公开(公告)号：US06797963B2

公开(公告)日：2004-09-28

申请号：US10617703

申请日：2003-07-14

Applicant: Sang Kuk Choi ,  Dae Yong Kim ,  Dong Yel Kang

Inventor： Sang Kuk Choi ,  Dae Yong Kim ,  Dong Yel Kang

IPC: H01J4942

CPC classification number: H01J9/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/26 ,  H01J37/1477 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/1516 ,  H01J2237/31793

Abstract: The present invention relates to a deflector of a micro-column electron beam apparatus and method for fabricating the same, which forms a seed metal layer and a mask layer on both sides of a substrate, and exposes some of the seed metal layer on which deflecting plates, wirings and pads are to be formed by lithography process using a predetermined mask. The wirings and pads are formed by plating metal on the exposed portion, and some of the metal layer is also exposed on which the deflecting plates are to be formed using a predetermined mask, and then the metal is plated with desired thickness, thereby the deflecting plates are completed. Therefore, by forming plurality of deflecting plates on both sides of the substrate at the same time through plating process, alignment between the deflecting plates formed on both sides of the substrate can be exactly made, and by fabricating a deflector integrated with the substrate and deflecting plates in a batch process, productivity and reproducibility is improved. In addition, since the deflecting plates, wirings and pads are directly formed on the substrate, structural safety is improved and thereby durability is also improved.

公开(公告)号：US06730903B2

公开(公告)日：2004-05-04

申请号：US10244534

申请日：2002-09-17

Applicant: Eizo Kawato

Inventor： Eizo Kawato

IPC: H01J4942

CPC classification number: H01J49/4205 ,  H01J49/022

Abstract: In an ion trap device using an RF electric field to trap ions, when the amplitude of the RF voltage for generating the RF electric field is changed from a first value to a second value, it is changed according to the exponential function of time. And the time constant of the exponential function is set equal to or longer than the time constant of the resonant circuit for generating the RF voltage. Owing to this, the time necessary to change the RF voltage is shortened, and an overshoot, undershoot, or ringing of an actual RF voltage on the electrode or electrodes of an ion trap is avoided when the RF voltage setting value is changed, so that the movement of ions in the ion trap is not disturbed and the throughput of the ion trap device is improved.

Abstract translation: 在使用RF电场捕获离子的离子阱装置中，当用于产生RF电场的RF电压的幅度从第一值变为第二值时，根据时间的指数函数来改变。 并且将指数函数的时间常数设定为等于或大于用于产生RF电压的谐振电路的时间常数。 因此，改变RF电压所需的时间被缩短，并且当RF电压设定值改变时，避免了离子阱的电极或电极上的实际RF电压的过冲，下冲或振铃，使得 离子阱中的离子的运动不受干扰，并且提高了离子阱装置的生产量。

公开(公告)号：US06566651B2

公开(公告)日：2003-05-20

申请号：US10215014

申请日：2002-08-12

Applicant: Takashi Baba ,  Izumi Waki ,  Dongbing Wang

Inventor： Takashi Baba ,  Izumi Waki ,  Dongbing Wang

IPC: H01J4942

CPC classification number: G01N21/6404 ,  H01J49/42

Abstract: A laser-cooled fluorescence mass spectrometry apparatus includes an ion trap for trapping sample ions, laser-cooled ions, and probe ions therein; a first irradiating device for irradiating the sample ions, the laser-cooled ions, and the probe ions in the ion trap with a first laser beam for cooling the ions; a second irradiating device for irradiating the sample ions, the laser-cooled ions, and the probe ions in the ion trap with a second laser beam for detecting temperature changes in the ions; a detecting device for detecting the temperature changes in the ions; a first ion source for the sample ions; a second ion source for the laser-cooled ions; and a third ion source for the probe ions. The probe ions may be different ions than the laser-cooled ions, or the probe ions may be the same ions as the laser-cooled ions.

Abstract translation: 激光冷却荧光质谱仪包括用于捕获样品离子，激光冷却离子和探针离子的离子阱; 第一照射装置，用于用用于冷却离子的第一激光束照射离子阱中的样品离子，激光冷却离子和探针离子; 第二照射装置，用于用用于检测离子温度变化的第二激光束照射离子阱中的样品离子，激光冷却离子和探针离子; 用于检测离子温度变化的检测装置; 用于样品离子的第一离子源; 用于激光冷却离子的第二离子源; 和用于探针离子的第三离子源。 探针离子可能是与激光冷却离子不同的离子，或探针离子可能与激光冷却离子相同的离子。

公开(公告)号：US06528798B1

公开(公告)日：2003-03-04

申请号：US09717663

申请日：2000-11-21

Applicant: Michael R. Busky

Inventor： Michael R. Busky

IPC: H01J4942

CPC classification number: H01J37/12 ,  H01J9/02

Abstract: A process for manufacturing an electrostatic element for steering a charged particle beam. A cylindrical, non-conductive body having a bore therethrough is assembled with a cylindrical, conductive core also having a bore therethrough and sized to fit within the bore of the body. The core is secured within the bore of the body, and then longitudinally extending slots are cut completely through the core to create pole pieces that are electrically isolated from each other.

