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公开(公告)号：US08224607B2
公开(公告)日：2012-07-17
申请号：US12198076
申请日：2008-08-25
申请人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
发明人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
IPC分类号： G01C17/38
CPC分类号： H01L21/681 , B25J9/1692 , G01B11/03 , G01B21/042 , G05B2219/37278 , G05B2219/37608 , G05B2219/39047 , G05B2219/39056 , H01L21/67742 , H01L21/67748
摘要： Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
摘要翻译： 这里描述了一种用于对机器人部件执行校准的方法和装置。 在一个实施例中，用于执行机器人校准的方法包括使校准装置跨越目标（例如，晶片卡盘）移动。 接下来，该方法包括使用位于校准装置上的传感器来测量来自传感器的光点和目标周边之间的距离。 接下来，该方法包括确定校准装置相对于目标的中心的位移。 然后，该方法包括确定校准装置相对于目标坐标系的旋转角度。 接下来，该方法包括基于校准装置相对于目标的位移和旋转角度来校准机器人的机器人位置。
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公开(公告)号：US20120271590A1
公开(公告)日：2012-10-25
申请号：US13523751
申请日：2012-06-14
申请人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
发明人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
IPC分类号： G06F15/00
CPC分类号： H01L21/681 , B25J9/1692 , G01B11/03 , G01B21/042 , G05B2219/37278 , G05B2219/37608 , G05B2219/39047 , G05B2219/39056 , H01L21/67742 , H01L21/67748
摘要： Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
摘要翻译： 这里描述了一种用于对机器人部件执行校准的方法和装置。 在一个实施例中，用于执行机器人校准的方法包括使校准装置跨越目标（例如，晶片卡盘）移动。 接下来，该方法包括使用位于校准装置上的传感器来测量来自传感器的光点和目标周边之间的距离。 接下来，该方法包括确定校准装置相对于目标的中心的位移。 然后，该方法包括确定校准装置相对于目标系的坐标系的旋转角度。 接下来，该方法包括基于校准装置相对于目标的位移和旋转角度来校准机器人的机器人位置。
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公开(公告)号：US08688398B2
公开(公告)日：2014-04-01
申请号：US13523751
申请日：2012-06-14
申请人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
发明人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
IPC分类号： G01C17/38
CPC分类号： H01L21/681 , B25J9/1692 , G01B11/03 , G01B21/042 , G05B2219/37278 , G05B2219/37608 , G05B2219/39047 , G05B2219/39056 , H01L21/67742 , H01L21/67748
摘要： Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
摘要翻译： 这里描述了一种用于对机器人部件执行校准的方法和装置。 在一个实施例中，用于执行机器人校准的方法包括使校准装置跨越目标（例如，晶片卡盘）移动。 接下来，该方法包括使用位于校准装置上的传感器来测量来自传感器的光点和目标周边之间的距离。 接下来，该方法包括确定校准装置相对于目标的中心的位移。 然后，该方法包括确定校准装置相对于目标系的坐标系的旋转角度。 接下来，该方法包括基于校准装置相对于目标的位移和旋转角度来校准机器人的机器人位置。
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公开(公告)号：US20090062959A1
公开(公告)日：2009-03-05
申请号：US12198076
申请日：2008-08-25
申请人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens
发明人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens
CPC分类号： H01L21/681 , B25J9/1692 , G01B11/03 , G01B21/042 , G05B2219/37278 , G05B2219/37608 , G05B2219/39047 , G05B2219/39056 , H01L21/67742 , H01L21/67748
摘要： Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
摘要翻译： 这里描述了一种用于对机器人部件执行校准的方法和装置。 在一个实施例中，用于执行机器人校准的方法包括使校准装置跨越目标（例如，晶片卡盘）移动。 接下来，该方法包括使用位于校准装置上的传感器来测量来自传感器的光点和目标周边之间的距离。 接下来，该方法包括确定校准装置相对于目标的中心的位移。 然后，该方法包括确定校准装置相对于目标系的坐标系的旋转角度。 接下来，该方法包括基于校准装置相对于目标的位移和旋转角度来校准机器人的机器人位置。
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公开(公告)号：US5454775A
公开(公告)日：1995-10-03
申请号：US305169
申请日：1994-09-13
IPC分类号： G05B19/418 , B23Q3/155
CPC分类号： G05B19/4189 , G05B2219/37278 , G05B2219/40059 , G05B2219/49113 , G05B2219/50384 , Y02P90/265 , Y02P90/28 , Y10T483/17 , Y10T483/19
摘要： An automated exchangeable parts feeding system which permits rapid exchange of parts presentation devices so that different size and shape parts can be handled on the parts feeding system. The automated exchangeable parts feeding system includes a parts presentation device having a tool exchange unit attached thereto, and a base exchange unit. The exchange units are mutually adapted to be coupled and decoupled to and from one another. At least one of the exchange units is controllably operable for coupling and decoupling. A robot arm or a pick and place device grasps and places the presentation device on the base exchange unit. The robot arm or pick and place device also functions to grasp and remove the presentation device from the base exchange unit. A control source coordinates the operation of at least one of the exchange units and the robot or pick and place device. The automated exchangeable parts feeding system further includes an optical detector, e.g., a fiberoptic sensor, for detecting the presence or absence of a part at a predefined location or the presentation device. The optical detector comprises at least one optical pathway section positioned and configured on each exchange unit so as to be optically aligned when the exchange units are coupled.
摘要翻译： 一种可自动更换的零件供给系统，其允许快速更换零件呈现装置，使得可以在零件供给系统上处理不同尺寸和形状的零件。 自动可更换部件供给系统包括具有附接到其上的工具更换单元的零件呈现装置和基座更换单元。 交换单元相互适应以便彼此耦合和解耦。 交换单元中的至少一个可控制地用于耦合和去耦。 机器人手臂或拾取和放置装置将展示装置夹持并放置在基座更换装置上。 机器人手臂或拾取和放置装置还用于从基座交换单元抓取和移除演示装置。 控制源协调至少一个交换单元和机器人或拾取和放置设备的操作。 自动可更换部件供给系统还包括光学检测器，例如光纤传感器，用于检测预定位置处的部件的存在或不存在或显示装置。 光学检测器包括至少一个光学路径部分，其定位和配置在每个交换单元上，以便当交换单元耦合时被光学对准。
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