公开(公告)号：US20050247895A1

公开(公告)日：2005-11-10

申请号：US11116175

申请日：2005-04-28

Applicant: Moritoshi Ando ,  Satoru Sakai

Inventor： Moritoshi Ando ,  Satoru Sakai

IPC: G01B11/30 ,  G01N21/86 ,  G01N21/88 ,  G01N21/89 ,  G01N21/896 ,  G01N21/95

CPC classification number: G01N21/896 ,  G01N2021/9513 ,  G01N2201/1085

Abstract: A surface inspecting apparatus that inspects a surface of a material based on an intensity of a reflected light from the surface includes an illuminating unit that illuminates a light on the surface; and a detecting unit that detects the intensity of the reflected light from the surface. The light has an intensity distribution in which an intensity of the light is higher approaching the surface.

Abstract translation: 基于来自表面的反射光的强度检查材料的表面的表面检查装置包括：照射表面上的光的照明单元; 以及检测单元，其检测来自表面的反射光的强度。 光具有强度分布，其中光的强度较高地接近表面。

公开(公告)号：US06587617B2

公开(公告)日：2003-07-01

申请号：US09791092

申请日：2001-02-22

Applicant: Zonh-Zen Ho

Inventor： Zonh-Zen Ho

IPC: G02B628

CPC classification number: G01N21/253 ,  G01N2201/1085 ,  G02B6/4249

Abstract: An apparatus and method for imaging biochip spots in which a linearly spaced array of micro-lenses has a set of optical fibers which are associated with each micro-lens to receive and transmit the image magnified by the micro-lens. The micro-lenses are spaced to that of the biochip spots so that the microlens array can be positioned over a selected group of biochip spots, one for each micro-lens. The microlens array can be translated to be over selected groups of biochip spots. A detector and user devise such as a computer and a screen are used to record and view the collected images.

公开(公告)号：US07286224B2

公开(公告)日：2007-10-23

申请号：US11018759

申请日：2004-12-21

Applicant: Douglas N. Curry ,  Richard H. Bruce

Inventor： Douglas N. Curry ,  Richard H. Bruce

IPC: G01N21/64 ,  G01N21/25 ,  G01J3/24 ,  A61B5/00 ,  G01N21/76

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A light path has a first end defining an input aperture perpendicular to the first direction and parallel to the surface, and a second end defining an output aperture. A plurality of radiation beams linearly scan and interact in time-multiplexed alternating turns with the surface below the input aperture to produce a time-multiplexed light signal that is collected by the input aperture and transmitted by the light path to the output aperture. A photodetector arrangement detects the light signal at the output aperture. A processor processes the detected time-multiplexed light.

Abstract translation: 装置对表面进行成像。 成像器台沿第一方向线性平移表面。 光路具有限定垂直于第一方向并平行于表面的输入孔的第一端，以及限定输出孔的第二端。 多个辐射束在时间多路复用的交替匝中线性扫描并与输入孔下方的表面相互作用，以产生由输入孔收集并由光路传输到输出孔的时间复用光信号。 光电检测器装置检测输出孔处的光信号。 处理器处理检测到的时间复用光。

公开(公告)号：US07280261B2

公开(公告)日：2007-10-09

申请号：US11017440

申请日：2004-12-20

Applicant: Douglas N. Curry ,  Richard H. Bruce ,  Robert T. Krivacic

Inventor： Douglas N. Curry ,  Richard H. Bruce ,  Robert T. Krivacic

IPC: G02B26/08

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage has a planar surface for supporting a sample. A fiber optic bundle has a first end of parallel first fiber ends that are arranged to define an input aperture for viewing the sample on the imager stage. A distal bundle end is arranged to define an output aperture disposed away from the imager stage. A scanning radiation source scans a radiation beam along a path that is perpendicular to the sample on the imager stage. The input aperture of the fiber optic bundle receives a light signal that is produced by the radiation source scan of the imager stage sample. The light signal is transmitted to the bundle output aperture. A photodetector detects the light signal at the distal bundle end, and a processor processes the detected light.

