳部的压力。
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公开(公告)号：US20060192930A1
公开(公告)日：2006-08-31
申请号：US11276382
申请日：2006-02-27
申请人： AKIKO IIMURA , Sunao Mori , Noriyasu Hasegawa
发明人： AKIKO IIMURA , Sunao Mori , Noriyasu Hasegawa
IPC分类号： G03B27/42
CPC分类号： G03F7/70341
摘要： An exposure apparatus includes a projection optical system for projecting a pattern of a reticle onto an object to be exposed, via a liquid that is filled in a space between a final optical element in the projection optical system and the object, and a liquid-holding member provided around the object and having a surface that is as high as a surface of the object, the liquid-holding member provided for retaining the liquid, wherein the surface of the liquid-holding member is processed so that a first contact angle between the liquid and the surface of the object is equal to or smaller than a second contact angle between the liquid and the surface of the liquid-holding member.
摘要翻译： 曝光装置包括：投影光学系统，用于通过填充在投影光学系统中的最终光学元件与物体之间的空间的液体，将掩模版的图案投射到待曝光的物体上;液体保持 构件设置在物体周围并且具有与物体的表面一样高的表面，用于保持液体的液体保持构件，其中液体保持构件的表面被加工成使得第一接触角 液体和物体的表面等于或小于液体和液体保持构件的表面之间的第二接触角。
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