公开(公告)号：US06738681B2

公开(公告)日：2004-05-18

申请号：US10359086

申请日：2003-02-06

申请人： Yoshiaki Kobayashi

发明人： Yoshiaki Kobayashi

IPC分类号： G06F1900

CPC分类号： H01L21/67276 ,  G05B19/41895 ,  G05B2219/31271 ,  G06Q10/0631 ,  Y02P90/285 ,  Y02P90/60 ,  Y02P90/86

摘要： Shortening TAT for processing express lots without reducing the utilization rate of manufacturing apparatuses for semiconductor device. When the number of vacant ports LPOT of a manufacturing apparatus EQ3 used in a next step is only one at the of time of completing a process for a normal lot LA by a manufacturing apparatus EQ1 and when there is a possibility that processes for an express lot LB performed by a manufacturing apparatus EQ2 will be completed before a remaining processing time period for a lot LC performed by the manufacturing apparatus EQ3 reaches a predetermined set value, the lot LA is transferred to a lot stocker LS for securing a vacant port LPOT and as soon as the processes for the express lot LB performed by the manufacturing apparatus EQ2 are completed, the express lot LB is transferred to the vacant port LPOT in the manufacturing apparatus EQ3.

摘要翻译： 缩短用于处理快递的TAT，而不降低半导体装置的制造装置的利用率。 当在下一步骤中使用的制造装置EQ3的空闲端口LPOT的数量仅在通过制造装置EQ1完成正常批次LA的处理之时只有一个，并且当存在用于快速批处理的可能性 在制造装置EQ3执行的批量LC的剩余处理时间段达到预定设定值之前，由制造装置EQ2执行的LB将被完成，批号LA被传送到用于固定空端口LPOT的批量储存器LS，并且作为 随着制造装置EQ2执行的快件LB的处理完成，快递批次LB被传送到制造装置EQ3中的空的端口LPOT。

公开(公告)号：US20080021593A1

公开(公告)日：2008-01-24

申请号：US11458554

申请日：2006-07-19

申请人： Chih-Yuan YU ,  Ren-Chyi YOU ,  Ming WANG

发明人： Chih-Yuan YU ,  Ren-Chyi YOU ,  Ming WANG

IPC分类号： G06F7/00

CPC分类号： G05B19/4189 ,  G05B2219/31271 ,  G05B2219/31272 ,  G05B2219/31372 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/28

摘要： System and method for implementing integrated transportation control in a wafer fabrication facility are described. One embodiment is a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and first and second interbay OHT systems each for interconnecting the intrabay OHT systems. The factory automation system comprises a manufacturing execution system (“MES”) for providing lot information regarding wafers being processed in the fab, a material control system (“MCS”) for providing traffic information regarding transportation of wafers in the fab, and an integrated transportation control (“ITC”) system for using the lot information from the MES and the traffic information from the MCS for selecting a destination and a route to the selected destination for a wafer carrier containing wafers in response to a transfer request.

摘要翻译： 描述了在晶片制造设备中实现集成运输控制的系统和方法。 一个实施例是用于晶片制造设备（“fab”）的工厂自动化系统，其包括多个托架，其中每个托架包括通过内部塔顶运输（“OHT”）系统互连的多个设备，以及第一和第二 间隔OHT系统，用于互连内部OHT系统。 工厂自动化系统包括一个制造执行系统（“MES”），用于提供关于晶圆正在处理的晶圆的批量信息，用于提供关于在晶圆厂中晶片运输的交通信息的材料控制系统（“MCS”），以及集成 用于使用来自MES的批量信息的运输控制（“ITC”）系统和来自MCS的交通信息，用于选择目的地，以及响应于转移请求的用于包含晶片的晶片载体的所选择的目的地的路线。

公开(公告)号：US07925380B2

公开(公告)日：2011-04-12

申请号：US11458554

申请日：2006-07-19

申请人： Chih-Yuan Yu ,  Ren-Chyi You ,  Ming Wang

发明人： Chih-Yuan Yu ,  Ren-Chyi You ,  Ming Wang

IPC分类号： G06F7/00

CPC分类号： G05B19/4189 ,  G05B2219/31271 ,  G05B2219/31272 ,  G05B2219/31372 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/28

