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    MICROMECHANICAL THERMAL SENSOR
    1.
    发明申请
    MICROMECHANICAL THERMAL SENSOR 审中-公开
    微电子传感器

    公开(公告)号：WO2007143464A3

    公开(公告)日：2008-12-04

    申请号：PCT/US2007069939

    申请日：2007-05-30

    Applicant: HONEYWELL INT INC ,  WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

    Inventor： WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

    IPC: G01J3/42

    CPC classification number: G01J5/12 ,  G01J3/42 ,  G01J3/4532 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/40 ,  G01J2005/0077

    Abstract: A radiation sensor (200) that can operate in the THz regime comprising: a micro antenna (206), which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining. of a silicon wafer; a thermally isolated microstructure (215); a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

    Abstract translation: 一种能够以太赫兹状态工作的辐射传感器（200），包括：微天线（206），其可以包括通过微加工制造的薄介电薄膜上的二维图案化薄膜金属化。 的硅晶片; 热分离微结构（215）; 用于将来自微天线的能量耦合到微结构的耦合机构，所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。

    GAS SENSORS
    2.
    发明申请
    GAS SENSORS 审中-公开
    气体传感器

    公开(公告)号：WO2007025100A3

    公开(公告)日：2007-04-26

    申请号：PCT/US2006033173

    申请日：2006-08-25

    Applicant: HONEYWELL INT INC ,  GU YUANDONG ,  COLE BARRETT L ,  HIGASHI ROBERT E

    Inventor： GU YUANDONG ,  COLE BARRETT L ,  HIGASHI ROBERT E

    IPC: G01N25/48 ,  G01N33/00

    CPC classification number: G01N25/4846 ,  G01N33/004 ,  Y02A50/244

    Abstract: A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating temperature. Methods of sensing carbon dioxide and humidity are also disclosed.

    Abstract translation: 提供气体传感器用于检测气体样品中的一种或多种气体。 气体传感器包括基板，包括用于感测二氧化碳的氧化镧的固体电解质层，与固体电解质层热耦合的加热元件以及耦合到加热元件和固体电解质层的控制器。 控制器加热加热元件，使固体电解质层达到工作温度。 还公开了检测二氧化碳和湿度​​的方法。

    PLANAR ULTRA VIOLET LIGHT DETECTOR
    3.
    发明申请
    PLANAR ULTRA VIOLET LIGHT DETECTOR 审中-公开
    平面超紫外光探测器

    公开(公告)号：WO2005062005A9

    公开(公告)日：2008-08-07

    申请号：PCT/US2004037991

    申请日：2004-11-12

    Applicant: HONEYWELL INT INC ,  COLE BARRETT E ,  HIGASHI ROBERT E

    Inventor： COLE BARRETT E ,  HIGASHI ROBERT E

    IPC: G01J1/42

    CPC classification number: G01J1/429

    Abstract: A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.

    Abstract translation: 具有阴极晶片，空腔晶片和阳极晶片的光检测器。 阴极晶片可以结合到空腔晶片的一侧，并且阳极晶片可以结合到空腔晶片的另一侧。 阴极晶片可以具有许多阴极，阳极晶片许多阳极和空腔晶片可以在一对一的基础上对准多个空腔，以形成多个检测器的晶片结构，其可以切成可分离的检测器芯片。 当在阴极和阳极之间存在电压电势，并且在空腔中存在诸如Ne等的气体时，诸如紫外线的光的接收可导致光检测器的阴极和阳极之间的电子放电。

    SHELL FLOW SENSOR
    5.
    发明申请
    SHELL FLOW SENSOR 审中-公开
    壳流量传感器

    公开(公告)号：WO2009023484A3

    公开(公告)日：2009-07-02

    申请号：PCT/US2008072266

    申请日：2008-08-06

    Applicant: HONEYWELL INT INC ,  LU SON T ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A

    Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A

    IPC: G01F1/68 ,  B32B27/34 ,  B81B7/00 ,  B81C1/00

    CPC classification number: G01F1/6845 ,  G01F1/6842 ,  Y10T29/49002

    Abstract: A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.

