公开(公告)号：WO2020190941A1

公开(公告)日：2020-09-24

申请号：PCT/US2020/023146

申请日：2020-03-17

Applicant: LAM RESEARCH CORPORATION

Inventor： ZHOU, Xiang ,  GOH, Teng Hooi ,  KIMURA, Yoshie

IPC: H01L21/308 ,  H01L21/02 ,  H01L21/027 ,  C23C16/40 ,  C23C16/455 ,  G03F7/004

Abstract: Provided herein are methods and systems for reducing roughness of EUV resists and improving etched features. The methods may involve depositing a thin film on a patterned EUV resist having a stress level that is less compressive than a stress level of the patterned EUV resist. The resulting composite stress may reduce buckling and/or bulging of the patterned EUV resist.

公开(公告)号：WO2020102085A1

公开(公告)日：2020-05-22

申请号：PCT/US2019/060742

申请日：2019-11-11

Applicant: LAM RESEARCH CORPORATION

Inventor： WEIDMAN, Timothy William ,  NARDI, Katie ,  WU, Chenghao

IPC: G03F7/004 ,  G03F7/11 ,  G03F7/20

Abstract: Imaging layers on the surface of a substrate may be patterned using next generation lithographic techniques, and the resulting patterned film may be used as a lithographic mask, for example, for production of a semiconductor device.

公开(公告)号：WO2019094714A1

公开(公告)日：2019-05-16

申请号：PCT/US2018/060024

申请日：2018-11-09

Applicant: SHASTA CRYSTALS, INC.

Inventor： KATCHANOV, Alexandre ,  MAXWELL, Gisele

IPC: H01S3/06 ,  H01S3/094 ,  H01S3/10

CPC classification number: H01S3/061 ,  H01S3/0405 ,  H01S3/0615 ,  H01S3/0617 ,  H01S3/094084 ,  H01S3/09415 ,  H01S3/2333

Abstract: Techniques, methods, systems, apparatus, and articles of manufacture that can be used for optical amplification may be particularly, though not exclusively, applicable to optical amplification using thin single crystal rods (TSCRs). Such TSCRs may be particularly useful for use in Master Oscillator - Power Amplifier systems. Use of TSCRs in such systems presents an attractive alternative to using glass fibers for ultra-short pulsing lasers with output power levels exceeding 100 W. Such systems are desirable because virtually any engineering material can be processed by ultra-short pulses and the achieved processing quality using such systems generally meets stringent quality requirements.

公开(公告)号：WO2019089196A1

公开(公告)日：2019-05-09

申请号：PCT/US2018/055065

申请日：2018-10-09

Applicant: LAM RESEARCH CORPORATION

Inventor： SMITH, David Charles ,  WISE, Richard ,  MAHOROWALA, Arpan ,  HAUSMANN, Dennis M.

IPC: H01L21/3065 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/027 ,  H01L21/02 ,  H01L21/67 ,  G03F7/20 ,  G03F1/80

Abstract: Methods of and apparatuses for processing a metal oxide film are provided. Methods involve (a) exposing the metal oxide film to a boron halide reactant and igniting a first plasma with a first bias power to modify a surface of the metal oxide film, and (b) exposing the modified surface of the metal oxide film to a second plasma at a second bias power and for a duration sufficient to remove the modified surface without sputtering. Methods also involve (c) selectively depositing a metal oxide material on the metal oxide film to fill crevices within the metal oxide film.

公开(公告)号：WO2016153508A1

公开(公告)日：2016-09-29

申请号：PCT/US2015/022567

申请日：2015-03-25

Applicant: SHASTA CRYSTALS, INC.

Inventor： MAXWELL, Gisele ,  PONTING, Bennett ,  GEBREMICHAEL, Eminet ,  MAGANA, Ruben

IPC: G02B6/02

CPC classification number: G02B6/032 ,  B22F3/1035 ,  B24B19/226 ,  C03B37/011 ,  C03C25/1061 ,  C04B35/111 ,  C04B35/44 ,  C04B35/62222 ,  C04B2235/3208 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/764 ,  C30B13/005 ,  C30B13/24 ,  C30B29/26 ,  C30B29/28 ,  C30B29/60 ,  G02B6/0065 ,  H01S3/067 ,  H01S3/1618 ,  H01S3/1631

Abstract: Sol-gel methods, apparatus and compositions for cladding optical fiber cores provide optical fibers, including single crystal optical fiber cores with polycrystalline cladding, having improved performance in a variety of applications, such as fiber lasers.

Abstract translation: 用于包覆光纤芯的溶胶 - 凝胶方法，装置和组合物提供光纤，包括具有多晶包层的单晶光纤芯，在诸如光纤激光器的各种应用中具有改进的性能。

公开(公告)号：WO2016057565A1

公开(公告)日：2016-04-14

申请号：PCT/US2015/054306

申请日：2015-10-06

Applicant: LAM RESEARCH CORPORATION

Inventor： GOSSELIN, Simon ,  WONG, Vincent ,  RAMNARINE, Ronald ,  NEWTON, Neal K ,  SHAH, Mukesh ,  HOVERSTEN, Kerwin ,  AHRENS, Bob ,  MORA, Marco ,  PATRICK, Roger

IPC: G05B19/409

CPC classification number: G06Q10/20

Abstract: Integration of semiconductor tool maintenance operations on mobile devices enables technicians to more accurately perform semiconductor tool maintenance, and allows for more accurate collection and analysis of data so that maintenance procedures and resulting tool operations can be more repeatable, consistent and efficient.

