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公开(公告)号:WO2019204119A1
公开(公告)日:2019-10-24
申请号:PCT/US2019/027005
申请日:2019-04-11
Applicant: SUNPOWER CORPORATION
Inventor: LIN, Yafu , JACOB, David
IPC: H01L31/18 , H01L31/02 , H01L31/0236 , H01L31/036
Abstract: Methods of fabricating solar cells having junctions retracted from cleaved edges, and the resulting solar cells, are described. In an example, a solar cell includes a substrate having a light-receiving surface, a back surface, and sidewalls. An emitter region is in the substrate at the light-receiving surface of the substrate. The emitter region has sidewalls laterally retracted from the sidewalls of the substrate. A passivation layer is on the sidewalls of the emitter region.
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62.
公开(公告)号:WO2019190453A1
公开(公告)日:2019-10-03
申请号:PCT/US2018/024294
申请日:2018-03-26
Applicant: INTEL CORPORATION , BLACKWELL, James M. , CLENDENNING, Scott B. , TAN, Cen , KRYSAK, Marie
Inventor: BLACKWELL, James M. , CLENDENNING, Scott B. , TAN, Cen , KRYSAK, Marie
IPC: H01L21/311 , H01L21/3213 , H01L21/768
Abstract: Selective etching and controlled atomic layer etching of transition metal oxide films for device fabrication, and the resulting devices, are described. In an example, method of dry etching a film includes forming a transition metal oxide film having a latent pore-forming material therein. The method also includes removing a surface portion of the latent pore-forming material of the transition metal oxide film to form a porous region of the transition metal oxide film. The method also includes removing the porous region of the transition metal oxide film.
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公开(公告)号:WO2019055052A1
公开(公告)日:2019-03-21
申请号:PCT/US2017/052109
申请日:2017-09-18
Applicant: INTEL CORPORATION , GLASSMAN, Timothy E. , SEGHETE, Dragos , STRUTT, Nathan , ASURI, Namrata S. , GOLONZKA, Oleg
Inventor: GLASSMAN, Timothy E. , SEGHETE, Dragos , STRUTT, Nathan , ASURI, Namrata S. , GOLONZKA, Oleg
IPC: H01L45/00
Abstract: Approaches for fabricating RRAM stacks with reduced forming voltage, and the resulting structures and devices, are described. In an example, a resistive random access memory (RRAM) device includes a conductive interconnect in an inter-layer dielectric (ILD) layer above a substrate. An RRAM element is on the conductive interconnect, the RRAM element including a first electrode layer on the uppermost surface of the conductive interconnect. A resistance switching layer is on the first electrode layer, the resistance switching layer including a first metal oxide material layer on the first electrode layer, and a second metal oxide material layer on the first metal oxide material layer, the second metal oxide material layer including a metal species not included in the first metal oxide material layer. An oxygen exchange layer is on the second metal oxide material layer of the resistance switching layer. A second electrode layer is on the oxygen exchange layer.
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公开(公告)号:WO2019055003A1
公开(公告)日:2019-03-21
申请号:PCT/US2017/051367
申请日:2017-09-13
Applicant: INTEL CORPORATION , MAJHI, Prashant , PILLARISETTY, Ravi , KARPOV, Elijah V. , DOYLE, Brian S. , SHARMA, Abhishek A.
Inventor: MAJHI, Prashant , PILLARISETTY, Ravi , KARPOV, Elijah V. , DOYLE, Brian S. , SHARMA, Abhishek A.
CPC classification number: H01L27/2409 , H01L27/224 , H01L27/2481 , H01L45/04 , H01L45/06 , H01L45/1233 , H01L45/144 , H01L45/146 , H01L45/1675
Abstract: Embedded non-volatile memory structures having selector elements with ballast are described. In an example, a memory device includes a word line. A selector element is above the word line. The selector element includes a selector material layer and a ballast material layer different than the selector material layer. A bipolar memory element is above the word line. A conductive electrode is between the elector element and the bipolar memory element. A bit line is above the word line.
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公开(公告)号:WO2019005167A1
公开(公告)日:2019-01-03
申请号:PCT/US2017/040510
申请日:2017-06-30
Applicant: INTEL CORPORATION , STRUTT, Nathan , WU, Stephen Y. , ASURI, Namrata S. , GLASSMAN, Timothy E. , GOLONZKA, Oleg , MUKHERJEE, Niloy , SEGHETE, Dragos , WIEGAND, Christopher J.
Inventor: STRUTT, Nathan , WU, Stephen Y. , ASURI, Namrata S. , GLASSMAN, Timothy E. , GOLONZKA, Oleg , MUKHERJEE, Niloy , SEGHETE, Dragos , WIEGAND, Christopher J.
IPC: H01L45/00
CPC classification number: H01L45/08 , H01L27/2436 , H01L45/1233 , H01L45/1253 , H01L45/146 , H01L45/16 , H01L45/1675
Abstract: An approach for integrating a resistive random access memory (RRAM) device on a dual bottom electrode layer is described. In an example, a resistive random access memory (RRAM) device includes a dual bottom electrode disposed above a substrate. The dual bottom electrode includes a first conductive layer disposed above a substrate, a second conductive layer disposed above the first conductive layer and an intermediate layer between the first conductive layer and the second conductive layer, where the intermediate layer includes oxygen. A switching layer is disposed on the dual bottom electrode layer. An oxygen exchange layer is disposed on the switching layer and a top electrode is disposed on the switching layer.