    Abstract translation: 流量传感器系统及其制造方法。 提供衬底，包括其上形成流量传感器的检测器晶片。 然后可以将一个或多个壳体配置在其壁形成流动通道的基底上。 流动通道以允许流动通道将热量传递直接耦合到流量传感器的方式直接在基底上制造，以便在流量传感器制造期间不需要两种或更多种不同类型的牺牲层 衬底，并且其中壳体与流体测量耦合以提供流量传感器。

    A THERMAL VACUUM GAUGE
    6.
    发明申请
    A THERMAL VACUUM GAUGE 审中-公开
    一个热真空仪

    公开(公告)号：WO2008089121A3

    公开(公告)日：2008-12-18

    申请号：PCT/US2008050963

    申请日：2008-01-14

    Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E

    Inventor： HIGASHI ROBERT E

    IPC: G01L21/10 ,  G01L11/00

    CPC classification number: G01L21/10 ,  G01L11/002

    Abstract: A system for determining a gas pressure or gauging a vacuum in a hermetically sealed enclosure. One or more heater structures and one or more temperature sensor structures situated on a substrate may be used in conjunction for measuring a thermal conductivity of a gas in the enclosure. Each heater has significant thermal isolation from each sensor structure. Electronics connected to each heater and sensor of their respective structures may provide processing to calculate the pressure or vacuum in the enclosure. The enclosure may contain various electronic components such as bolometers.

    Abstract translation: 用于确定气密压力或测量密封外壳中的真空的系统。 位于基底上的一个或多个加热器结构和一个或多个温度传感器结构可以联合使用以测量外壳中的气体的热导率。 每个加热器都与每个传感器结构有很大的热隔离。 连接到各个结构的每个加热器和传感器的电子设备可以提供处理以计算外壳中的压力或真空。 外壳可能含有各种电子元件，如辐射热测量计。

    AN INTEGRAL TOPSIDE VACCUM PACKAGE
    7.
    发明申请
    AN INTEGRAL TOPSIDE VACCUM PACKAGE 审中-公开
    一体式吸顶式真空包装

    公开(公告)号：WO2005067047A3

    公开(公告)日：2006-01-05

    申请号：PCT/US2004042583

    申请日：2004-12-08

    Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

    Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

    IPC: G01J5/20 ,  G02B5/28 ,  H01L27/00 ,  H01L27/146 ,  H01L31/0203 ,  H01L31/0216

    CPC classification number: G01J5/20 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14649 ,  H01L27/16 ,  H01L31/0203 ,  H01L31/02162 ,  H01L2924/0002 ,  Y10T428/24355 ,  H01L2924/00

    Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.

    Abstract translation: 在两片晶片之间的接合密封的周边周边上具有相加体积的集成真空包装。 增加的空间体积可以是从顶部晶片的内表面蚀刻材料。 该晶片可以具有通气孔，其可以在泵离开气体和空气之后被密封以将真空保持在两个晶片之间的体积内。 顶部晶片的内表面可以具有抗反射图案。 此外，抗反射图案可以在顶部晶片的外表面上。 两个晶片之间的密封可以是环状的并且具有间隔物材料。 此外，它可以具有可延展的材料，例如焊料，以补偿晶片的两个相对表面之间的任何平坦度变化。

    NANOTUBE FABRICATION BASIS
    9.
    发明申请
    NANOTUBE FABRICATION BASIS 审中-公开
    纳米制造基础

    公开(公告)号：WO2005071715A3

    公开(公告)日：2005-09-22

    申请号：PCT/US2004042270

    申请日：2004-12-15

    Applicant: HONEYWELL INT INC ,  BARETT COLE E ,  HIGASHI ROBERT E

    Inventor： BARETT COLE E ,  HIGASHI ROBERT E

    IPC: C01B31/02 ,  C30B29/60 ,  H01L21/00

    CPC classification number: C30B29/605 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/742 ,  Y10T428/30

    Abstract: A structure having a substrate, patterned metal layer and a catalyst island formed on the metal layer. The surface of the substrate upon which the metal layer is formed may be oxidized. As an illustrative example, the metal may be HfN and the catalyst island may be iron, nickel, or the like. The resulting structure may be placed in an environment having a carbon-containing gas, a temperature between 500 and 1200 degrees C, and an electric field. A nanotube may grow from the catalyst island. A method including the combining of hafnium and nitrogen may be used to make the nanotube growing structure.

    Abstract translation: 具有形成在金属层上的基板，图案化金属层和催化剂岛的结构。 形成有金属层的基板的表面可能被氧化。 作为说明性实例，金属可以是HfN，催化剂岛可以是铁，镍等。 所得结构可以放置在具有含碳气体，温度在500至1200℃之间的电场和电场中。 纳米管可以从催化剂岛生长。 可以使用包括铪和氮的组合的方法来制造纳米管生长结构。

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