公开(公告)号：US06670281B2

公开(公告)日：2003-12-30

申请号：US09223359

申请日：1998-12-30

申请人： Matthew H. Luly ,  Rajiv R. Singh ,  Charles L. Redmon ,  Jeffrey W. McKown ,  Robert Pratt

发明人： Matthew H. Luly ,  Rajiv R. Singh ,  Charles L. Redmon ,  Jeffrey W. McKown ,  Robert Pratt

IPC分类号： H01C21302

CPC分类号： C03C15/00 ,  C23G1/025

摘要： Methods for etching or removing oxide scale from a substrate by applying a composition containing a polymer and an effective amount of hydrofluoric acid and maintaining the composition on the substrate until the substrate is etched or the oxide scale is removed.

摘要翻译： 通过施加含有聚合物和有效量的氢氟酸的组合物并将该组合物保持在基材上直到基板被蚀刻或除去氧化皮的方法从基板上蚀刻或去除氧化皮。

公开(公告)号：US06346484B1

公开(公告)日：2002-02-12

申请号：US09651843

申请日：2000-08-31

申请人： John Michael Cotte ,  Christopher Vincent Jahnes ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  Satyanarayana Venkata Nitta ,  Katherine Lynn Saenger ,  John Patrick Simons

发明人： John Michael Cotte ,  Christopher Vincent Jahnes ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  Satyanarayana Venkata Nitta ,  Katherine Lynn Saenger ,  John Patrick Simons

IPC分类号： H01C21302

CPC分类号： H01L21/7682 ,  H01L21/31111

摘要： The present invention relates to formation of air gaps in metal/insulator interconnect structures, and to the use of supercritical fluid (SCF)-based methods to extract sacrificial place-holding materials to form air gaps in a structure. Supercritical fluids have gas-like diffusivities and viscosities, and very low or zero surface tension, so SCF's can penetrate small access holes and/or pores in a perforated or porous bridge layer to reach the sacrificial material. Examples of SCFs include CO2 (with or without cosolvents or additives) and ethylene (with or without cosolvents or additives). In a more general embodiment, SCF-based methods for forming at least partially enclosed air gaps in structures that are not interconnect structures are disclosed.

摘要翻译： 本发明涉及在金属/绝缘体互连结构中形成气隙，以及使用基于超临界流体（SCF）的方法来提取牺牲放置物质以在结构中形成气隙。 超临界流体具有气体扩散性和粘度，并且表面张力非常低或零，因此SCF可以渗透穿孔或多孔桥接层中的小孔和/或孔，以达到牺牲材料。 SCF的实例包括CO 2（含或不含助溶剂或添加剂）和乙烯（含或不含助溶剂或添加剂）。 在更一般的实施例中，公开了用于在不是互连结构的结构中形成至少部分封闭的气隙的基于SCF的方法。