Abstract translation: 装置对表面进行成像。 成像器台具有用于支撑样品的平坦表面。 光纤束具有平行的第一光纤端的第一端，其布置成限定用于观察成像器台上的样品的输入孔。 远侧束端布置成限定远离成像器台布置的输出孔。 扫描辐射源沿着与成像器台上的样品垂直的路径扫描辐射束。 光纤束的输入孔径接收由成像器台样品的辐射源扫描产生的光信号。 光信号被传输到束输出孔径。 光电检测器检测远侧束端处的光信号，并且处理器处理检测到的光。

公开(公告)号：US20020136491A1

公开(公告)日：2002-09-26

申请号：US09791092

申请日：2001-02-22

Inventor： Zonh-Zen Ho

IPC: G02B006/32

CPC classification number: G01N21/253 ,  G01N2201/1085 ,  G02B6/4249

Abstract: An apparatus and method for imaging biochip spots in which a linearly spaced array of micro-lenses has a set of optical fibers which are associated with each micro-lens to receive and transmit the image magnified by the micro-lens. The micro-lenses are spaced to that of the biochip spots so that the microlens array can be positioned over a selected group of biochip spots, one for each micro-lens. The microlens array can be translated to be over selected groups of biochip spots. A detector and user devise such as a computer and a screen are used to record and view the collected images.

Abstract translation: 用于成像生物芯片斑点的装置和方法，其中线性间隔的微透镜阵列具有与每个微透镜相关联的一组光纤，以接收和透射由微透镜放大的图像。 微透镜与生物芯片斑点间隔开，使得微透镜阵列可以位于所选择的一组生物芯片斑点上，每个微透镜一个。 微透镜阵列可以被翻译成选定的生物芯片点组。 使用诸如计算机和屏幕的检测器和用户设备来记录和查看所收集的图像。

公开(公告)号：US20100137722A1

公开(公告)日：2010-06-03

申请号：US12594095

申请日：2008-03-28

Applicant: John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

Inventor： John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

IPC: A61B6/14 ,  H01L27/146

CPC classification number: A61B5/0088 ,  A61B5/0082 ,  G01N21/359 ,  G01N21/49 ,  G01N2021/4707 ,  G01N2021/4719 ,  G01N2201/1053 ,  G01N2201/1085

Abstract: A medical imager, primarily for use in oral and dental applications. The imager has a source for providing a plurality of collimated beams of non-ionizing radiation, in particular near-infrared light, and a plurality of correlated detectors. Each detector is arranged to receive unscattered light from one or part of one of said collimated beams and scattered light from one or more other beams. The imager further comprises means for using both the unscattered and scattered light to form an image.

Abstract translation: 一种医用成像仪，主要用于口腔和牙科应用。 成像器具有用于提供多个非电离辐射的准直束，特别是近红外光的源和多个相关检测器的源。 每个检测器布置成从所述准直束中的一个或一部分接收未散射的光并且来自一个或多个其它光束的散射光。 成像器还包括用于使用未散射光和散射光两者来形成图像的装置。

公开(公告)号：US4943734A

公开(公告)日：1990-07-24

申请号：US373914

申请日：1989-06-30

Applicant: Carl E. A. Johnson ,  Jay L. Ormsby ,  Eric T. Chase ,  George S. Quackenbos ,  Sergey V. Broude ,  Abdu Bou dour

Inventor： Carl E. A. Johnson ,  Jay L. Ormsby ,  Eric T. Chase ,  George S. Quackenbos ,  Sergey V. Broude ,  Abdu Bou dour

IPC: G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G06T1/00

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

公开(公告)号：US4876455A

公开(公告)日：1989-10-24

申请号：US160562

申请日：1988-02-25

Applicant: Arthur C. Sanderson ,  Lee E. Weiss ,  Shree K. Nayar

Inventor： Arthur C. Sanderson ,  Lee E. Weiss ,  Shree K. Nayar

IPC: G01N21/956

CPC classification number: G01N21/95684 ,  G01N2021/8887 ,  G01N2021/95646 ,  G01N2201/102 ,  G01N2201/1085

Abstract: The invention is an automated solder joint inspection system for determining the quality of a specular soldered joint through examination of the shape of the joint surface using a series of point light sources and the associated highlight reflections from the joint surface. The light from the point light sources, which is directed toward the solder joint, is reflected in a pattern from the solder joint to an array of light responsive transducers, such as a camera, at a fixed location. Utilizing the intensity values from the light responsive transducer array, a binary grid map is generated for the reflections from each point light source. Using known surface features of solder joints along with curve fitting techniques, a series of grid maps may be mathematically interpreted to reconstruct the solder joint surface. A rule-based system, through comparison with acceptable solder joint surface features, evaluates and classifies the joint for an acceptability determination.