摘要： System and method for implementing integrated transportation control in a wafer fabrication facility are described. One embodiment is a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and first and second interbay OHT systems each for interconnecting the intrabay OHT systems. The factory automation system comprises a manufacturing execution system (“MES”) for providing lot information regarding wafers being processed in the fab, a material control system (“MCS”) for providing traffic information regarding transportation of wafers in the fab, and an integrated transportation control (“ITC”) system for using the lot information from the MES and the traffic information from the MCS for selecting a destination and a route to the selected destination for a wafer carrier containing wafers in response to a transfer request.

摘要翻译： 描述了在晶片制造设备中实现集成运输控制的系统和方法。 一个实施例是用于晶片制造设备（“fab”）的工厂自动化系统，其包括多个托架，其中每个托架包括通过内部塔顶运输（“OHT”）系统互连的多个设备，以及第一和第二 间隔OHT系统，用于互连内部OHT系统。 工厂自动化系统包括一个制造执行系统（“MES”），用于提供关于晶圆正在处理的晶圆的批量信息，用于提供关于在晶圆厂中晶片运输的交通信息的材料控制系统（“MCS”），以及集成 用于使用来自MES的批量信息的运输控制（“ITC”）系统和来自MCS的交通信息，用于选择目的地，以及响应于转移请求的用于包含晶片的晶片载体的所选择的目的地的路线。

公开(公告)号：US20030204280A1

公开(公告)日：2003-10-30

申请号：US10359086

申请日：2003-02-06

发明人： Yoshiaki Kobayashi

IPC分类号： G06F019/00

CPC分类号： H01L21/67276 ,  G05B19/41895 ,  G05B2219/31271 ,  G06Q10/0631 ,  Y02P90/285 ,  Y02P90/60 ,  Y02P90/86

摘要： Shortening TAT for processing express lots without reducing the utilization rate of manufacturing apparatuses for semiconductor device. When the number of vacant ports LPOT of a manufacturing apparatus EQ3 used in a next step is only one at the of time of completing a process for a normal lot LA by a manufacturing apparatus EQ1 and when there is a possibility that processes for an express lot LB performed by a manufacturing apparatus EQ2 will be completed before a remaining processing time period for a lot LC performed by the manufacturing apparatus EQ3 reaches a predetermined set value, the lot LA is transferred to a lot stocker LS for securing a vacant port LPOT and as soon as the processes for the express lot LB performed by the manufacturing apparatus EQ2 are completed, the express lot LB is transferred to the vacant port LPOT in the manufacturing apparatus EQ3.

摘要翻译： 缩短用于处理快递的TAT，而不降低半导体装置的制造装置的利用率。 当在下一步骤中使用的制造装置EQ3的空闲端口LPOT的数量仅在通过制造装置EQ1完成正常批次LA的处理之时只有一个，并且当存在用于快速批处理的可能性 在制造装置EQ3执行的批量LC的剩余处理时间段达到预定设定值之前，由制造装置EQ2执行的LB将被完成，批号LA被传送到用于固定空端口LPOT的批量储存器LS，并且作为 随着制造装置EQ2执行的快件LB的处理完成，快递批次LB被传送到制造装置EQ3中的空的端口LPOT。

公开(公告)号：US3952388A

公开(公告)日：1976-04-27

申请号：US490364

申请日：1974-07-22

申请人： Kazuhiko Hasegawa ,  Yoshio Shima ,  Shigeo Noda

发明人： Kazuhiko Hasegawa ,  Yoshio Shima ,  Shigeo Noda

IPC分类号： B23Q41/00 ,  B23Q7/14 ,  B23Q41/06 ,  G05B19/418 ,  B23Q7/00

CPC分类号： G05B19/4189 ,  B23Q41/06 ,  G05B2219/31271 ,  G05B2219/36523 ,  G05B2219/50364 ,  Y02P90/04 ,  Y02P90/28 ,  Y10T29/5124 ,  Y10T29/5196

