公开(公告)号：US5841110A

公开(公告)日：1998-11-24

申请号：US920614

申请日：1997-08-27

申请人： Zsolt Nenyei ,  Heinrich Walk ,  Michael Maurer ,  Thomas Knarr

发明人： Zsolt Nenyei ,  Heinrich Walk ,  Michael Maurer ,  Thomas Knarr

IPC分类号： G01J5/00 ,  B23K1/015 ,  H01L21/205 ,  H01L21/26 ,  H01L21/66 ,  B23K10/00

CPC分类号： B23K1/015 ,  B23K2201/40

摘要： A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.

摘要翻译： 提出了一种用于快速热处理（RTP）的方法，其中测量对象的宽带反射率，以及RTP系统使用的测量结果来调整用于处理对象的RTP系统参数。

公开(公告)号：US5359693A

公开(公告)日：1994-10-25

申请号：US913093

申请日：1992-07-14

申请人： Zsolt Nenyei ,  Thomas Knarr ,  Heinrich Walk

发明人： Zsolt Nenyei ,  Thomas Knarr ,  Heinrich Walk

IPC分类号： B01J19/12 ,  G05D23/19 ,  H01L21/268 ,  H01L21/324 ,  H01L21/00

CPC分类号： H01L21/2686 ,  B01J19/122 ,  G05D23/1904 ,  H01L21/324

摘要： A low defect rate is provided in rapid thermal processing of delicate components with reduction of defects caused by inhomogeneities of temperature during a rapid thermal processing. In a suitable system a defect-guarded RTP method is carried out in such a manner that the density of the heating energy is adjusted in consecutive intervals of time, which may be as short as desired, to such automatically controlled limiting values or to such fixed values that in the reaction chamber the difference between the primary and secondary energy densities is almost continuously held at the minimum which is achievable throughout the thermal processing whereas the ramps have predetermined slopes.

摘要翻译： 在快速热处理过程中，由于温度不均匀引起的缺陷减少，精密部件的快速热处理提供了低缺陷率。 在合适的系统中，以这样一种方式进行缺陷保护的RTP方法，即将加热能量的密度在所需的连续时间间隔内调节，其可以根据需要尽可能短地限制到这种自动控制的限制值或固定 在反应室中，初级和次级能量密度之间的差异几乎连续地保持在整个热处理中可实现的最小值，而斜坡具有预定的斜率。

公开(公告)号：US5861609A

公开(公告)日：1999-01-19

申请号：US537409

申请日：1995-10-02

申请人： Guenter Kaltenbrunner ,  Thomas Knarr ,  Zsolt Nenyei

发明人： Guenter Kaltenbrunner ,  Thomas Knarr ,  Zsolt Nenyei

IPC分类号： H01L21/00 ,  H01L21/268 ,  H01L21/687 ,  H05B3/00 ,  H01L21/324 ,  C23C16/00 ,  H05B1/00

CPC分类号： H05B3/0047 ,  H01L21/2686 ,  H01L21/67115 ,  H05B2203/032

摘要： A thin visible and near IR absorbing plate is placed between the radiation source and the object to be processed in a rapid thermal processing system. The object is heated in part by the near IR and far IR radiation from the thin plate, and the material and optically induced heating inhomogeneities are reduced.

摘要翻译： 在快速热处理系统中，在辐射源和待处理物体之间放置薄的可见光和近红外线吸收板。 该物体部分地被来自薄板的近IR和远红外辐射加热，并且材料和光学诱导的加热不均匀性降低。

公开(公告)号：US06191392B1

公开(公告)日：2001-02-20

申请号：US09208955

申请日：1998-12-08

申请人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

发明人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

IPC分类号： A21B100

CPC分类号： G01J5/0003

摘要： A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic parameter. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.

摘要翻译： 提供一种测量从被至少一个辐射源发出的电磁辐射照射的物体表面辐射的电磁辐射的方法。 由辐射源发出的辐射由至少一个第一检测器确定，由照射物体放出的辐射由至少一个测量辐射的第二检测器确定。 来自至少一个辐射源的辐射被至少一个特征参数主动调制。 用由第一检测器确定的辐射来校正由第二检测器确定的辐射，以补偿从物体反射的辐射源的辐射。

公开(公告)号：US06369363B2

公开(公告)日：2002-04-09

申请号：US09789942

申请日：2001-02-16

申请人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

发明人： Markus Hauf ,  Thomas Knarr ,  Heinrich Walk ,  Horst Balthasar ,  Uwe Müller

IPC分类号： F27D1100

CPC分类号： G01J5/0003

摘要： A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic pyrometer. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.

摘要翻译： 提供一种测量从被至少一个辐射源发出的电磁辐射照射的物体表面辐射的电磁辐射的方法。 由辐射源发出的辐射由至少一个第一检测器确定，由照射物体放出的辐射由至少一个测量辐射的第二检测器确定。 来自至少一个辐射源的辐射用至少一个特征性高温计主动调制。 用由第一检测器确定的辐射来校正由第二检测器确定的辐射，以补偿从物体反射的辐射源的辐射。