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66.
公开(公告)号:WO2019005156A1
公开(公告)日:2019-01-03
申请号:PCT/US2017/040493
申请日:2017-06-30
Applicant: INTEL CORPORATION , O'BRIEN, Kevin P. , OGUZ, Kaan , DOYLE, Brian S. , KUO, Charles C. , DOCZY, Mark L. , SURI, Satyarth , ATANASOV, Sarah
Inventor: O'BRIEN, Kevin P. , OGUZ, Kaan , DOYLE, Brian S. , KUO, Charles C. , DOCZY, Mark L. , SURI, Satyarth , ATANASOV, Sarah
CPC classification number: H01L43/08 , H01L27/228 , H01L43/10 , H01L43/12
Abstract: A spin orbit torque (SOT) memory device includes a spin orbit torque electrode disposed in a dielectric layer above a substrate and a magnetic tunnel junction (MTJ) device disposed on a portion of the spin orbit torque electrode. The spin orbit torque electrode has an uppermost is 10-20 times larger than the MTJ device. The MTJ device includes a free layer disposed on the spin orbit torque electrode, a tunnel barrier such as an MgO disposed on the free layer and a fixed layer disposed on the tunnel barrier.
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公开(公告)号:WO2019005114A1
公开(公告)日:2019-01-03
申请号:PCT/US2017/040328
申请日:2017-06-30
Applicant: INTEL CORPORATION , MA, Sean T. , DEWEY, Gilbert , RACHMADY, Willy , METZ, Matthew V. , HUANG, Cheng-Ying , KENNEL, Harold W. , KAVALIEROS, Jack T. , MURTHY, Anand S. , GHANI, Tahir
Inventor: MA, Sean T.
Abstract: An electronic device comprises a channel layer on a buffer layer on a substrate. The channel layer has a first portion and a second portion adjacent to the first portion. The first portion comprises a first semiconductor. The second portion comprises a second semiconductor that has a bandgap greater than a bandgap of the first semiconductor.
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68.
公开(公告)号:WO2019005020A1
公开(公告)日:2019-01-03
申请号:PCT/US2017/039597
申请日:2017-06-27
Applicant: INTEL CORPORATION
Inventor: EID, Feras , ALEKSOV, Aleksandar , DOGIAMIS, Georgios C. , SOUNART, Thomas L. , SWAN, Johanna
IPC: H01L23/58 , H01L23/14 , H01L23/485 , H01L49/02 , H01L41/08
Abstract: Embodiments of the invention include a microelectronic device that includes a plurality of organic dielectric layers and a piezoelectrically actuated tunable capacitor having a variable capacitance formed in-situ with at least one organic dielectric layer of the plurality of organic dielectric layers. A piezoelectric actuator of the tunable capacitor includes first and second conductive electrodes and a piezoelectric layer that is positioned between the first and second conductive electrodes.
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公开(公告)号:WO2018236357A1
公开(公告)日:2018-12-27
申请号:PCT/US2017/038383
申请日:2017-06-20
Applicant: INTEL CORPORATION , MAJHI, Prashant , DOYLE, Brian S. , SHARMA, Abhishek A. , KARPOV, Elijah V. , OGUZ, Kaan , O'BRIEN, Kevin P. , AHMED, Khaled
Inventor: MAJHI, Prashant , DOYLE, Brian S. , SHARMA, Abhishek A. , KARPOV, Elijah V. , OGUZ, Kaan , O'BRIEN, Kevin P. , AHMED, Khaled
IPC: H01L29/786 , H01L29/78 , H01L21/768 , H01L29/423
Abstract: Thin film transistors having relatively increased width are described. In an example, an integrated circuit structure includes an insulator structure above a substrate. The insulator structure has a topography that varies along a plane parallel with a global plane of the substrate. A semiconducting oxide material is on the insulator structure. The semiconducting oxide material is conformal with the topography of the insulator structure. A gate electrode is over a first portion of the semiconducting oxide material on the insulator structure. The gate electrode has a first side opposite a second side. A first conductive contact is adjacent the first side of the gate electrode. A second conductive contact is adjacent the second side of the gate electrode.
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70.
公开(公告)号:WO2018236354A1
公开(公告)日:2018-12-27
申请号:PCT/US2017/038379
申请日:2017-06-20
Applicant: INTEL CORPORATION , LIN, Kevin , SCHENKER, Richard E. , BRISTOL, Robert L. , KABIR, Nafees A. , VREELAND, Richard F.
Inventor: LIN, Kevin , SCHENKER, Richard E. , BRISTOL, Robert L. , KABIR, Nafees A. , VREELAND, Richard F.
IPC: H01L21/768
Abstract: Metal spacer-based approaches for conductive interconnect and via fabrication is described. In an example, an integrated circuit structure includes a plurality of alternating first and second conductive lines along a same direction of a back end of line (BEOL) metallization layer in an inter-layer dielectric (ILD) structure above a substrate. Each of the plurality of alternating first and second conductive lines is recessed relative to an uppermost surface of the ILD structure. The ILD structure includes a plurality of first and second ILD lines alternating with the alternating first and second conductive lines. A first hardmask component is on and aligned with the first conductive lines. A second hardmask component is on an aligned with the second conductive lines. A conductive via is in an opening in the first hardmask component and on one of the first conductive lines.
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