摘要： Machine tool apparatus for handling routine pallets and priority pallets with loading and unloading stations comprising a plurality of machine tools for performing machining operations on a workpiece mounted on a pallet; main conveyer means for carrying a pallet in one direction, buffer conveyer means for storing a pallet to be loaded onto a machine tool; return conveyer means for returning a pallet to an unloading station; pallet transfer means for moving a pallet among the conveyer means, stations and machine tools; and central control means for controlling the machine tools and the conveyer means; the pallet transfer means being responsive to the central control means for carrying a priority pallet from the main conveyer means to one of the machine tools and being responsive to the central control means for moving a routine pallet from main conveyer means to the buffer conveyer means and from the buffer conveyer means to one of the machine tools only when the machine tool on which the routine pallet is to be loaded is not reserved by a priority pallet and is not being occupied by another pallet.

摘要翻译： 用于处理具有加载和卸载站的常规托盘和优先托盘的机床设备，包括用于对安装在托盘上的工件进行加工操作的多个机床; 用于在一个方向上运送托盘的主输送装置，用于储存待加载到机床上的托盘的缓冲输送装置; 用于将托盘返回到卸载站的返回输送装置; 托盘传送装置，用于在输送装置，工位和机床之间移动托盘; 以及用于控制机床和输送装置的中央控制装置; 所述托盘传送装置响应于所述中央控制装置，用于将优先托盘从所述主输送装置运送到所述机床之一并且响应于所述中央控制装置用于将常规托盘从主输送装置移动到缓冲输送装置， 只有当要装载常规托盘的机床不由优先托盘预留并且不被其他托盘占用时，才从缓冲输送装置到其中一台机床。

公开(公告)号：US3909922A

公开(公告)日：1975-10-07

申请号：US38162573

申请日：1973-07-23

申请人： TOYODA MACHINE WORKS LTD

发明人： TAKASAKI AKIRA ,  SHIMA YOSHIO ,  HAYASHI TAKEHIKO

IPC分类号： B23Q41/00 ,  B23Q41/06 ,  G05B19/418 ,  B23Q41/02

CPC分类号： B23Q41/06 ,  G05B19/4183 ,  G05B2219/31268 ,  G05B2219/31271 ,  G05B2219/31273 ,  G05B2219/32046 ,  G05B2219/49302 ,  Y02P90/10 ,  Y02P90/20 ,  Y02P90/28 ,  Y10T29/5124 ,  Y10T408/08 ,  Y10T483/165

摘要： A control system for plural numerically controlled machine tools comprising a main conveyor and a buffer conveyor for transferring a plurality of work pallets accorded with coded numbers. The buffer conveyor has a plurality of buffer areas. A plurality of machining modules classified by machining processes are arranged in association with buffer areas of the buffer conveyor. A plurality of rails arranged above the machining modules extend transversely of the main and buffer conveyors with a pallet transfer device suspended by each rail for selectively transferring the work pallets into its associated buffer area and main conveyor and for selectively transferring the work pallets from the associated buffer area into the associated machining module in response to the coded numbers on the work pallets. At least one of the machining modules includes not less than two numerically controlled machine tools performing the same function arranged along the rail. A central control device is provided for transmitting information to each numerically controlled machine tool in accordance with the coded number of the work pallet transferred in the machine tool.

摘要翻译： 一种用于多个数控机床的控制系统，包括主输送机和缓冲输送机，用于传送符合编号的多个工作托盘。 缓冲输送机具有多个缓冲区域。 通过加工处理分类的多个加工模块与缓冲输送机的缓冲区域相关联地布置。 布置在加工模块上方的多个轨道横向于主要和缓冲输送机延伸，托盘传送装置由每个导轨悬挂，用于选择性地将工作托盘传送到其相关联的缓冲区域和主输送机中，并且用于从工作托盘 缓冲区域响应于工作托盘上的编号，进入相关加工模块。 至少一个加工模块包括执行沿轨道布置的相同功能的不少于两个数控机床。 提供了一种中央控制装置，用于根据在机床中传送的工作托盘的编号将数据传送到每个数控机床。