Laser chamber and electronic device manufacturing method

    公开(公告)号:US11947263B2

    公开(公告)日:2024-04-02

    申请号:US17457514

    申请日:2021-12-03

    申请人: Gigaphoton Inc.

    摘要: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

    COMPRESSION METHOD AND MEANS
    2.
    发明申请
    COMPRESSION METHOD AND MEANS 审中-公开
    压缩方法与手段

    公开(公告)号:US20120070326A1

    公开(公告)日:2012-03-22

    申请号:US13202715

    申请日:2010-02-22

    IPC分类号: F04C18/00 F04C18/04

    摘要: The invention is a compression method having characteristics of smooth compression and internal cooling of the gas. Embodiments of the invention employ a cylindrical chamber and an orbiting rotor to create a moving duct or chamber whose walls converge, relative to a static gas packet drawn into the moving duct, at a “pinch point”. Preferably the closing speed of the walls is subsonic and the speed of the pinch point is supersonic. This enables high pressure to co-exist, at the narrowing end of the duct, with low pressure elsewhere in the duct, because of the pressure information barrier produced by the supersonic advance of the pinch point. The invention also discloses means for providing gas inlet and outlet functionality, and means for providing a variable flow compressor.

    摘要翻译: 本发明是具有气体平滑压缩和内部冷却特性的压缩方法。 本发明的实施例采用圆柱形腔室和绕动转子来产生移动的管道或腔室,其相对于被吸入移动管道的静态气体组件以“夹点”收敛。 优选地,壁的闭合速度是亚音速的,夹点的速度是超音速的。 这是因为压缩信息障碍是通过夹点的超音速提前产生的,因此能够在管道的狭窄端部共同存在管道的其它部分的低压力。 本发明还公开了用于提供气体入口和出口功能的装置,以及用于提供可变流量压缩机的装置。

    Absorptive thermodynamic apparatus and method
    3.
    发明授权
    Absorptive thermodynamic apparatus and method 失效
    吸收式热力学仪器及方法

    公开(公告)号:US4722194A

    公开(公告)日:1988-02-02

    申请号:US910820

    申请日:1986-09-23

    摘要: Heat is transferred between conduit sections so as to use heat which otherwise would not be utilized and improve the efficiency of the apparatus and method. The sections contain working fluids flowing in opposite directions. Heat transfer longitudinally of the conduit sections is reduced relative to heat transfer transversely of the conduit sections. In a preferred embodiment, the conduit sections extend at an acute angle to the direction of the principal gravity or other acceleration field; that is, at an acute angle to horizontal in a stationary system, or at an acute angle to the radial direction in a rotary system.

    摘要翻译: 热量在导管部分之间转移,以便使用否则将不被利用的热量并且提高装置和方法的效率。 这些部分包含在相反方向流动的工作流体。 相对于导管段横向的热传递,导管部分的纵向传热减少。 在优选实施例中,导管部分以主要重力或其它加速度场的方向成锐角延伸; 即在静止系统中与水平方向成锐角,或者与旋转系统中的径向成锐角。

    Rotary thermodynamic apparatus and method
    4.
    发明授权
    Rotary thermodynamic apparatus and method 失效
    旋转式热力学仪器及方法

    公开(公告)号:US4136530A

    公开(公告)日:1979-01-30

    申请号:US770316

    申请日:1977-02-18

    IPC分类号: F04D23/00 F25B3/00 F25B15/00

    摘要: Rotary thermodynamic compression and refrigeration apparatus and methods in which the mechanical impedance and/or thermodynamic impedance of the system are controlled in order to obtain stable operation. By controlling these impedances, the overall pressure drop of the fluid flow in the system is made to increase with increasing fluid flow rate, thus ensuring stable operation.

    摘要翻译: 旋转热力学压缩和制冷装置以及其中控制系统的机械阻抗和/或热力学阻抗以获得稳定操作的方法。 通过控制这些阻抗,使系统中的流体流的总体压降随着流体流速的增加而增加,从而确保稳定运行。

    Rotary thermodynamic apparatus
    5.
    发明授权
    Rotary thermodynamic apparatus 失效
    旋转式热力学仪器

    公开(公告)号:US4100765A

    公开(公告)日:1978-07-18

    申请号:US723714

    申请日:1976-09-16

    IPC分类号: F01K11/04 F04D23/00 F25B3/00

    摘要: A working fluid such as a liquifiable gas is rotated in a rotor having a thermodynamic compressor, a condenser chamber and an evaporation chamber. The high pressure zone in the condenser chamber is separated from the low pressure zone of the evaporator by a column of liquid. In several embodiments, a fore-pump is actuated by the thermodynamic compressor in order to vary the thermodynamic operating points of the device.

    摘要翻译: 诸如可液化气体的工作流体在具有热力学压缩机,冷凝器室和蒸发室的转子中旋转。 冷凝器室中的高压区通过一列液体与蒸发器的低压区分离。 在几个实施例中,前泵由热力学压缩机致动,以便改变装置的热力学工作点。

    Fluid pressure creating rotary device
    6.
    发明授权
    Fluid pressure creating rotary device 失效
    流体压力创建旋转装置

    公开(公告)号:US3801214A

    公开(公告)日:1974-04-02

    申请号:US3801214D

    申请日:1972-04-03

    申请人: JONSSON N

    发明人: JONSSON N

    IPC分类号: F04D5/00 F04D23/00 F01D5/00

    CPC分类号: F04D23/00 F04D5/001

    摘要: A fluid pressure creating rotary device comprises a member with a circularly cylindrical inner surface and a member with a circularly cylindrical outer surface that cooperates with said inner surface. When the two members rotate relative each other, a shallow groove in one of the two cooperating surfaces brings fluid from a fluid reservoir to an annular pressure groove in one of the members. The pressure of the fluid increases continuously along the transporting groove to the pressure groove from which the pressure can be transmitted through an outlet orifice to a fluid piston or the like which is to be actuated by the pressure fluid. A valving action is achieved simply by having the two cooperating members axially movable relative to each other so that the pressure outlet can be isolated from the pressure groove and connected to a drain chamber. The device is shown as part of a V-belt variator (FIG. 2), and as part of a clutch (FIG. 4 as well as FIG. 7).