Abstract translation: 本发明是一种自动焊接检查系统，用于通过使用一系列点光源和从关节表面相关联的高光反射来检查接合表面的形状来确定镜面焊接接头的质量。 来自位于焊接点处的点光源的光以固定位置从焊料接头到诸如照相机的光响应传感器阵列的图案反射。 利用来自光响应换能器阵列的强度值，生成来自每个点光源的反射的二进制网格图。 使用焊接接头的已知表面特征以及曲线拟合技术，可以数学地解释一系列网格图以重建焊点表面。 基于规则的系统通过与可接受的焊点表面特征进行比较，评估和分类接头以进行可接受性测定。

公开(公告)号：US4541715A

公开(公告)日：1985-09-17

申请号：US456296

申请日：1983-01-06

Applicant: Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

Inventor： Nobuyuki Akiyama ,  Mitsuyoshi Koizumi

IPC: G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G01N21/00

CPC classification number: G03F7/70866 ,  G01N21/94 ,  G03F7/70916 ,  G01N21/47 ,  G01N2201/1085

Abstract: An apparatus for detecting contaminants depositing on the reticle of a reduction projection mask aligner comprises a laser spot projector which conducts a laser beam to the light path upstream of the condenser lens of the aligner such that the laser beam is in the same direction as of the exposure light beam. The laser spot projector projects the laser beam from above the reticle through the condenser lens so as to form a laser spot on the upper surface of the reticle. A laser spot scanner which scans the entire area of the reticle by the laser spot projected on to the reticle by the laser spot projector, and a photoelectric detector which receives the scattered light emitted aslant on the reticle surface, whereby a contaminant on the reticle is detected in accordance with the signal produced by the detector.

Abstract translation: 用于检测沉积在掩模版上的污染物的还原投影掩模对准器的装置包括：激光点投影仪，其将激光束传导到对准器的聚光透镜上游的光路，使得激光束处于与 曝光光束。 激光点投影仪将激光束从光罩上方投射聚光透镜，以在掩模版的上表面上形成激光斑点。 一种激光点扫描器，其通过由激光点投影仪投射在掩模版上的激光光斑扫描掩模版的整个区域，以及光电检测器，其接收在光罩表面上倾斜发射的散射光，由此掩模版上的污染物为 根据由检测器产生的信号检测。

公开(公告)号：US09084535B2

公开(公告)日：2015-07-21

申请号：US12594095

申请日：2008-03-28

Applicant: John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

Inventor： John Michael Girkin ,  Simon Poland ,  Christopher Longbottom

IPC: A61B6/14 ,  A61B5/00 ,  G01N21/49 ,  G01N21/359 ,  G01N21/47

CPC classification number: A61B5/0088 ,  A61B5/0082 ,  G01N21/359 ,  G01N21/49 ,  G01N2021/4707 ,  G01N2021/4719 ,  G01N2201/1053 ,  G01N2201/1085

Abstract: A medical imager, primarily for use in oral and dental applications. The imager has a source for providing a plurality of collimated beams of non-ionizing radiation, in particular near-infrared light, and a plurality of correlated detectors. Each detector is arranged to receive unscattered light from one or part of one of said collimated beams and scattered light from one or more other beams. The imager further comprises means for using both the unscattered and scattered light to form an image.

Abstract translation: 一种医用成像仪，主要用于口腔和牙科应用。 成像器具有用于提供多个非电离辐射的准直束，特别是近红外光的源和多个相关检测器的源。 每个检测器布置成从所述准直束中的一个或一部分接收未散射的光并且来自一个或多个其它光束的散射光。 成像器还包括用于使用未散射光和散射光两者来形成图像的装置。