公开(公告)号：US07603195B2

公开(公告)日：2009-10-13

申请号：US11555271

申请日：2006-10-31

申请人： Amitabh Puri ,  David Duffin ,  Eric A. Englhardt

发明人： Amitabh Puri ,  David Duffin ,  Eric A. Englhardt

IPC分类号： G06F19/00

CPC分类号： G05B19/41845 ,  G05B2219/31001 ,  G05B2219/31276 ,  G05B2219/31372 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/16 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/28

摘要： In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large lot carriers. A manufacturing execution system (MES) may interact with the inventive small lot Fab as if the small lot Fab is any other Fab component in an existing large lot Fab without requiring knowledge of how to control small lot Fab components (e.g., beyond specifying a processing recipe). A small lot Fab according to the present invention may encapsulate the small lot Fab's internal use of small lot components and present itself to a large lot Fab's MES as if the small lot Fab is a component that uses large lot carriers.

摘要翻译： 在至少一个方面，本发明提供一种电子设备制造设施（Fab），其使用可以透明地集成到使用大批量载体的现有Fab中的小批量载体。 制造执行系统（MES）可以与本发明的小批量Fab相互作用，好像小批量Fab是现有大批量Fab中的任何其他Fab组件，而不需要知道如何控制小批量Fab组件（例如，超出指定处理 食谱）。 根据本发明的小批量Fab可以封装小批量Fab的小批量部件的内部使用，并且将其自身呈现给大量的Fab的MES，就好像小批量Fab是使用大批量载体的组件一样。

公开(公告)号：US07487002B2

公开(公告)日：2009-02-03

申请号：US11623619

申请日：2007-01-16

申请人： Kilian Schmidt

发明人： Kilian Schmidt

IPC分类号： G06F19/00

CPC分类号： G07C3/08 ,  G05B19/41865 ,  G05B2219/31276 ,  G05B2219/31277 ,  G05B2219/32077 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/28

摘要： By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated material handling system, the influence of the transport system on the tool performance may be effectively determined. For this purpose, an average delay caused by the automated material handling system may be iteratively calculated on the basis of a respective required carrier exchange time, which depends on tool- and process-specific characteristics. From the corresponding average delay, an appropriate metric, such as a utilization loss factor, may be determined.

摘要翻译： 通过在制造环境中确定用于工具利用率的度量，其基于工具特定特征和自动化材料处理系统的运输能力的概率分布，可以有效地确定运输系统对工具性能的影响。 为此，可以基于相应所需的载波交换时间来迭代地计算由自动化材料处理系统引起的平均延迟，这取决于工具和处理特定的特性。 从相应的平均延迟可以确定适当的度量，例如利用损失因子。

公开(公告)号：US20160132045A1

公开(公告)日：2016-05-12

申请号：US14988735

申请日：2016-01-05

申请人： Frederick A. Flitsch

发明人： Frederick A. Flitsch

IPC分类号： G05B19/418

CPC分类号： G05B19/4189 ,  G05B2219/31276 ,  G05B2219/45031 ,  H01L21/67017 ,  H01L21/67178 ,  H01L21/67733 ,  H01L21/67736

摘要： The present invention provides various aspects for supporting multilevel fabricators. In some examples, the multilevel fabricators may include a cleanspace region for moving work material. In some examples, panels of filters may be positioned to support the cleanspace. In some embodiments existing processing equipment and automation are placed into the new environment. In other embodiments the processing equipment is placed and new automation equipment is used. Automated tool placement equipment may be used to place the equipment. In some examples, automated tool handling equipment may be used to remove and replace processing equipment into the multilevel fabricator.

摘要翻译： 本发明提供了支持多层制造者的各个方面。 在一些示例中，多层制造者可以包括用于移动工作材料的清洁空间区域。 在一些示例中，过滤器面板可以被定位成支持清洁空间。 在一些实施例中，现有的处理设备和自动化被放置在新的环境中。 在其他实施例中，放置处理设备并使用新的自动化设备。 可以使用自动化的工具放置设备来放置设备。 在一些示例中，可以使用自动化工具处理设备来将处理设备移除并替换为多层制造者。

公开(公告)号：US07356378B1

公开(公告)日：2008-04-08

申请号：US11695988

申请日：2007-04-03

申请人： Chih-Wei Huang ,  Hui-Yi Chen ,  Ren-Chyi Yu ,  Chuh-Yuan Yu

发明人： Chih-Wei Huang ,  Hui-Yi Chen ,  Ren-Chyi Yu ,  Chuh-Yuan Yu

IPC分类号： G06F7/00

CPC分类号： G05B19/41895 ,  G05B2219/31002 ,  G05B2219/31276 ,  G05B2219/45031 ,  G06Q10/047 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/285 ,  Y02P90/60

摘要： In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a material control system (“MCS”) for providing dynamic traffic information; an automated material handling system (“AMHS”) for providing static route information; and a real-time dispatching (“RTD”) system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility (“fab”) using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.

