Method of applying a layer in accordance with a pattern on a substrate,
a negative resist material and a substrate coated with the resist
    1.
    发明授权
    Method of applying a layer in accordance with a pattern on a substrate, a negative resist material and a substrate coated with the resist 失效
    根据图案在基材,负性抗蚀剂材料和涂覆有抗蚀剂的基材上施加层的方法

    公开(公告)号:US4348472A

    公开(公告)日:1982-09-07

    申请号:US183521

    申请日:1980-09-02

    申请人: Jannes C. Jagt

    发明人: Jannes C. Jagt

    摘要: A method of providing a negative electron and/or X-ray resist material on a substrate comprising applying a layer of resist material to the substrate, exposing the layer to a pattern of electrons and/or X-rays and removing the unexposed portions of the layer of resist material in which method the resist material comprises a polyvinylcarbazole compound which (a) contains a polymer and/or a copolymer of the formula ##STR1## in which n exceeds 30 which is halogenated in the nucleus or (b) contains a mixture of the copolymer optionally halogenated in the nucleus with a bisazide of the formulaN.sub.3 RN.sub.3in which R represents an organic residue.

    摘要翻译: 一种在衬底上提供负电子和/或X射线抗蚀剂材料的方法,包括将一层抗蚀剂材料施加到衬底上,将该层暴露于电子和/或X射线图案,以及除去 抗蚀剂材料层,其中抗蚀剂材料包含聚乙烯基咔唑化合物,其(a)含有在该核中被卤化的n超过30的式“IMAGE”的聚合物和/或共聚物,或(b)含有混合物 的任选在核中卤化的共聚物与式N 3 R N 3的双叠氮化物反应,其中R代表有机残基。

    METHOD OF PERFORMING LIVING CATIONIC POLYMERIZATION OF MONOMERS BY SUPERMOLECULAR ANION-BINDING CATALYSIS

    公开(公告)号:US20240092950A1

    公开(公告)日:2024-03-21

    申请号:US18452443

    申请日:2023-08-18

    摘要: The present application relates to a method of performing living cationic polymerization of monomers by supermolecular anion-binding catalysis. It uses various simple Bronsted acids or adducts thereof with a monomer as the cationic initiator, and various hydrogen bond donors as the catalyst for binding and dissociating counter anions dynamically, to living and controlled polymerize one or more cationically polymerizable monomers to form a homopolymer or a copolymer. In the present application, the hydrogen-bond donor can exert non-covalent anion-binding interactions to dynamically and reversibly activate dormant covalent bond under mild conditions, in turn to precisely control the equilibrium between dormant covalent precursors and active cationic species, thereby achieving the precise control of the polymer's molecular weight, distribution and end group structure, and solving the environment-unfriendly relevant problems in traditional metal-based Lewis acid catalysis, which include extreme low polymerization temperature, restrict anhydrous requirement of the reaction, strict purification requirement of the monomer and catalysis-initiating system, metal residue in polymer or the like.