DOUBLE DIPOLE LITHOGRAPHY METHOD FOR SEMICONDUCTOR DEVICE FABRICATION
    1.
    发明申请
    DOUBLE DIPOLE LITHOGRAPHY METHOD FOR SEMICONDUCTOR DEVICE FABRICATION 有权
    用于半导体器件制造的双DTOLELE算法

    公开(公告)号:US20130188164A1

    公开(公告)日:2013-07-25

    申请号:US13791542

    申请日:2013-03-08

    IPC分类号: G03B27/52 H01L21/302

    摘要: A method of photolithography including coupling a first aperture to a lithography system, then performing a first illumination process to form a first pattern on a layer of a substrate using the first aperture, thereafter coupling a second aperture to the lithography system, and performing a second illumination process to form a second pattern on the layer of the substrate using the second aperture. The first aperture includes a first pair and a second pair of radiation-transmitting regions. The second aperture includes a second plate having a third pair and a fourth pair of radiation-transmitting regions.

    摘要翻译: 一种光刻方法,包括将第一孔耦合到光刻系统,然后执行第一照明处理,以使用第一孔在衬底的层上形成第一图案,之后将第二孔耦合到光刻系统,以及执行第二孔 使用第二孔在衬底的层上形成第二图案。 第一孔包括第一对和第二对辐射透射区。 第二孔包括具有第三对和第四对辐射透射区的第二板。

    Optical system for alternatively projecting adjacent images of adjacent
objects or double images of a single object
    3.
    发明授权
    Optical system for alternatively projecting adjacent images of adjacent objects or double images of a single object 失效
    用于交替地投射相邻对象的相邻图像或单个对象的双重图像的光学系统

    公开(公告)号:US4110023A

    公开(公告)日:1978-08-29

    申请号:US782864

    申请日:1977-03-30

    申请人: Morton Silverberg

    发明人: Morton Silverberg

    IPC分类号: G03B27/52 G03B21/00

    CPC分类号: G03B27/523

    摘要: An optical system is disclosed for substantially doubling the capacity of a photocopying apparatus or the like. It provides alternative modes of operation; adjacent imaging of adjacent objects or double imaging of a single object. In the adjacent imaging mode, a single projection lens projects adjacent images of two adjacent objects in a straightforward way. In the alternative double imaging mode, a pair of projection lenses projects twin images of a single object along "parallel" optical paths. In the double imaging mode, a field stop is included to block light from the vacated half of the object station. The field stop is located near the first lens on its object side.

    摘要翻译: 公开了一种用于使复印装置等的容量大大加倍的光学系统。 它提供了替代的操作模式; 相邻对象的相邻成像或单个对象的双重成像。 在相邻的成像模式中,单个投影透镜以直接的方式投影两个相邻对象的相邻图像。 在替代双重成像模式中,一对投影透镜沿“平行”光路投射单个物体的双图像。 在双重成像模式中,包括场停止以阻挡来自物体站的空出的一半的光。 现场停止位于物体侧的第一个镜头附近。

    Mounting assembly for optics tub in a reproduction apparatus
    4.
    发明授权
    Mounting assembly for optics tub in a reproduction apparatus 失效
    复制装置中用于光学凹槽的安装组件

    公开(公告)号:US5185626A

    公开(公告)日:1993-02-09

    申请号:US833255

    申请日:1992-02-10

    IPC分类号: G03B27/32 G03B27/52 G03G15/04

    摘要: This invention is directed to an assembly for adjustably mounting the optical system of a reproduction apparatus, having an optical system for projecting a light image of information to be reproduced on to a recording medium, relative to a frame of the reproduction apparatus. The adjustable mounting assembly comprises at least one stud supported by the frame and selectively moveable relative thereto. The optical system is clamped to at least one stud for movement therewith, the clamping mechanism including an elastomeric member for substantially isolating the optical system from any shock imparted to the frame.

    摘要翻译: 本发明涉及一种用于可调节地安装再现设备的光学系统的组件,其具有相对于再现设备的帧具有用于将要再现的信息的光图像投影到记录介质的光学系统。 所述可调安装组件包括至少一个由所述框架支撑并且可相对于所述框架选择性地移动的螺柱。 光学系统被夹紧到至少一个螺柱以与其一起运动,夹紧机构包括弹性体构件,用于将光学系统与施加到框架的任何冲击基本隔离。

    Scanning system for an electrostatic copying apparatus
    5.
    发明授权
    Scanning system for an electrostatic copying apparatus 失效
    静电复印设备扫描系统

    公开(公告)号:US4145136A

    公开(公告)日:1979-03-20

    申请号:US640284

    申请日:1975-12-12

    申请人: Toru Takahashi

    发明人: Toru Takahashi

    摘要: A copying apparatus having a stationary or movable original to be copied, a lens movable parallel to the original and perpendicular to its optical axis, a photosensitive medium movable parallel to the lens and a flash lamp device for illuminating the entire surface of the original wherein movement of the elements satisfies the condition ##EQU1## where V.sub.1 is the velocity of movement of the photosensitive medium and V.sub.1 ' the velocity of movement of the light image at the surface of the medium.

