摘要:
A lithographic apparatus comprises an illumination system, a support constructed to support a patterning device, and a projection system. In pixel grid imaging, a large number of small optical spots are imaged onto the substrate surface using a micro-lens array (MLA). The z position of the MLA is adjustable in order to focus the spots on the substrate surface and/or to compensate for differences in height of the substrate surface. The focusing adjustment is based on an output of an ultrasonic distance sensor provided in the vicinity of the substrate surface.
摘要:
An ultrasonic sensor for a construction implement is disclosed which provides an indication of the position of the sensor relative to a reference surface in two dimensions. In a preferred embodiment of the invention, a pair of sensors are positioned a predetermined distance from one another to transmit and receive ultrasonic waves to measure the time it takes the waves to travel to the reference surface and be reflected back to the ultrasonic transducers. Additionally, a transducer is disclosed which detects a side lobe of a acoustic wave transmitted by an acoustic transducer whereby the velocity of said acoustic pulse may be calculated.
摘要:
Provided are a system and a method for measuring a liquid level of a vehicle fuel tank, and more particularly, to a system for measuring a liquid level of a vehicle fuel tank including an ultrasonic sensor unit provided on a bottom surface in the vehicle fuel tank to acquire measurement data for calculating a distance from the bottom surface in the fuel tank to a fuel surface and a central processing unit using the measurement data transmitted from the ultrasonic sensor unit by a preset number of times for a preset time to calculate liquid level information of the fuel tank.
摘要:
A distance and temperature sensing unit is used on paving vehicles. The unit has a first set of range sensors of a first diameter and a second set of range sensors of a second diameter. The unit calculates a weighted average distance to a road surface based on ranges measured by the multiple sensors. The unit also has a temperature sensor on a temperature bar. The bar is affixed to the unit by a flexible connection preventing break-off when the bar encounters obstacles, like the road surface, while the paving vehicle is moving.
摘要:
An ultrasonic probe utilized in an ultrasonic ranging system for determining fluid volume and/or fluid leakage in an underground storage tank, as well as monitoring fluid inventory, is provided which is characterized by (i) having its calibration reflectors positioned whereby each of the secondary echo packets formed by the calibration reflectors of the ultrasonic probe becomes imbedded into the trailing edge of a primary echo packet of another calibration reflector or to cause its secondary echo packet to be detected by the transducer after the transducer has detected a primary echo packet associated with the fluid surface, (ii) each of the calibration reflectors being positioned perpendicular to and offset from the longitudinal axis of the probe body, (iii) an ultrasonic sound wave dampening member fixedly positioned in the probe body between the transducer assembly and the tank bottom, the wave dampening member having a surface facing toward the transducer assembly wherein the surface is configured to dampen sound waves striking the surface before the sound waves are reflected from the surface, or (iv) the transducer assembly comprising a transducer body in which is housed a piezoelectric crystal oriented perpendicular to the longitudinal axis of the prove body, wherein the transducer body is structured to dampen selected ultrasonic sound waves which emanate from the crystal.
摘要:
A method includes lowering a sensor unit in a tank, where the tank is capable of receiving a material. The method also includes determining a first distance between the material and the sensor unit and determining a second distance between the sensor unit and a main unit that lowers the sensor unit. In addition, the method includes determining a level of the material in the tank using the first and second distances. The method could further include calibrating the sensor unit to compensate for variations in a medium within the tank, where the sensor unit transmits wireless signals through the medium to determine the first distance. Determining the first distance could include using an ultrasonic measurement technique, and determining the second distance could include using a non-contact servo measurement technique.
摘要:
An ultrasound system for measuring the fluid level in a tank includes means for emitting an ultrasound detecting beam towards a surface of the fluid in the tank from a first position relative to the tank, yielding at least a portion of a path of the ultrasound detecting beam being generally perpendicular to the bottom of the tank and defining an axis intersecting the bottom of the tank, the first position being adjacent the bottom of the tank; means for receiving echoes from the ultrasound detecting beam reflected from the surface of the fluid in the tank at a second position biased from the first position; and means for determining the fluid level using the echoes received from the ultrasound detecting beam and a distance between the first and second positions. Such a system allows eliminating the limitation caused by the transducers' dead zone without requiring the use of a waveguide. A reference target can be used to calibrate the system for the speed of sound of the fluid mixture in the tank and for measuring the fluid mixture density.
摘要:
An ultrasonic pulse/echo measurement arrangement includes an ultrasonic transducer (12), which is mounted spatially fixed on an air spring cover plate (4). The arrangement further includes a fixedly mounted reference reflector (14), a target reflector (16) mounted on a roll-off piston (8) or on the buffer (18) as well as a transmitter/receiver evaluation electronic circuit (30). The running time as well as the amplitude of the reference signal is evaluated to precisely determine the pressure present in the interior space of the air spring. The ultrasonic transducer (12) has a null/4-adaptation layer (22), whose impedance does not correspond to the geometric mean of the impedances of the ultrasonic transducer (12) and the ambient air of the interior space (20) of the air spring, but rather, is a mismatch. The evaluation electronic circuit (30) can be calibrated at ambient pressure for the determination of the inner pressure of the air spring. Preferably, the pressure measuring method according to the invention is also used to determine the running-time dependent spring height in an air spring (2) of a motor vehicle.
摘要:
The exact spring height as well as the spring pressure can be determined with a single arrangement for the optimal utilization of the axle loads of a multi-axle air spring suspended vehicle and to control the distance between the chassis and the axle. An air spring (2) is equipped with an ultrasonic pulse/echo measuring system. The air spring (2) includes a transmitter/receiver component (14) arranged on the chassis and a first reference electrode (20) and a reflector component (16) fixed to the axle. The air spring height can be determined in a conventional manner from the relative value of the running times of the ultrasonic pulses which are traversed on the reference path and the measuring path. A second reference reflector (22) is mounted at a different distance to the first reference reflector (20). For the determination of pressure, the transmitting power or the receiving amplification of the second reference reflector (22) is controlled in such a manner that the amplitude (intensity) of the sonic waves, which are reflected from the first reference reflector (20), remains at a constant value. This amplitude (intensity) is measured via the sonic transducer (14).
摘要:
Apparatus and a method using ultrasonic signals to determine the distance between the displacement of two points in space. An ultrasonic distance measurement unit (1) generates frequency modulated ultrasonic waves using binary shift keying. The signals are transmitted by the transmitting transducer (2) towards a reflector assembly (30), preferably comprised of two reflectors (31, 32). One of the reflectors (31) is smaller than the other reflector (32), and the smaller reflector (31) is positioned in front of the larger reflector (32). The reflected signals are received by the receiving transducer (3). The unit (1) phase digitizes and processes the received signal by recording time stamps of zero-crossings of the received signal. The speed of sound may be determined by a temperature measurement system (5) and/or by measuring the transit time difference between the two reflectors (31, 32) of the assembly (30). The distance between the unit (1) and the assembly (30) can then be determined from the speed of sound and the time taken for an ultrasonic signal to travel between the unit (1) and assembly (30). Displacement of the assembly (30) relative to the unit (1) can be determined by making distance measurements over a period of time. The present invention has a number of applications, including measurement of roof convergence in underground mining.