    摘要翻译: 一种流体压力产生旋转装置包括具有圆柱形内表面的构件和具有与所述内表面配合的圆柱形外表面的构件。 当两个构件彼此相对旋转时,两个配合表面中的一个中的浅槽将流体从流体储存器带到其中一个构件中的环形压力槽。 流体的压力沿传送槽连续地增加到压力槽,压力从该压力槽可以通过出口孔传递到由压力流体致动的流体活塞等。 阀操作简单地通过使两个配合构件相对于彼此轴向移动来实现,使得压力出口可以与压力槽隔离并连接到排水室。 该装置被示出为V型皮带变换器(图2)的一部分,并且作为离合器的一部分(图4以及图7)示出。

    Boundary Layer Turbomachine
    7.
    发明申请
    Boundary Layer Turbomachine 审中-公开
    边界层涡轮机

    公开(公告)号:US20160258442A1

    公开(公告)日:2016-09-08

    申请号:US14991228

    申请日:2016-01-08

    摘要: A boundary layer turbomachine can include a housing defining an interior space and having an inlet opening and an outlet opening to facilitate movement of a fluid through the housing. The boundary layer turbomachine can also include a rotor assembly disposed in the rotor chamber and configured to rotate about an axis of rotation. The rotor assembly can have a plurality of disks spaced apart along the axis of rotation and defining an interior opening along the axis of rotation. The fluid can pass through gaps between the disks and the interior opening as the fluid moves through the housing.

    摘要翻译: 边界层涡轮机可以包括限定内部空间并具有入口开口和出口开口的壳体,以便于流体通过壳体的移动。 边界层涡轮机还可以包括转子组件,其设置在转子室中并且构造成围绕旋转轴线旋转。 转子组件可以具有沿着旋转轴线间隔开的多个盘,并且沿着旋转轴线限定内部开口。 当流体移动通过壳体时,流体可以通过盘和内部开口之间的间隙。

    Centrifugal engine
    8.
    发明申请
    Centrifugal engine 审中-公开
    离心式发动机

    公开(公告)号:US20070014669A1

    公开(公告)日:2007-01-18

    申请号:US11341936

    申请日:2006-01-26

    IPC分类号: F01D5/30

    CPC分类号: B63H1/04 F04D5/00 F04D23/00

    摘要: A novel kind of propulsion system that uses centrifugal force to accelerate the surrounding work-fluid. A rotor (10) with radially mounted blades (11) is enclosed by a cylindrical enclosure (12). The cylinder wall of the enclosure (12) is partially open to the surrounding work fluid. The rotor is rotated in the housing and surrounding fluid thereby generating the propulsive force.

    摘要翻译: 一种采用离心力加速周围工作流体的新型推进系统。 具有径向安装的叶片(11)的转子(10)由圆柱形外壳(12)包围。 外壳(12)的气缸壁部分地与周围的工作流体开放。 转子在壳体和周围的流体中旋转,从而产生推进力。

    Rotary thermodynamic apparatus and method
    9.
    发明授权
    Rotary thermodynamic apparatus and method 失效
    旋转式热力学仪器及方法

    公开(公告)号:US4010018A

    公开(公告)日:1977-03-01

    申请号:US569478

    申请日:1975-04-18

    IPC分类号: F04D23/00 F25B3/00 F25B15/00

    摘要: Rotary thermodynamic compression and refrigeration apparatus and methods in which the mechanical impedance and/or thermodynamic impedance of the system are controlled in order to obtain stable operation. By controlling these impedances, the overall pressure drop of the fluid flow in the system is made to increase with increasing fluid flow rate, thus ensuring stable operation.

    摘要翻译: 旋转热力学压缩和制冷装置以及其中控制系统的机械阻抗和/或热力学阻抗以获得稳定操作的方法。 通过控制这些阻抗,使系统中的流体流的总体压降随着流体流速的增加而增加,从而确保稳定运行。

    Method of and apparatus for compressing gas
    10.
    发明授权
    Method of and apparatus for compressing gas 失效
    用于压缩气体的方法和装置

    公开(公告)号:US3559375A

    公开(公告)日:1971-02-02

    申请号:US3559375D

    申请日:1968-11-15

    发明人: BIDARD RENE

    IPC分类号: F04D23/00 B01D19/00

    CPC分类号: F04D23/00

    摘要: AN ARRANGEMENT FOR COMPRESSING GASES OF RELATIVELY LOW MOLECULAR WEIGHT CONSISTS IN CREATING A GAS-LIQUID EMULSION FROM THE GAS, THE EMULSION BEING FORMED BY INJECTION OF THE GAS INTO A LIQUID WHICH HAS PREVIOUSLY BEEN BROUGHT UP TO SPEED; THE EMULSION IS THEN SLOWED DOWN IN A DIFFUSER THEREBY UNDERGOING COMPRESSION, AND THE TWO PHASES-GAS AND LIQUID-ARE THEN SEPARATED. THE COMPRESSED GAS IS THEN PASSED TO ITS POINT OF UTILIZATION AND THE LIQUID IS THEN PUT THROUGH A PUMP WHERE IT REGAINS THE ENERGY WHICH IT HAD GIVEN UP TO THE GAS AND IS THEN RE-CYCLED WITH FRESH GAS TO BE EMULSIFIED AND COMPRESSED.