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公开(公告)号：US11467506B2
公开(公告)日：2022-10-11
申请号：US17160094
申请日：2021-01-27
申请人： NIKON CORPORATION
发明人： Zhiqiang Liu , Eric Goodwin , Goldie Goldstein
摘要： A position encoder for monitoring relative movement between a first object and a second object includes a grating that is coupled to the first object, and an image sensor assembly that is coupled to the second object. The image sensor includes a first image sensor; a second image sensor that is spaced apart from the first image sensor; an optical element that includes a first optical surface and a second optical surface that is spaced apart from the first optical surface; and an illumination system. The illumination system directs an illumination beam at the optical element to create (i) a first reference beam that is reflected by the first optical surface and directed at the first image sensor, (ii) a second reference beam that is reflected by the second optical surface and directed at the second image sensor, and (iii) a transmitted beam that is transmitted through the optical element and is directed at and impinges on the grating to create a first measurement beam that is diffracted by the grating and directed at the first image sensor, and a second measurement beam that is diffracted by the grating and directed at the second image sensor.
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公开(公告)号：US11448529B2
公开(公告)日：2022-09-20
申请号：US17247141
申请日：2020-12-01
发明人： Hsi-Fu Shih
摘要： An optical rotary encoder includes a code disk, a laser source unit, a focusing unit and a photodetector array. The focusing unit converts the laser beam emitted by the laser source unit into incident laser beams that have a plurality of light points respectively on code tracks of the code disk, such that the code disk modulates the incident laser beams to form optical code signals. The photodetector array receives and converts the optical code signals into electric code signals.
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公开(公告)号：US11143529B2
公开(公告)日：2021-10-12
申请号：US16973552
申请日：2018-11-12
发明人： JianWei Wu , ZhongPu Wen , PengCheng Hu , Yin Zhang , JiWen Cui , JiuBin Tan
摘要： A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.
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公开(公告)号：US11079215B2
公开(公告)日：2021-08-03
申请号：US16930446
申请日：2020-07-16
申请人： DMG MORI Co., Ltd.
发明人： Masayuki Niiya
摘要： In order to provide a small detection device capable of detecting an accurate absolute position with a single head, there is provided a detection device including a head including a light source and a detecting unit configured to receive multiplexed light (interference light) of diffracted light obtained by causing light from the light source to enter first two points residing on ax diffraction grating and being separated from each other by a known distance and diffracted light obtained by causing the light from the light source to enter second two points residing on the diffraction grating, being separated from each other by a known distance, and including at least one point being different from the first two points, wherein the diffraction grating includes a first region between the first two points separated from each other by the known distance and a second region between the second two points separated from each other by the known distance, the first and second regions having at least partially different grating interval lengths, and an absolute position on the diffraction grating is detected based on the multiplexed light (interference light) received by the detecting unit.
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公开(公告)号：US20210215861A1
公开(公告)日：2021-07-15
申请号：US17147537
申请日：2021-01-13
发明人： Laura Daniela Vallejo-Melgarejo , Jose Manuel Garcia-Bravo , Brittany Ann Newell , Ronald George Reifenberger
摘要： A multi-layer lens is disclosed which includes a plurality of dual-layer structures staked on top of one-another, wherein each dual-layer Ri of the plurality of dual-layers includes i) a first curable material having a height of ZLi cured at a predetermined curing level CA, and ii) a second curable material having a height of Zgi cured at a predetermined curing level CB.
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公开(公告)号：US20210173080A1
公开(公告)日：2021-06-10
申请号：US17104258
申请日：2020-11-25
发明人： Karsten SÄNDIG
摘要： An optical position-measurement device includes a reflection measuring standard and a scanning unit, which is movable in relation thereto in at least one measurement direction. The reflection measuring standard has an incremental measuring graduation and a reference marking in at least one reference position. In addition to scanning device(s) for the incremental signal generation, the scanning unit includes for the reference signal generation at least one light source, imaging optics, a diaphragm structure arranged in a diaphragm plane, and a plurality of detector elements. Via the imaging optics, imaging of the reference marking onto the diaphragm structure is implemented. The reference marking is provided on the reflection measuring standard and is integrated into the incremental measuring graduation. In addition, the imaging optics has a variable, object-side focal length along a transversal direction oriented perpendicular to the measurement direction.
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公开(公告)号：US10921721B1
公开(公告)日：2021-02-16
申请号：US16596237
申请日：2019-10-08
发明人： Jinxin Fu , Yifei Wang , Yongan Xu , Ludovic Godet
摘要： Embodiments of the present disclosure include measurement systems and grating pattern arrays. The measurement systems include multiple subsystems for creating diffraction patterns or magnified real images of grating regions on a substrate. The measurements systems are configured to reflect and transmit light, and the reflected and transmitted beams create diffraction patterns and enlarged images. The diffraction patterns and images provide information on grating pitch and angles of grating regions. Grating pattern arrays disposed on a substrate include main regions and reference regions. The reference regions are used to locate corresponding main regions. The measurement systems do not include a rotating stage, and thus precise control of rotation of a stage is not needed.
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公开(公告)号：US10859374B2
公开(公告)日：2020-12-08
申请号：US16502106
申请日：2019-07-03
申请人： Mitutoyo Corporation
发明人： Akihide Kimura
摘要： The present invention provides an optical angle sensor capable of detecting a wide range of angles with high resolution, having no scale, and specifying a reference angle. The optical angle sensor includes a light source for irradiating light, a reflection means for rotating around a predetermined axis as a measurement axis and reflecting the light irradiated from the light source, a light receiving means for receiving the light irradiated from the light source, and a calculation means for calculating the light received by the light receiving means as a signal. The light receiving means receives the light irradiated from the light source through the reflection means. The calculation means includes a specifying means for specifying the reference angle based on the light received by the light receiving means, and an angle calculating unit for calculating an absolute angle based on the light received by the light receiving means and the reference angle specified by the specifying means.
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公开(公告)号：US10831035B2
公开(公告)日：2020-11-10
申请号：US14919188
申请日：2015-10-21
申请人： Mitutoyo Corporation
发明人： Akihide Kimura
摘要： An optical encoder 10 comprising: a light source 11; a splitter 12 splits a light from the light source 11, a light receiving unit 16; a scale 13 is arranged on a light path and movable in a measurement direction, a grating being arranged on a main surface of the scale; and an offset diffraction grating 14 includes a plurality of diffraction gratings arranged in the optical path from the splitter 12 to the light receiving unit 16, the plurality of diffraction gratings diffracting the split lights with different phases, wherein, the plurality of diffraction gratings 13 in the offset diffraction grating 14 are arranged in one plane parallel to the main surface of the scale and are offset each other in an offset direction orthogonal to the measurement direction, the light receiving unit 16 includes a plurality of light-receiving elements 16-11 to 16-23 arranged in the offset direction.
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10.发明授权公开(公告)号：US10768025B2
公开(公告)日：2020-09-08
申请号：US15524263
申请日：2015-10-22
发明人： Wouter Onno Pril , Jan Peter Baartman , Allard Eelco Kooiker , Suzanne Johanna Antonetta Geertruda Cosijns , Bryan Tong-Minh
摘要： An encoder includes an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient environment a second radiation beam. The optical component is arranged to combine the first and second radiation beams. The enclosing device is arranged to propagate the first radiation beam along a first path. The first path is between the first surface portion and the optical component. The enclosing device is arranged to propagate the second radiation beam along a second path. The second path is between the second surface portion and the optical component. The enclosing device is arranged to enclose a space, so as to isolate the first path and the second path from the ambient environment.
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