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1.发明公开公开(公告)号：US20240332036A1
公开(公告)日：2024-10-03
申请号：US18710466
申请日：2022-11-14
发明人： Yoshiki YANO , Keita FUCHIGAMI
CPC分类号： H01L21/67028 , B24C1/003 , B24C3/322
摘要： An object of the present invention is to provide a dry ice cleaning apparatus for a semiconductor wafer and a method for cleaning a semiconductor wafer that can reduce the amount of particles remaining on the surface of a semiconductor wafer, suppress a decrease of cleaning effects due to ice formation, and continuously and effectively clean a large amount of semiconductor wafers. The present invention provides a dry ice cleaning apparatus for a semiconductor wafer including a cleaning chamber (1) into which the semiconductor wafers (W) are sequentially carried in and which has an internal space (11) for cleaning the semiconductor wafers (W), an inject cleaning nozzle (5) that is disposed in the internal space (11) of the cleaning chamber (1) and injects the dry ice (D) toward the cleaning surface of the semiconductor wafer (w), and a transfer robot (2) that is disposed in the internal space (11) of the cleaning chamber (1) and sequentially carries the semiconductor wafers (W) from the outside of the cleaning chamber (1) into the internal space (11); and wherein while the transfer robot (2) holding the semiconductor wafer (W) carried into the internal space (11) non-horizontally, the inject cleaning nozzle (5) injects the dry ice (D) onto the semiconductor wafer (W).
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公开(公告)号：US20240239655A1
公开(公告)日：2024-07-18
申请号：US18684070
申请日：2022-07-14
发明人： Naoki KOMURA , Atsuhiro FUJII
IPC分类号： C01B4/00 , B01D53/00 , B01D53/58 , B01D59/22 , B01D59/28 , B01D59/38 , C01B5/02 , C01C1/02 , C25B1/04 , C25B1/27
CPC分类号： C01B4/00 , B01D53/002 , B01D53/58 , B01D59/22 , B01D59/28 , B01D59/38 , C01B5/02 , C01C1/02 , C25B1/04 , C25B1/27 , B01D2257/108 , B01D2257/406 , B01D2257/553 , B01D2258/0216
摘要： An object of the present invention is to provide a deuterium recovery method and deuterium recovery equipment that can recover and reuse deuterium or deuterium compounds used in semiconductor manufacturing processes. The present invention provides a deuterium recovery method including: generating heavy water in an exhaust gas containing deuterium gas in a semiconductor manufacturing process.
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公开(公告)号：US12013177B2
公开(公告)日：2024-06-18
申请号：US17800076
申请日：2021-03-02
发明人： Hajime Yonai , Akira Mase , Hirotsugu Takeuchi
CPC分类号： F25D3/105 , B65D81/3806 , B65D81/3809 , F25D2201/14
摘要： An object of the present invention is to provide a container for cryopreservation and transportation which is excellent in maintainability and can appropriately control the temperature of an object to be frozen. The present invention provides a container for cryopreservation and transportation used to transport an object to be frozen, including: a thermal insulation container having an upper opening; a thermal insulation lid which closes the upper opening of the thermal insulation container; and a cooling unit which is held in the thermal insulation container while absorbing liquid nitrogen, wherein a housing space for accommodating a storage tool for storing the object to be frozen is provided inside the thermal insulation container, and the cooling unit is detachable through the upper opening of the thermal insulation container while the storage tool located in the housing space is housed in the thermal insulation container.
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公开(公告)号：US20240165365A1
公开(公告)日：2024-05-23
申请号：US18506369
申请日：2023-11-10
发明人： Hiroki Hashi , Nanami MIKI
CPC分类号： A61M16/122 , A61M16/022 , A61M16/208 , A61M2016/0033 , A61M2202/02 , A61M2202/0225
摘要： The invention relates to a medical gas supply device that supplies hydrogen gas to inhalation gas, including: an inhalation gas path that is connected to an inhalation line on an artificial respirator side; a hydrogen gas introduction path that is connected to a hydrogen gas supplier; a merging point where these two paths merge; a tank that is provided downstream of the merging point, includes a gas inlet and a gas outlet, has a diameter larger than that of the inhalation gas path, and mixes inhalation gas and hydrogen gas to form a mixed gas; a mixed gas supply path that connects the gas outlet and a patient-side inhalation line; a flow meter that is provided in the inhalation gas path; a flow rate controller that is provided in the medical gas introduction path; and a control unit that is connected to the flow meter and the flow rate controller.
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公开(公告)号：US11925896B2
公开(公告)日：2024-03-12
申请号：US18027328
申请日：2021-09-27
发明人： Masaya Yamawaki
IPC分类号： B01D53/04 , B01D53/047 , C01B23/00
CPC分类号： B01D53/047 , C01B23/0052 , B01D2256/24 , B01D2257/102 , B01D2257/11 , B01D2259/40007
摘要： A gas separation method in which a rare as a first introduced gas and an impurity gas as a second introduced gas, are introduced into a raw material gas. Each of the flow rates of the first and second introduced gases is controlled based on the flow rates of the rare gas and impurity gas in the discharged gas from a rare gas using facility. A gas separation device includes an introduction pipe for introducing rare gas in a separation gas container into a raw material gas, an introduction pipe for introducing impurity gases in the separation gas container into the raw material gas, a flow meter provided in a supply pipe for supplying a discharged gas of a rare gas using facility, and an arithmetic device electrically connected to each of the flow meter the flow rate controller, and the flow rate controller.