摘要翻译： 在一个方面，提供了用于晶圆厂的工厂自动化系统。 工厂自动化系统包括：用于提供批量信息的制造执行系统（“MES”）; 用于提供动态交通信息的物料控制系统（“MCS”）; 用于提供静态路线信息的自动化材料处理系统（“AMHS”）; 以及实时调度（“RTD”）系统，以响应于转移请求来选择晶片载体的目的地和路线。 在另一方面，提供了使用工厂自动化系统在晶片制造设备（“fab”）内转移晶片块的方法。 该方法包括：接收转移请求以将晶片批次从第一位置移动到晶圆厂内的第二位置; 获取批量信息，动态交通信息和静态交通信息; 使用所述信息来选择所述第一位置和所述第二位置之间的路线; 并使用所选择的路线执行传送。

公开(公告)号：US20070061034A1

公开(公告)日：2007-03-15

申请号：US11555271

申请日：2006-10-31

申请人： Amitabh Puri ,  David Duffin ,  Eric Englhardt

发明人： Amitabh Puri ,  David Duffin ,  Eric Englhardt

IPC分类号： G06F19/00

CPC分类号： G05B19/41845 ,  G05B2219/31001 ,  G05B2219/31276 ,  G05B2219/31372 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/16 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/28

摘要： In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large lot carriers. A manufacturing execution system (MES) may interact with the inventive small lot Fab as if the small lot Fab is any other Fab component in an existing large lot Fab without requiring knowledge of how to control small lot Fab components (e.g., beyond specifying a processing recipe). A small lot Fab according to the present invention may encapsulate the small lot Fab's internal use of small lot components and present itself to a large lot Fab's MES as if the small lot Fab is a component that uses large lot carriers.

摘要翻译： 在至少一个方面，本发明提供一种电子设备制造设施（Fab），其使用可以透明地集成到使用大批量载体的现有Fab中的小批量载体。 制造执行系统（MES）可以与本发明的小批量Fab相互作用，好像小批量Fab是现有大批量Fab中的任何其他Fab组件，而不需要知道如何控制小批量Fab组件（例如，超出指定处理 食谱）。 根据本发明的小批量Fab可以封装小批量Fab的小批量部件的内部使用，并且将其自身呈现给大量的Fab的MES，就好像小批量Fab是使用大批量载体的组件一样。

公开(公告)号：US20050125089A1

公开(公告)日：2005-06-09

申请号：US10981131

申请日：2004-11-04

申请人： Amitabh Puri ,  David Duffin ,  Eric Englhardt

发明人： Amitabh Puri ,  David Duffin ,  Eric Englhardt

IPC分类号： H01L21/68 ,  B65G49/07 ,  G05B19/418 ,  H01L21/00 ,  G06F19/00

CPC分类号： G05B19/41845 ,  G05B2219/31001 ,  G05B2219/31276 ,  G05B2219/31372 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/16 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/28

摘要： In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large lot carriers. A manufacturing execution system (MES) may interact with the inventive small lot Fab as if the small lot Fab is any other Fab component in an existing large lot Fab without requiring knowledge of how to control small lot Fab components (e.g., beyond specifying a processing recipe). A small lot Fab according to the present invention may encapsulate the small lot Fab's internal use of small lot components and present itself to a large lot Fab's MES as if the small lot Fab is a component that uses large lot carriers.

摘要翻译： 在至少一个方面，本发明提供一种电子设备制造设施（Fab），其使用可以透明地集成到使用大批量载体的现有Fab中的小批量载体。 制造执行系统（MES）可以与本发明的小批量Fab相互作用，好像小批量Fab是现有大批量Fab中的任何其他Fab组件，而不需要知道如何控制小批量Fab组件（例如，超出指定处理 食谱）。 根据本发明的小批量Fab可以封装小批量Fab的小批量部件的内部使用，并且将其自身呈现给大量的Fab的MES，就好像小批量Fab是使用大批量载体的组件一样。

公开(公告)号：US20240085893A1

公开(公告)日：2024-03-14

申请号：US18211659

申请日：2023-06-20

申请人： Schneider Electric Industries SAS

发明人： Steffen Hofmann ,  Jürgen Heid

IPC分类号： G05B19/418 ,  B65G54/02 ,  H02K41/03

CPC分类号： G05B19/4189 ,  B65G54/02 ,  H02K41/031 ,  G05B2219/31276

摘要： A method serves to operate a transport system, in particular a multi-carrier system, that comprises a plurality of linear motors that are arranged in a row and have a guide track, a plurality of transport elements that can be moved along the guide track by means of the linear motors, and a plurality of stations along the guide track, wherein each of the transport elements is associated with one of the stations. The method has the following steps:



generating an instance for each of the transport elements,
generating a list for each of the stations, wherein the instance for each of the transport elements associated with the respective station is associated with the list, and wherein, within the respective list, the instance of each transport element is linked to the instance of the transport element directly ahead of the observed transport element and to the instance of the transport element directly behind the observed transport element,
transferring a transport element from a first station to a directly following second station and inserting the instance of this transport element into the list of the second station if a transport job that goes beyond the first station is present for the transport element,
wherein the transfer of the instance takes place in an event-controlled manner and independently of a transfer point if a predetermined transfer condition is fulfilled, and
controlling the linear motors to execute travel jobs of the transport elements.

