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公开(公告)号:US5714006A
公开(公告)日:1998-02-03
申请号:US572883
申请日:1995-12-18
申请人: Hirotaka Kizuki , Yasutomo Kajikawa
发明人: Hirotaka Kizuki , Yasutomo Kajikawa
IPC分类号: C30B29/38 , C30B29/48 , H01L21/20 , H01L21/203 , H01L21/205 , H01L33/12 , H01L33/16 , H01L33/32 , H01S5/00 , H01S5/323 , C30B25/09
CPC分类号: H01L33/007 , H01L21/02411 , H01L21/02433 , H01L21/0254 , H01L21/0262 , Y10S117/901
摘要: A method of growing a compound semiconductor layer includes epitaxially growing a III-V compound semiconductor layer including nitrogen (N) for as the Group V element on a front surface of a semiconductor substrate of cadmium telluride (CdTe). Therefore, the atoms of the crystal lattice of the III-V compound semiconductor layer are periodically lattice-matched with the atoms of the crystal lattice of the CdTe semiconductor substrate, whereby the III-V compound semiconductor layer is epitaxially grown with high crystalline quality.
摘要翻译: 生长化合物半导体层的方法包括在碲化镉(CdTe)的半导体衬底的前表面上外延生长包含作为V族元素的氮(N)的III-V族化合物半导体层。 因此,III-V族化合物半导体层的晶格的原子与CdTe半导体衬底的晶格的原子周期性地晶格匹配,由此III-V族化合物半导体层以高结晶质量外延生长。