Method and apparatus for detecting topographical features of microelectronic substrates
    1.
    发明授权
    Method and apparatus for detecting topographical features of microelectronic substrates 失效
    用于检测微电子衬底的形貌特征的方法和装置

    公开(公告)号:US07213447B2

    公开(公告)日:2007-05-08

    申请号:US11157338

    申请日:2005-06-20

    IPC分类号: G01B5/34 G06K9/00

    CPC分类号: G01B11/303 Y10T29/49004

    摘要: An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, the apparatus can include a support member configured to carry the microelectronic substrate with a first portion of the first surface exposed and a second portion of the second surface exposed. The apparatus can further include a topographical feature detector positioned proximate to support member and aligned with the first portion of the first surface of the microelectronic substrate to detect characteristics, such as a roughness, of the first surface while the microelectronic substrate is carried by the support member.

    摘要翻译: 一种用于检测微电子衬底特性的装置和方法。 微电子衬底可以具有第一表面,其具有第一形貌特征,诸如粗糙元件,以及与第一表面相对的第二表面,并且具有第二形貌特征,例如突出的导电结构。 在一个实施例中,该装置可以包括被配置为承载微电子基板的支撑构件,其中第一表面的第一部分被暴露并且第二表面的第二部分被暴露。 该装置还可以包括位于支撑构件附近并与微电子衬底的第一表面的第一部分对准的形貌特征检测器,以检测第一表面的特性,例如粗糙度,而微电子衬底由支撑体承载 会员。

    Shape input device
    2.
    发明授权
    Shape input device 失效
    形状输入装置

    公开(公告)号:US5963331A

    公开(公告)日:1999-10-05

    申请号:US990964

    申请日:1997-12-15

    摘要: A device for inputting a shape of an object includes a base mounted on the object, a flex detecting unit for detecting an amount of flex of the object, and a stretch detecting unit, coupled to the base and to the flex detecting unit, for detecting an amount of stretch between the base and the flex detecting unit which corresponds to an amount of stretch of the object. The stretch detecting unit includes a stretch mechanism which is expanded or contracted in accordance with the stretch of the object, and the amount of stretch of the object is detected based on a detected amount of stretch of the stretch mechanism. The flex detecting unit includes a member which is deformable in an amount corresponding to the amount of flex of the object, and the amount of flex of the object is detected based on a detected amount of deformation of the deformable member.

    摘要翻译: 用于输入物体的形状的装置包括安装在物体上的基座,用于检测物体的弯曲量的挠曲检测单元和连接到基座和柔性检测单元的伸展检测单元,用于检测物体 在基部和挠曲检测单元之间的伸展量对应于物体的伸展量。 拉伸检测单元包括拉伸机构,该拉伸机构根据被检体的伸展进行伸缩,根据检测到的拉伸机构的拉伸量来检测被检体的伸展量。 柔性检测单元包括能够对应于物体的弯曲量的变形量的构件,并且基于检测到的可变形构件的变形量来检测物体的挠曲量。

    Tracking attachment
    3.
    发明授权
    Tracking attachment 有权
    跟踪附件

    公开(公告)号:US07383636B2

    公开(公告)日:2008-06-10

    申请号:US11380704

    申请日:2006-04-28

    IPC分类号: G01B5/34

    CPC分类号: G01B5/255 G01B5/0025

    摘要: A tracking attachment (10) adapted and operable to facilitate measuring the alignment characteristics of the rear suspension of a vehicle, including tracking (thrust angle), offset, toe-in and toe-out, and length characteristics. The tracking attachment (10) broadly comprises an adjustment component (12); a bar component (14); one or more target components (16); an alignment component (18); one or more attachment components (20); a centering component (22); and a locking component (24).

    摘要翻译: 跟踪附件(10),其适于并可操作以便于测量车辆的后悬架的对准特性,包括跟踪(推力角),偏移,脚趾和脚趾以及长度特征。 跟踪附件(10)广泛地包括调整部件(12); 棒组件(14); 一个或多个目标部件(16); 对准部件(18); 一个或多个附接部件(20); 定心组件(22); 和锁定部件(24)。

    Method and apparatus for detecting topographical features of microelectronic substrates
    4.
    发明授权
    Method and apparatus for detecting topographical features of microelectronic substrates 失效
    用于检测微电子衬底的形貌特征的方法和装置

    公开(公告)号:US06923045B2

    公开(公告)日:2005-08-02

    申请号:US10892048

    申请日:2004-07-15

    IPC分类号: G01B11/30 G01B5/34 H01L21/66

    CPC分类号: G01B11/303 Y10T29/49004

    摘要: An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, the apparatus can include a support member configured to carry the microelectronic substrate with a first portion of the first surface exposed and a second portion of the second surface exposed. The apparatus can further include a topographical feature detector positioned proximate to support member and aligned with the first portion of the first surface of the microelectronic substrate to detect characteristics, such as a roughness, of the first surface while the microelectronic substrate is carried by the support member.

    摘要翻译: 一种用于检测微电子衬底特性的装置和方法。 微电子衬底可以具有第一表面,其具有第一形貌特征,诸如粗糙元件,以及与第一表面相对的第二表面,并且具有第二形貌特征,例如突出的导电结构。 在一个实施例中,该装置可以包括被配置为承载微电子基板的支撑构件,其中第一表面的第一部分被暴露并且第二表面的第二部分被暴露。 该装置还可以包括位于支撑构件附近并与微电子衬底的第一表面的第一部分对准的形貌特征检测器,以检测第一表面的特性,例如粗糙度,而微电子衬底由支撑体承载 会员。