公开(公告)号：US20180056479A1

公开(公告)日：2018-03-01

申请号：US15686667

申请日：2017-08-25

申请人： Applied Materials, Inc.

发明人： Yongqi Hu ,  Thomas Lawrence Terry

IPC分类号： B24B37/34 ,  H01L21/677 ,  H01L21/687 ,  H01L21/67 ,  G05B19/19

CPC分类号： B24B37/345 ,  B24B41/005 ,  G05B19/19 ,  G05B2219/31276 ,  H01L21/30625 ,  H01L21/67075 ,  H01L21/67092 ,  H01L21/67219 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/68707

摘要： A semiconductor fabrication system includes a chemical mechanical polishing system, a cassette holding area enclosed by a wall and having a door openable by an operator to place one or more cassettes into the cassette holding area, a robot configured to transfer substrates between a cassette in the cassette holding area to the chemical mechanical polishing system, a computer controller configured to cause the robot to move to a home position, a circuit breaker in a power supply line to the robot, a door sensor to detect whether the door is open, a robot presence sensor to detect whether the robot is in the home position, and control circuitry configured to receive signals from the door sensor and the robot presence sensor and cause the circuit breaker to cut power to the robot if the door is open and the robot is not in the home position.

公开(公告)号：US20070282475A1

公开(公告)日：2007-12-06

申请号：US11623619

申请日：2007-01-16

申请人： Kilian Schmidt

发明人： Kilian Schmidt

IPC分类号： G06F19/00

CPC分类号： G07C3/08 ,  G05B19/41865 ,  G05B2219/31276 ,  G05B2219/31277 ,  G05B2219/32077 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/28

摘要： By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated material handling system, the influence of the transport system on the tool performance may be effectively determined. For this purpose, an average delay caused by the automated material handling system may be iteratively calculated on the basis of a respective required carrier exchange time, which depends on tool- and process-specific characteristics. From the corresponding average delay, an appropriate metric, such as a utilization loss factor, may be determined.

摘要翻译： 通过在制造环境中确定用于工具利用率的度量，其基于工具特定特征和自动化材料处理系统的运输能力的概率分布，可以有效地确定运输系统对工具性能的影响。 为此，可以基于相应所需的载波交换时间来迭代地计算由自动化材料处理系统引起的平均延迟，这取决于工具和处理特定的特性。 从相应的平均延迟可以确定适当的度量，例如利用损失因子。

公开(公告)号：US20070276531A1

公开(公告)日：2007-11-29

申请号：US11838322

申请日：2007-08-14

申请人： Michael Teferra ,  Amitabh Puri

发明人： Michael Teferra ,  Amitabh Puri

IPC分类号： G06F19/00

CPC分类号： G05B19/4189 ,  G05B2219/31013 ,  G05B2219/31276 ,  G05B2219/31429 ,  Y02P90/28 ,  Y02P90/285

摘要： A carrier handler is provided that may be adapted to (1) accept transfer commands for carriers before the carriers arrive within the domain of the carrier handler; (2) accept termination commands that result in prior commands being cancelled or aborted independent of the state of the prior commands; (3) select queued commands for out-of-order execution to take advantage of earliest arriving transport system carrier supports suitable for use with the selected commands and/or based upon the anticipated time needed to execute the commands; (4) remove empty carriers from an associated tool to improve port availability; (5) continue to operate even after transfers involving storage locations fail by removing the failed locations from a usable locations list; (6) verify the integrity of carrier and transfer destination status data with sensors prior to attempting a transfer; and (7) calibrate carrier handoffs with a transport system using a calibration carrier equipped with sensors.

摘要翻译： 提供一种载波处理器，其可以适于（1）在载波到达载波处理器的域内之前接受载波的传输命令; （2）接受终止命令，导致先前的命令被取消或中止，而与先前命令的状态无关; （3）选择用于无序执行的排队命令，以利用适合于使用所选择的命令的最早到达的传输系统载波支持和/或基于执行命令所需的预期时间; （4）从相关联的工具中删除空载体以提高端口可用性; （5）即使在涉及存储位置的转移失败后，仍然可以从可用位置列表中删除失败的位置; （6）在尝试传输之前，使用传感器验证载体的完整性和传输目的地状态数据; 和（7）使用配有传感器的校准载体，用传输系统校准载波切换。