Abstract translation: 将半导体工具维护操作集成到移动设备上，使技术人员能够更准确地执行半导体工具维护，并允许更准确地收集和分析数据，从而使维护过程和结果的工具操作更具可重复性，一致性和高效性。

公开(公告)号：WO2014066245A1

公开(公告)日：2014-05-01

申请号：PCT/US2013/065936

申请日：2013-10-21

Applicant: QUIVERS INTERNATIONAL, INC.

Inventor： BERGER, Brant, W. ,  LINKER, Jon, Jason ,  MARTIN, Ruben, L.

IPC: G06Q30/06

CPC classification number: G06Q30/0627 ,  G06Q30/06

Abstract: This invention relates to systems and methods for manufacturers, distributors, and vendors ("suppliers") that participate in a system and method of distributing products over a network from suppliers to consumers to invite each other to share links on each other's product pages. A supplier may partner with selected suppliers so that only the products of those selected suppliers are included in the cross-traffic ads and offers on its website or product page.

Abstract translation: 本发明涉及参与通过网络将产品从供应商分发给消费者的系统和方法的制造商，分销商和供应商（“供应商”）的系统和方法，以邀请彼此在彼此的产品页面上共享链接。 供应商可以与选定的供应商合作，以便只有这些选定的供应商的产品才能包含在其网站或产品页面的交叉路口广告和优惠中。

公开(公告)号：WO2011139447A2

公开(公告)日：2011-11-10

申请号：PCT/US2011/030969

申请日：2011-04-01

Applicant: POLYPLUS BATTERY COMPANY ,  VISCO, Steven J. ,  NIMON, Yevgeniy S. ,  DE JONGHE, Lutgard C. ,  KATZ, Bruce D.

Inventor： VISCO, Steven J. ,  NIMON, Yevgeniy S. ,  DE JONGHE, Lutgard C. ,  KATZ, Bruce D.

IPC: H01M10/38 ,  H01M4/58 ,  H01M4/38 ,  H01M2/10 ,  H01M4/02

CPC classification number: H01M6/34 ,  H01M2/1626 ,  H01M2/1653 ,  H01M4/06 ,  H01M4/38 ,  H01M4/382 ,  H01M4/405 ,  H01M4/582 ,  H01M12/00 ,  H01M2004/027 ,  H01M2004/029

Abstract: Water activated alkali metal battery cells, protected anode bi-polar electrodes and multi-cell stacks are configurable to achieve very high energy density. The cells, bi-polar electrode and multi-cell stacks include a protected anode and a cathode having a solid phase electro-active component material that is reduced during cell discharge.

Abstract translation: 水活化的碱金属电池，受保护的阳极双极电极和多电池堆可配置以实现非常高的能量密度。 电池，双极电极和多电池堆包括受保护的阳极和具有在电池放电期间减少的固相电活性组分材料的阴极。

公开(公告)号：WO2011019499A3

公开(公告)日：2011-02-17

申请号：PCT/US2010/043429

申请日：2010-07-27

Applicant: MIASOLE ,  HARDIKAR, Kedar ,  KRAJEWSKI, Todd ,  WHITFIELD, Kent

Inventor： HARDIKAR, Kedar ,  KRAJEWSKI, Todd ,  WHITFIELD, Kent

IPC: H01L31/048 ,  H01L31/042

Abstract: A photovoltaic module having a light transmissive front layer, a back layer, and a plurality of interconnected photovoltaic cells disposed between the light transmissive front layer and the back layer has a CTE-modified composite encapsulant is interposed between the plurality of solar cells and the light transmissive front layer. The composite encapsulant includes a bulk encapsulant transmissive to visible and near visible wavelengths of the solar spectrum and having a base coefficient of thermal (CTE) expansion, and an encapsulant CTE modifier in the bulk encapsulant. The encapsulant CTE modifier is substantially evenly distributed through the composite encapsulant thickness and interacts with the bulk encapsulant to reduce the effective CTE of the composite encapsulant below that of the bulk encapsulant.

公开(公告)号：WO2009105609A1

公开(公告)日：2009-08-27

申请号：PCT/US2009/034635

申请日：2009-02-20

Applicant: FLUIDIGM CORPORATION ,  AMIN, Yusuf, D

Inventor： AMIN, Yusuf, D

IPC: B81B1/00 ,  B81B7/00 ,  H01L21/44 ,  G01N27/00 ,  B01L3/00

CPC classification number: B01J19/0046 ,  B01L3/502707 ,  B01L9/527 ,  B01L2200/027 ,  B01L2200/04 ,  B01L2200/10 ,  B01L2200/12 ,  B01L2300/043 ,  B01L2300/123 ,  B01L2300/1805

Abstract: A carrier for holding a microfluidic device includes a substrate with a plurality of wells, each well defining a volume of between 0.1 µl and 100 µl; a plurality of channels within the substrate wherein each well is in fluid communication with at least one of the plurality of channels; and a receiving portion for receiving a microfluidic device and placing the microfluidic device in fluid communication with the plurality of wells. The carrier has a polymeric composition and/or an array of structural features that enhance its performance and compatibility with existing instrumentation.

Abstract translation: 用于保持微流体装置的载体包括具有多个孔的基底，每个孔限定0.1μl和100μl之间的体积; 衬底内的多个通道，其中每个阱与所述多个通道中的至少一个流体连通; 以及用于接收微流体装置并将微流体装置与多个孔流体连通的接收部分。 载体具有增强其性能和与现有仪器的兼容性的聚合物组合物和/或结构特征阵列。