公开(公告)号：US20060191870A1

公开(公告)日：2006-08-31

申请号：US11382454

申请日：2006-05-09

Applicant: Jim Hofmann

Inventor： Jim Hofmann

IPC: C03C15/00 ,  C23F1/00 ,  H01L21/302

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Abstract translation: 一种算法使用离线计量来通过将信息从外部控制环路传递到内部控制回路来控制过程，扩展卡尔曼滤波器估计器。 内部控制回路在线运行，外部控制回路相对于内部控制回路异步运行。 在每个后续过程中更新在线控制循环。 可选地为每个后续过程更新离线计量。

公开(公告)号：US20060246820A1

公开(公告)日：2006-11-02

申请号：US11456512

申请日：2006-07-10

Applicant: Jim Hofmann

Inventor： Jim Hofmann

IPC: B24B51/00

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

公开(公告)号：US20040043700A1

公开(公告)日：2004-03-04

申请号：US10232854

申请日：2002-08-28

Inventor： Jim Hofmann

IPC: B24B049/00 ,  B24B051/00

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Abstract translation: 一种算法使用离线计量来通过将信息从外部控制环路传递到内部控制回路来控制过程，扩展卡尔曼滤波器估计器。 内部控制回路在线运行，外部控制回路相对于内部控制回路异步运行。 在每个后续过程中更新在线控制循环。 可选地为每个后续过程更新离线计量。

公开(公告)号：US07329168B2

公开(公告)日：2008-02-12

申请号：US11216675

申请日：2005-08-31

Applicant: Jim Hofmann

Inventor： Jim Hofmann

IPC: B24B51/00

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Abstract translation: 一种算法使用离线计量来通过将信息从外部控制环路传递到内部控制回路来控制过程，扩展卡尔曼滤波器估计器。 内部控制回路在线运行，外部控制回路相对于内部控制回路异步运行。 在每个后续过程中更新在线控制循环。 可选地为每个后续过程更新离线计量。

公开(公告)号：US06317658B1

公开(公告)日：2001-11-13

申请号：US09266514

申请日：1999-03-11

Applicant: John L. Vian

Inventor： John L. Vian

IPC: G05D100

CPC classification number: G05B13/027 ,  G05B2219/33027 ,  G05B2219/33037 ,  G05B2219/33043 ,  G05D1/0825

Abstract: A method, system and computer-readable medium for controlling a control subsystem of a vehicle. The control subsystem includes at least one propulsion, aerodynamic, or other control effector. The system also includes sensors for sensing vehicle position and motions and operating conditions, a control input device for generating control signals, and a generator for generating desired vehicle forces/moments from the sensed vehicle position and motions and operating conditions, and the generated control input signals based on predefined vehicle compensation and control laws. Also included is a neural network controller for generating control subsystem commands for the at least one propulsion, aerodynamic, or other control effector based on the generated desired forces/moments, wherein said neural network controller was trained based on pregenerated vehicle control distribution data. The neural network controller is also trained to compensate for one or more failed control effectors.

Abstract translation: 一种用于控制车辆的控制子系统的方法，系统和计算机可读介质。 控制子系统包括至少一个推进，空气动力学或其他控制效应器。 该系统还包括用于感测车辆位置和运动和操作条件的传感器，用于产生控制信号的控制输入装置和用于从感测到的车辆位置和运动和操作条件产生期望车辆力/力矩的发电机，以及产生的控制输入 基于预定义的车辆补偿和控制规律的信号。 还包括一种神经网络控制器，用于基于所产生的所需力/力量来产生用于至少一个推进，空气动力学或其他控制效应器的控制子系统命令，其中所述神经网络控制器基于预生成的车辆控制分布数据进行训练。 还训练神经网络控制器来补偿一个或多个故障控制效应器。

公开(公告)号：US07087527B2

公开(公告)日：2006-08-08

申请号：US10232854

申请日：2002-08-28

Applicant: Jim Hofmann

Inventor： Jim Hofmann

IPC: H01L21/302

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Abstract translation: 一种算法使用离线计量来通过将信息从外部控制环路传递到内部控制回路来控制过程，扩展卡尔曼滤波器估计器。 内部控制回路在线运行，外部控制回路相对于内部控制回路异步运行。 在每个后续过程中更新在线控制循环。 可选地为每个后续过程更新离线计量。

公开(公告)号：US20050284569A1

公开(公告)日：2005-12-29

申请号：US11216675

申请日：2005-08-31

Applicant: Jim Hofmann

Inventor： Jim Hofmann

IPC: G05B13/04 ,  C23F1/00

CPC classification number: B24B37/013 ,  B24B37/042 ,  B24B49/00 ,  G05B13/04 ,  G05B2219/33043 ,  G05B2219/45232 ,  G05B2219/49085

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Abstract translation: 一种算法使用离线计量来通过将信息从外部控制环路传递到内部控制回路来控制过程，扩展卡尔曼滤波器估计器。 内部控制回路在线运行，外部控制回路相对于内部控制回路异步运行。 在每个后续过程中更新在线控制循环。 可选地为每个后续过程更新离线计量。

公开(公告)号：US06173218B2

公开(公告)日：2001-01-09

申请号：US08950966

申请日：1997-10-15

Applicant: John L. Vian

Inventor： John L. Vian

IPC: G05D100

CPC classification number: G05B13/027 ,  G05B2219/33027 ,  G05B2219/33037 ,  G05B2219/33043 ,  G05D1/0825

Abstract: A method and system for controlling a propulsion system of a vehicle. The propulsion system includes at least one propulsion effector. The system also includes sensors for sensing vehicle position and motions, a control device for generating control signals, and a generator for generating desired vehicle forces/moments from the sensed vehicle position and motions and the generated control signals based on predefined vehicle compensation and control laws. Also included is a neural network controller for generating propulsion commands for the at least one propulsion effector based on the generated desire forces/moments, wherein said neural network controller was trained based on pregenerated vehicle control distribution data.

Abstract translation: 一种用于控制车辆的推进系统的方法和系统。 推进系统包括至少一个推进效应器。 该系统还包括用于感测车辆位置和运动的传感器，用于产生控制信号的控制装置和用于根据预定义的车辆补偿和控制定律从所感测的车辆位置和运动产生所需车辆力矩和所生成的控制信号的发电机 。 还包括一种神经网络控制器，用于基于所产生的欲望力/力矩来产生用于至少一个推进效应器的推进命令，其中所述神经网络控制器基于预生成的车辆控制分布数据进行训练。