    摘要翻译: 具有要复制的静止或可移动原稿的复印设备,可平行于原稿并垂直于其光轴的透镜,平行于透镜可移动的感光介质和用于照亮原稿的整个表面的闪光灯装置,其中运动 的元素满足条件,其中V1是光敏介质的移动速度,V1'是光图像在介质表面的移动速度。

    Lens shift mechanism
    6.
    发明授权
    Lens shift mechanism 失效
    镜头移位机制

    公开(公告)号:US4077710A

    公开(公告)日:1978-03-07

    申请号:US654819

    申请日:1976-02-03

    CPC分类号: G03B27/523 G03G15/041

    摘要: Apparatus for shifting a lens carriage including a variable magnification pancratic lens assembly having a plurality of relatively movable optical elements. The lens carriage is mounted to move a first lens element to a plurality of discrete positions along a travel path (oblique to the optical axis established at the 1:1 magnification ratio) for maintaining registration of the light image projected by the lens assembly in the image plane when the image-to-object distance is fixed. A second element of the lens assembly is carried by the first element and is longitudinally movable to a plurality of discrete positions relative to the first element. An arm is positioned in the path of movement of the second lens element to engage the second element to effect particular longitudinal movement thereof relative to the first lens element as the carriage is moved. A series of stops interact with the lens elements to establish specific optical relationships therebetween at discrete positions of the second lens element and discrete positions of the first lens element to provide the varying magnifications.

    摘要翻译: 用于移动包括具有多个相对可移动光学元件的可变放大倍数聚焦透镜组件的透镜托架的装置。 透镜托架被安装成沿着行进路径(倾斜于以1:1倍率建立的光轴)将第一透镜元件移动到多个离散位置,以保持由透镜组件投影的光图像的配准在 图像对象距离固定时的图像平面。 透镜组件的第二元件由第一元件承载并且可相对于第一元件纵向移动到多个离散位置。 臂被定位在第二透镜元件的移动路径中以接合第二元件,以在托架移动时实现相对于第一透镜元件的特定的纵向移动。 一系列停止物与透镜元件相互作用,以在第二透镜元件的离散位置和第一透镜元件的离散位置之间建立特定的光学关系,以提供变化的放大率。

    Dual optical projection system for copying machines
    7.
    发明授权
    Dual optical projection system for copying machines 失效
    复印机双光学投影系统

    公开(公告)号:US3998543A

    公开(公告)日:1976-12-21

    申请号:US574094

    申请日:1975-05-02

    CPC分类号: G03B27/523 G03G15/23

    摘要: A copying machine which can image the upper side or the underside of an original onto a photosensitive surface. The original is placed onto a copyboard or between two copyboards, and the projection system for integral imaging of the upper side or the underside of such original comprises two units one of which images the upper side and the other of which images the underside of the original. A switchover device, which may constitute a component of one of the projection units, is provided to select that side of an original which is to be imaged. Alternatively, the switchover device activates the lamps for illumination of the upper side or the underside of an original.

    摘要翻译: 可将原稿的上侧或下侧成像到感光面上的复印机。 原件被放置在电子白板上或两个电子白板之间,并且用于这种原稿的上侧或下侧的整体成像的投影系统包括两个单元,其中一个图像是原件的下侧和另一个图像 。 可以构成投影单元之一的组件的切换装置被提供以选择要被成像的原稿的那一侧。 或者,切换装置激活用于照明原件的上侧或下侧的灯。

    Photocomposing apparatus
    8.
    发明授权
    Photocomposing apparatus 失效
    照相装置

    公开(公告)号:US3848996A

    公开(公告)日:1974-11-19

    申请号:US36072573

    申请日:1973-05-16

    申请人: XEROX CORP

    发明人: GODING J

    CPC分类号: G03B27/6207 G03B27/523

    摘要: A photocomposing apparatus for positioning of an optical exposure system so that different size originals supported in the object plane of the system can be recorded within a predetermined format upon a sensitized recording medium supported in the image plane of the system. The optical system is arranged so that movement of the system causes an image of the original to be either minified or magnified at the image plane at the operator''s option. A light image of the outer margins of the desired format is projected back through the optical system thereby presenting to the operator an outline at the object plane of the area upon the original that will be recordable within the format. The original is then placed over the image outline and the optics are adjusted so that the image encompasses the original to be reproduced.

    摘要翻译: 一种用于定位光学曝光系统的光电装置,使得支撑在系统的物体平面中的不同尺寸的原稿可以以预定格式记录在支撑在系统的图像平面中的敏化记录介质上。 光学系统被布置成使得系统的移动导致原稿的图像在操作者的选择下在图像平面上被缩小或放大。 所需格式的外边缘的光图像通过光学系统投射回来,从而向操作者呈现可在格式中可记录的原件上的区域的物体平面上的轮廓。 然后将原件放置在图像轮廓上,并且调节光学器件,使得图像包含要再现的原稿。

    Electrophotographic copier/duplicator having dual imaging apparatus
    10.
    发明授权
    Electrophotographic copier/duplicator having dual imaging apparatus 失效
    具有双重成像装置的电子照相复印机/复印机

    公开(公告)号:US5049936A

    公开(公告)日:1991-09-17

    申请号:US459502

    申请日:1990-01-02

    申请人: Mark M. Meyers

    发明人: Mark M. Meyers

    IPC分类号: G03B27/52 G03G15/04

    摘要: An electrophotographic copier/duplicator having a 17".times.11" wide endless photoconductor includes single imaging apparatus for forming and processing a single 17".times.11" image at a time, within a 17".times.11 " image frame of its photoconductor, and dual imaging apparatus for simultaneously forming and processing two 8.5".times.11" images at a time, within a 17".times.11" image frame of such photoconductor.

    摘要翻译: 具有17“'11”宽的环形光电导体的电子照相复印机/复印机包括单个成像装置,用于在其感光体的17''11“图像帧内一次形成和处理单个17”'11“图像 ,以及双重成像装置,用于在这种感光体的17''11“图像帧内同时形成和处理两个8.5”'11“图像。