Method for introducing impurities and apparatus for introducing impurities
    1.
    发明申请
    Method for introducing impurities and apparatus for introducing impurities 失效
    引入杂质的方法和引入杂质的装置

    公开(公告)号:US20070254460A1

    公开(公告)日:2007-11-01

    申请号:US11819567

    申请日:2007-06-28

    IPC分类号: H01L21/00

    摘要: A method for introducing impurities includes a step for forming an amorphous layer at a surface of a semiconductor substrate, and a step for forming a shallow impurity-introducing layer at the semiconductor substrate which has been made amorphous, and an apparatus used therefore. Particularly, the step for forming the amorphous layer is a step for irradiating plasma to the surface of the semiconductor substrate, and the step for forming the shallow impurity-introducing layer is a step for introducing impurities into the surface which has been made amorphous.

    摘要翻译: 用于引入杂质的方法包括在半导体衬底的表面形成非晶层的步骤,以及在半导体衬底上形成非晶化的浅杂质引入层的步骤以及因此使用的装置。 特别地,用于形成非晶层的步骤是用于将等离子体照射到半导体衬底的表面的步骤,并且用于形成浅掺杂杂质的层的步骤是将杂质引入已经被制成无定形的表面的步骤。

    Digital convergence correction device outputting an analog correction
signal
    4.
    发明授权
    Digital convergence correction device outputting an analog correction signal 失效
    数字会聚校正装置输出模拟校正信号

    公开(公告)号:US5969655A

    公开(公告)日:1999-10-19

    申请号:US757690

    申请日:1996-12-03

    申请人: Masashi Imai

    发明人: Masashi Imai

    IPC分类号: H04N5/74 H04N9/28 H03M1/00

    CPC分类号: H04N9/28 H04N5/74

    摘要: A digital convergence correction device converts correction data into serial data by using a parallel/serial converter, and further converts the serial data into an analog correction signal by using a serial input type digital/analog converter, and outputs the analog correction signal in order to correct misconvergence.

    摘要翻译: 数字会聚校正装置通过使用并行/串行转换器将校正数据转换为串行数据,并且通过使用串行输入型数/模转换器将串行数据转换为模拟校正信号,并输出模拟校正信号,以便 纠正错误会聚