Abstract translation: 一种用于制造用于转向带电粒子束的静电元件的方法。 具有穿过其中的孔的圆柱形非导电体与圆柱形的导电芯组装，该圆柱形导电芯还具有穿过其中的孔，并且尺寸适于装配在主体的孔内。 芯部固定在主体的孔内，然后将纵向延伸的槽完全切割穿过芯体，以产生彼此电隔离的极片。

公开(公告)号：US06469299B2

公开(公告)日：2002-10-22

申请号：US09892313

申请日：2001-06-26

Applicant: Ara Chutjian ,  Stephen D. Fuerstenau ,  Otto J. Orient ,  Karl Y. Yee ,  John T. Rice

Inventor： Ara Chutjian ,  Stephen D. Fuerstenau ,  Otto J. Orient ,  Karl Y. Yee ,  John T. Rice

IPC: H01J4942

CPC classification number: H01J49/4215 ,  H01J49/0018 ,  H01J49/009 ,  Y10S977/773 ,  Y10S977/891

Abstract: The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

Abstract translation: 本发明提供了用于四极质谱仪中的四极质谱仪和离子过滤器或极阵列。 离子过滤器包括薄的图案层，其包括形成一个或多个四极的二维阵列阵列。 图案层设计允许使用非常短的极点和极的非常密集的间隔，使得离子过滤器可以非常小。 还提供了制造离子过滤器和四极质谱仪的方法。 该方法包括以这样的方式形成离子过滤器的图案化层，使得当形成图案化层的极时，它们具有用于最终四极杆质谱仪装置中的相对定位和对准。

公开(公告)号：US06462338B1

公开(公告)日：2002-10-08

申请号：US09386151

申请日：1999-08-31

Applicant: Norihito Inatsugu ,  Hiroaki Waki

Inventor： Norihito Inatsugu ,  Hiroaki Waki

IPC: H01J4942

CPC classification number: H01J49/067 ,  H01J49/065

Abstract: A mass spectrometer according to the present invention includes an ion lens composed of an even number of virtual rod electrodes 31, 32 positioned separately around the ion beam axis C, where each of the virtual rod electrodes is composed of a plurality of separate metallic plate electrodes aligned in a row. For example, the virtual rod electrode 32 consists of five lens electrodes 321-325 aligned in a row parallel to the ion beam axis C. A voltage composed of a DC voltage and a high frequency AC voltage superimposed thereon is applied to each of the plate electrodes 321-325, where the DC voltage is changed according to the position of the plate electrode while the high frequency AC voltage is the same irrespective of the position. Ions travelling through the ion lens oscillates transversally due to the electric field generated by the high frequency AC voltage and converge on the focal point F of the ion lens. There, the ions gain kinetic energy from the potential gradient due to the DC voltages, whereby the ions are accelerated. Thus, the ions keep travelling without being displaced too much from due converging paths even when they collide with molecules of residing gas, and enter the section behind the ion lens through the orifice of the skimmer 16. Thus, the convergence and acceleration of ions are effectively performed even when the pressure in the first interface chamber 12 is as high as near atmospheric pressure.

Abstract translation: 根据本发明的质谱仪包括离子透镜，其由偶数位于离子束轴线C周围的虚拟棒电极31,32构成，其中每个虚拟棒电极由多个分开的金属板电极 排列在一行。 例如，虚拟杆电极32由与离子束轴C平行排列的五个透镜电极321-325组成。由直流电压和叠加在其上的高频交流电压构成的电压施加到每个板 电极321-325，其中直流电压根据板电极的位置而改变，而高频交流电压与位置无关地是相同的。 通过离子透镜的离子由于高频AC电压产生的电场而横向振荡并会聚在离子透镜的焦点F. 在那里，由于DC电压，离子从电位梯度获得动能，从而离子被加速。 因此，离子保持行进，即使当它们与驻留气体的分子碰撞时，也不会因为会聚路径而过度偏离，并且通过撇渣器16的孔进入离子透镜后面的部分。因此，离子的会聚和加速是 即使当第一界面室12中的压力高达接近大气压时也是有效的。

公开(公告)号：US06380666B1

公开(公告)日：2002-04-30

申请号：US09530091

申请日：2000-09-07

Applicant: Eizo Kawato

Inventor： Eizo Kawato

IPC: H01J4942

CPC classification number: H01J49/004 ,  H01J49/427

Abstract: A time-of-flight spectrometer comprises a quadrupole ion trap (10) as an ion source, a drift tube (11) defining a field-free drift space, an ion reflector (12) and an ion detector (13). The quadrupole ion trap (10) has two end-cap electrodes (22, 23) and a ring electrode (21). End-cap electrode (22) has a central hole (24) through which ions to be extracted can pass. High voltage power supplies (34, 35) and associated switching devices (32, 33) are provided to supply extraction voltages to the end-cap electrodes (22, 23). The extraction voltage supplied to end-cap electrode (22) has the opposite polarity to the extraction voltage supplied to the other end-cap electrode (23) being respectively negative and positive voltages for positive ion extraction and respectively positive and negative voltages for negative ion extraction. The magnitude of the extraction voltage supplied to electrode (23) is in the range from 0.5 to 0.8 that of the extraction voltage supplied to electrode (22).

