公开(公告)号：US20240060825A1

公开(公告)日：2024-02-22

申请号：US18385414

申请日：2023-10-31

Applicant: Purple Mountain Observatory, Chinese Academy of Sciences

Inventor： Zhenhui LIN ,  Qijun YAO ,  Dong LIU ,  Jie LIU ,  Wenying DUAN ,  Shengcai SHI

IPC: G01J5/80 ,  G01J5/53 ,  G01J5/54 ,  G01J5/00

CPC classification number: G01J5/804 ,  G01J5/806 ,  G01J5/53 ,  G01J5/54 ,  G01J5/0014 ,  G01J2005/208

Abstract: An omnidirectional measurement system for a time-varying characteristic of atmospheric vapor radiation includes an antenna and calibrator assembly, a receiver assembly, a room temperature IF assembly, and a data acquisition and system control assembly. Atmospheric vapor features a wide profile and strong radiation in a frequency band of 183 GHz, and is often seen in the characteristic measurement of atmospheric vapor in high-altitude areas. The omnidirectional measurement system combines a superconductor-insulator-superconductor (SIS) mixer with high detection sensitivity in the frequency band of 183 GHz with a structure that integrates pitch scanning, omnidirectional scanning, and automatic calibration to achieve fast and high-precision omnidirectional scanning measurement of the time-varying characteristic of atmospheric vapor radiation. The omnidirectional measurement system has a pitch adjustment-based fast omnidirectional scanning function, and can measure the time-varying characteristic of atmospheric vapor radiation with higher precision and higher temporal resolution through the SIS mixer with higher sensitivity.

公开(公告)号：US20230343616A1

公开(公告)日：2023-10-26

申请号：US18194651

申请日：2023-04-03

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Yukio ONO ,  Mao OMORI

IPC: G01J5/00 ,  G01J5/80 ,  H01L21/67

CPC classification number: H01L21/67248 ,  G01J5/0096 ,  G01J5/806 ,  H01L21/67115

Abstract: An edge radiation thermometer performs measurements before a semiconductor wafer is transported into a chamber. The edge radiation thermometer performs the measurements while the semiconductor wafer is supported by lift pins and while the semiconductor wafer is placed on a susceptor, after the semiconductor wafer is transported into the chamber. A controller calculates a reflectivity of the semiconductor wafer based on these measurement values. Then, the controller calculates an intensity of an ambient light receive by the edge radiation thermometer, based on the reflectivity and an intensity of synchrotron radiation radiated from a quartz window. Subsequently, the controller subtracts the intensity of the ambient light from an intensity of light received by of the edge radiation thermometer during heat treatment on the semiconductor wafer to calculate the temperature of the semiconductor wafer.

公开(公告)号：US11994431B2

公开(公告)日：2024-05-28

申请号：US18385414

申请日：2023-10-31

Applicant: Purple Mountain Observatory, Chinese Academy of Sciences

Inventor： Zhenhui Lin ,  Qijun Yao ,  Dong Liu ,  Jie Liu ,  Wenying Duan ,  Shengcai Shi

IPC: G01N21/3504 ,  G01J5/00 ,  G01J5/53 ,  G01J5/54 ,  G01J5/80 ,  G01J5/20 ,  G01N21/3586 ,  G01W1/06

CPC classification number: G01J5/804 ,  G01J5/0014 ,  G01J5/53 ,  G01J5/54 ,  G01J5/806 ,  G01J2005/208 ,  G01N21/3504 ,  G01N21/3586 ,  G01W1/06

Abstract: An omnidirectional measurement system for a time-varying characteristic of atmospheric vapor radiation includes an antenna and calibrator assembly, a receiver assembly, a room temperature IF assembly, and a data acquisition and system control assembly. Atmospheric vapor features a wide profile and strong radiation in a frequency band of 183 GHz, and is often seen in the characteristic measurement of atmospheric vapor in high-altitude areas. The omnidirectional measurement system combines a superconductor-insulator-superconductor (SIS) mixer with high detection sensitivity in the frequency band of 183 GHz with a structure that integrates pitch scanning, omnidirectional scanning, and automatic calibration to achieve fast and high-precision omnidirectional scanning measurement of the time-varying characteristic of atmospheric vapor radiation. The omnidirectional measurement system has a pitch adjustment-based fast omnidirectional scanning function, and can measure the time-varying characteristic of atmospheric vapor radiation with higher precision and higher temporal resolution through the SIS mixer with higher sensitivity.

公开(公告)号：US20230314226A1

公开(公告)日：2023-10-05

申请号：US18329863

申请日：2023-06-06

Applicant: Huawei Technologies Co., Ltd.

Inventor： Lin Du ,  Yuhao Zhou

IPC: G01J5/00 ,  G01J5/80

CPC classification number: G01J5/0025 ,  G01J5/806 ,  G01J2005/0077

Abstract: A temperature measurement method includes obtaining a target temperature of a to-be-measured region based on a temperature measurement model and an obtained infrared image of the to-be-measured region; and outputting the target temperature, where the temperature measurement model is a temperature measurement model obtained by training a neural network based on an infrared image of a black body and an infrared image of a preset region.