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公开(公告)号：US20230347407A1
公开(公告)日：2023-11-02
申请号：US18219927
申请日：2023-07-10
发明人： Kentaro MIYOSHI , Hiroshi IGARASHI
IPC分类号： B22F1/00 , B22F1/06 , B22F7/08 , B23K35/30 , B22F1/05 , B22F1/054 , B22F1/052 , B22F1/145 , B23K35/02
CPC分类号： B22F1/00 , B22F1/06 , B22F7/08 , B23K35/302 , B22F1/05 , B22F1/056 , B22F1/052 , B22F1/145 , B23K35/0244 , B22F2301/10
摘要： A method for producing a bonding material having a plate shape or a sheet shape includes a mixture producing step in which fine copper particles having an average particle diameter of 300 nm or less, coarse copper particles having an average particle diameter of 3 μm or more and 11 μm or less, and a reducing agent which reduces the fine copper particles and the coarse copper particles are mixed to produce a mixture: and a molding step in which the mixture is formed in a plate shape or a sheet shape.
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公开(公告)号：US11701706B2
公开(公告)日：2023-07-18
申请号：US17572402
申请日：2022-01-10
CPC分类号： B22F3/1007 , B22F1/054 , B22F1/145 , B22F1/16 , B22F9/22 , B22F1/056 , B22F2201/01 , B22F2201/013 , B22F2201/04 , B22F2301/10 , B22F2302/25 , B22F2304/054 , B22F2304/056 , B22F2304/058
摘要： A method for producing fine copper particles includes producing fine copper particles having a coating film containing cuprous oxide on a surface by heating copper or a copper compound in a reducing flame formed by a burner. The fine copper particles are produced by adjusting a mixing ratio between a combustible gas and a combustion supporting gas which form the reducing flame such that a volume ratio of CO/CO2 is in a range of 1.5 to 2.4.
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公开(公告)号：US11607627B2
公开(公告)日：2023-03-21
申请号：US17146796
申请日：2021-01-12
发明人： Kenji Fukuda
摘要： One object of the present invention is to provide a gas-liquid separating device which can efficiently recover a target gas from a mixture containing at least a gas and a liquid in a gas-liquid coexistence state, and the present invention provides a gas-liquid separating device which separates and recovers a gas and a liquid from a mixture containing the gas and the liquid in a gas-liquid coexistence state, wherein the gas-liquid separating device includes an airtight space in which the mixture containing the gas and the liquid in a gas-liquid coexistence state is supplied and the mixture is stored as a mixture separated into gas and liquid, a supply path for supplying the mixture containing the gas and the liquid in a gas-liquid coexistence state into the airtight space, a gas recovery path for discharging the gas in the airtight space to the outside of the airtight space, a first decompressor which is provided in the gas recovery path and recovers the gas from the airtight space, a liquid recovery path for discharging the liquid in the airtight space to the outside of the airtight space, and a second decompressor which is provided in the liquid recovery path and configured to recover the liquid from the airtight space.
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公开(公告)号：US20220395905A1
公开(公告)日：2022-12-15
申请号：US17776371
申请日：2020-11-13
发明人： Yusuke YAMAGUCHI , Tomohiro OYAMA , Hiroki AMANO , Ryo AKAMATSU
摘要： An object of the present invention is to provide a laminating-printing system which can further improve the quality of laminated-printed objects. The present invention provides a laminating-printing system including a laminating-printing unit (10) which prints the layers and sequentially laminates the layers; and a concentration adjusting unit (30) which adjusts the concentration of gas components in the shield gas, the laminating-printing unit (10) including: an irradiation section including an irradiation source of energy rays to irradiate the powder material, and a printing section including a chamber filled with the shield gas and a printing stage on which the layers are printed and laminated, and the concentration adjusting unit (30) including: a purification section which removes a first gas component which is an impurity in the shield gas based on the powder material; and a supply section which supplies a second gas component selected based on the powder material inside of the chamber as needed.
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公开(公告)号：US20220341589A1
公开(公告)日：2022-10-27
申请号：US17762416
申请日：2020-09-11
摘要： The object of the present invention is to provide a high-temperature oxygen generation device and a high-temperature oxygen generation method which can efficiently supply preheated high-temperature oxygen gas regardless of pressure conditions from normal pressure to high pressure, without requiring upsizing or expansion of the equipment, and the present invention provides a high-temperature oxygen generation device (10) in which a high-temperature gas (G4) and an oxygen gas (G3) to be heated are mixed to generate a high-temperature oxygen gas (G5), wherein the high-temperature oxygen generation device (10) includes a burner (1) which generates the high-temperature gas (G4), and a preheating chamber (7) which is provided on the downstream side of the burner (1) and mixes the high-temperature gas (G4) and the oxygen gas (G3) to be heated, and the burner (1) includes a combustion chamber (5) which forms a flame by a fuel gas (G1) and an oxygen gas (G2) for combustion, a fuel flow path (2) which supplies the fuel gas (G1) into the combustion chamber (5), a first oxygen flow path (3) and a second oxygen flow path (4) which supply the oxygen gas (G2) for combustion into the combustion chamber (5), and a flow path (6) for oxygen to be heated which communicates with the preheating chamber (7), and supplies the oxygen gas (G3) to be heated toward the preheating chamber (7).
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