Abstract translation: 飞行时间谱仪包括作为离子源的四极离子阱（10），限定无场漂移空间的漂移管（11），离子反射器（12）和离子检测器（13）。 四极离子阱（10）具有两个端盖电极（22,23）和环形电极（21）。 端帽电极（22）具有中心孔（24），待提取的离子可通过该中心孔。 提供高压电源（34,35）和相关的开关装置（32,33）以向端盖电极（22,23）提供提取电压。 提供给端盖电极（22）的提取电压具有与提供给另一端帽电极（23）的提取电压相反的极性，分别为正离子提取的正电压和负离子的正电压和负电压 萃取。 提供给电极（23）的提取电压的大小在提供给电极（22）的提取电压的范围的0.5至0.8的范围内。

公开(公告)号：US06262416B1

公开(公告)日：2001-07-17

申请号：US09499708

申请日：2000-02-08

Applicant: Ara Chutjian ,  Stephen D. Fuerstenau ,  Otto J. Orient ,  Karl Y. Yee ,  John T. Rice

Inventor： Ara Chutjian ,  Stephen D. Fuerstenau ,  Otto J. Orient ,  Karl Y. Yee ,  John T. Rice

IPC: H01J4942

CPC classification number: H01J49/4215 ,  H01J49/0018 ,  H01J49/009 ,  Y10S977/773 ,  Y10S977/891

Abstract: The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

公开(公告)号：US06177668B1

公开(公告)日：2001-01-23

申请号：US09087909

申请日：1998-06-01

Applicant: James W. Hager

Inventor： James W. Hager

IPC: H01J4942

CPC classification number: H01J49/4225 ,  H01J49/004 ,  H01J49/427

Abstract: A method of operating a mass spectrometer having an elongated multipole rod set, in which a two dimensional RF field radially contains trapped ions in a mass to charge range of interest, and in which the ions are contained axially by a barrier field on an end lens and to which a low voltage DC is applied. Trapped ions are axially mass selectively ejected by taking advantage of the mixing of the degrees of freedom induced by the fringing fields and other anti-harmonicities in the vicinity of the end lens. Thus, ions can be mass selectively ejected at the exit end at the same time as ions are being admitted into the entrance end of the rod set, thereby taking better advantage of the ion flux from a continuous ion source. The axial mass selective ejection is performed by applying an auxiliary AC voltage to the end lens, or to the rods themselves, or both, and by scanning either the auxiliary AC voltage or the RF voltage on the rod set. Trapped ions can be concentrated near the exit lens by applying an axial field in the direction of the lens, or can be depleted by applying the axial field in the opposite direction. The axial field can be oscillated to dissociate trapped ions.

Abstract translation: 操作具有细长多极棒组的质谱仪的方法，其中二维RF场径向包含感兴趣的质量到电荷范围内的捕获的离子，并且其中离子由端部透镜上的屏障场轴向包含 并且施加低电压DC。 捕获的离子通过利用由边缘场引起的自由度和端镜头附近的其它抗谐波的混合来轴向质量选择性地喷射。 因此，离子可以在离子进入到棒组的入口端的同时在出口端被质量选择性地喷射，从而更好地利用来自连续离子源的离子通量。 通过将辅助AC电压施加到端部透镜或杆自身或两者，并且通过扫描杆组上的辅助AC电压或RF电压来执行轴向质量选择性喷射。 被捕获的离子可以通过沿着透镜的方向施加轴向场而集中在出射透镜附近，或者可以通过沿相反方向施加轴向场而被耗尽。 振荡轴向场以解离捕获的离子。

公开(公告)号：US06703607B2

公开(公告)日：2004-03-09

申请号：US10159766

申请日：2002-05-30

Applicant: William R. Stott ,  Bruce Collings ,  Frank Londry ,  James Hager

Inventor： William R. Stott ,  Bruce Collings ,  Frank Londry ,  James Hager

IPC: H01J4942

CPC classification number: H01J49/429 ,  H01J49/4225

Abstract: An improved method of operating a mass spectrometer having a linear ion trap wherein ions are axially ejected from the trap to a detector or subsequent mass analysis stage. The DC barrier field produced at the exit lens of the trap is scanned in conjunction with the scanning of other fields used to energize ions of select mass-to-charge ratios past the barrier field/exit lens. The technique can maximize the resolution obtainable from axial ejection over a wide mass range.

Abstract translation: 一种操作具有线性离子阱的质谱仪的改进方法，其中离子从捕集器轴向地从捕获器喷射到检测器或随后的质量分析阶段。 结合用于激励通过屏障场/出射透镜的选择质荷比的离子的其它场的扫描来扫描在阱的出射透镜处产生的DC势垒场。 该技术可以使在大质量范围内从轴向喷射获得的分辨率最大化。