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    AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
    1.
    发明申请
    AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK 审中-公开

    公开(公告)号：WO2013022713A3

    公开(公告)日：2013-02-14

    申请号：PCT/US2012/049369

    申请日：2012-08-02

    Applicant: KLA-TENCOR CORPORATION ,  KREN, George ,  DOYLE, Paul ,  BELYAEV, Alexander

    Inventor： KREN, George ,  DOYLE, Paul ,  BELYAEV, Alexander

    IPC: H01L21/687 ,  H01L21/66

    Abstract: The present invention is directed to a high speed, spinning chuck for use in a semiconductor wafer inspection system. The chuck of the present disclosure is configured with a turbulence-reducing lip. Spinning of the chuck produces radial airflows proximal to a surface of the wafer and proximal to the bottom of the chuck. The turbulence-reducing lip of the chuck of the present disclosure directs the radial airflows off of the top surface of the wafer and the bottom surface of the chuck in a manner that minimizes the size of the low pressure zone formed between these radial airflows. The minimization of the low pressure zone reduces air turbulence about the periphery of the chuck and substrate, thereby reducing the possibility of contaminants in the system being directed onto the surface of the substrate by such air turbulence.

    CLEAVABLE CATALYTIC BINDING AND DETECTION SYSTEM
    2.
    发明申请
    CLEAVABLE CATALYTIC BINDING AND DETECTION SYSTEM 审中-公开
    可清洁的催化结合和检测系统

    公开(公告)号：WO2009154966A2

    公开(公告)日：2009-12-23

    申请号：PCT/US2009/045246

    申请日：2009-05-27

    Applicant: AGILENT TECHNOLOGIES, INC. ,  BELYAEV, Alexander ,  MONELL, Craig, R. ,  FELTS, Katherine, A.

    Inventor： BELYAEV, Alexander ,  MONELL, Craig, R. ,  FELTS, Katherine, A.

    IPC: G01N33/53

    CPC classification number: G01N33/581 ,  C07K16/00 ,  C07K2319/50 ,  C07K2319/61 ,  C12N9/1247

    Abstract: The present invention provides a detection reagent for detection of the presence of a substance of interest in a sample. The detection reagent comprises a binding portion, a linking portion, and a catalytic portion. The linking portion comprises a cleavage site for cleavage of the binding portion from the catalytic portion. According to the method, the detection reagent is caused to bind to the substance of interest. The bound reagent is then cleaved by breaking of a bond in the linking portion. Upon cleavage, the catalytic portion is removed from the binding reaction mixture and caused to catalyze a reaction that produces a detectable product.

    Abstract translation: 本发明提供了用于检测样品中感兴趣物质的存在的检测试剂。 检测试剂包括结合部分，连接部分和催化部分。 连接部分包括用于从催化部分切割结合部分的切割位点。 根据该方法，使检测试剂与感兴趣的物质结合。 然后通过断裂连接部分中的键将结合的试剂断裂。 在裂解时，将催化部分从结合反应混合物中除去并引起催化产生可检测产物的反应。

    ANALYTE DETECTION ASSAYS
    3.
    发明申请
    ANALYTE DETECTION ASSAYS 审中-公开

    公开(公告)号：WO2009012220A3

    公开(公告)日：2009-01-22

    申请号：PCT/US2008/069975

    申请日：2008-07-14

    Applicant: AGILENT TECHNOLOGIES INC. ,  BELYAEV, Alexander ,  MONELL, Craig ,  SORGE, Joseph

    Inventor： BELYAEV, Alexander ,  MONELL, Craig ,  SORGE, Joseph

    IPC: G01N33/543 ,  C12Q1/68

    Abstract: The present invention provides methods, kits and compositions for the detection of an analyte. In the methods of the invention, a binding molecule coupled to a first polymerase is incubated with a modified polynucleotide template to form a copy of the modified polynucleotide template without any modified nucleotides. The unmodified copy is detected in a second amplification/primer extension reaction using a second polymerase that is unable to amplify the modified polynucleotide template. Detection of the unmodified copy is indicative of the presence and/or amount of the analyte in the sample. In place of the binding molecule coupled to a first polymerase, a pair of analyte-specific probes can also be used. The first analyte specific probe comprises a first binding moiety and a first portion of a first polymerase and the second analyte specific probe comprises a second binding moiety and a second portion of the first polymerase. When the binding moieties are bound to the analyte the first and second portions of the polymerase interact to form a functional polymerase complex that is used to form a copy of the modified polynucleotide template without any modified nucleotides.

    METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WAFER OR FOR MONITORING A THERMAL PROCESS TOOL
    6.
    发明申请
    METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WAFER OR FOR MONITORING A THERMAL PROCESS TOOL 审中-公开
    用于检测形成在膜上的薄膜或用于监测热过程工具的方法和系统

    公开(公告)号：WO2007137261A2

    公开(公告)日：2007-11-29

    申请号：PCT/US2007069465

    申请日：2007-05-22

    Applicant: KLA TENCOR TECH CORP ,  CHEN DAVID K ,  STEINBACH ANDREW ,  KAVALDJIEV DANIEL ,  BELYAEV ALEXANDER ,  REICH JUERGEN

    Inventor： CHEN DAVID K ,  STEINBACH ANDREW ,  KAVALDJIEV DANIEL ,  BELYAEV ALEXANDER ,  REICH JUERGEN

    IPC: G01B9/02

    CPC classification number: G01N21/894 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4735 ,  G01N2021/8822 ,  G03F7/7065

    Abstract: Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool are provided. One method for detecting pinholes in a film formed on a wafer includes generating output responsive to light from the wafer using an inspection system. The output includes first output corresponding to defects on the wafer and second output that does not correspond to the defects. This method also includes detecting the pinholes in the film formed on the wafer using the second output. One method for monitoring a thermal process tool includes generating output responsive to light from a wafer using an inspection system. The output includes the first and second output described above. The wafer was processed by the thermal process tool prior to generating the output. The method also includes monitoring the thermal process tool using the second output.

    Abstract translation: 提供了用于检测在晶片上形成的膜中的针孔或用于监测热处理工具的方法和系统。 用于检测形成在晶片上的膜中的针孔的一种方法包括使用检查系统响应于来自晶片的光而产生输出。 输出包括对应于晶片上的缺陷的第一输出和不对应于缺陷的第二输出。 该方法还包括使用第二输出来检测在晶片上形成的膜中的针孔。 用于监测热处理工具的一种方法包括响应来自使用检查系统的晶片的光产生输出。 输出包括上述第一和第二输出。 在生成输出之前，通过热处理工具处理晶片。 该方法还包括使用第二输出来监测热处理工具。

    BINARY SIGNAL DETECTION ASSAYS
    8.
    发明申请
    BINARY SIGNAL DETECTION ASSAYS 审中-公开
    二进制信号检测测定

    公开(公告)号：WO2007044903A3

    公开(公告)日：2009-04-23

    申请号：PCT/US2006040088

    申请日：2006-10-11

    Applicant: STRATAGENE CALIFORNIA ,  SORGE JOSEPH A ,  CARSTENS CARSTEN-PETER ,  MONELL CRAIG ROBERT ,  BELYAEV ALEXANDER

    Inventor： SORGE JOSEPH A ,  CARSTENS CARSTEN-PETER ,  MONELL CRAIG ROBERT ,  BELYAEV ALEXANDER

    IPC: C12Q1/68

    CPC classification number: C12Q1/6816 ,  C12Q2565/201 ,  C12Q2521/301 ,  C12Q2521/337

    Abstract: The present invention provides methods, kits and compositions for the detection of an analyte. The invention is particularly suited for the detection and quantification of analytes in solution. In the methods of the invention a complex is formed between two or more analyte specific probes (ASP) and an analyte. The reactive moieties of the probes interact upon the binding of the analyte specific probes to the analyte. The reactive moieties generate a nucleic acid cleavage product which is detected and indicative of the presence of the analyte.

    Abstract translation: 本发明提供了用于检测分析物的方法，试剂盒和组合物。 本发明特别适用于溶液中分析物的检测和定量。 在本发明的方法中，在两种或多种分析物特异性探针（ASP）和分析物之间形成复合物。 探针的反应性部分在分析物特异性探针与分析物结合时相互作用。 反应性部分产生核酸切割产物，其被检测并指示分析物的存在。

    STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK
    10.
    发明申请
    STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK 审中-公开
    使用真空预紧空气轴承座稳定基板

    公开(公告)号：WO2008121561A1

    公开(公告)日：2008-10-09

    申请号：PCT/US2008/057539

    申请日：2008-03-19

    Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  BELYAEV, Alexander ,  WOLTERS, Christian H. ,  DOYLE, Paul Andrew ,  DANDO, Howard W. ,  VAEZ-IRAVANI, Mehdi

    Inventor： ZHAO, Guoheng ,  BELYAEV, Alexander ,  WOLTERS, Christian H. ,  DOYLE, Paul Andrew ,  DANDO, Howard W. ,  VAEZ-IRAVANI, Mehdi

    IPC: F16C32/06 ,  B21D53/10

    CPC classification number: B25B11/005 ,  F16C29/025 ,  F16C32/0603 ,  H01L21/67784 ,  H01L21/6838

    Abstract: Substrate processing method and apparatus are disclosed. The apparatus includes a chuck having a surface with one or more gas flow openings configured to provide a flow of gas to the surface. The surface includes one or more vacuum channels distributed across the surface. The vacuum channels permit vacuum to be drawn therethrough. In the method a substrate may be supported proximate the chuck surface with a back surface of the substrate sufficiently close to the chuck surface that a flow of gas and vacuum can maintain the substrate back surface and the chuck surface in a spaced-apart relationship. Gas flow is provided to the chuck surface through the gas flow openings and vacuum is drawn through one or more vacuum channels. The substrate is moved along a direction substantially perpendicular to the surface of the substrate.

    Abstract translation: 公开了基板处理方法和装置。 该装置包括具有一个表面的卡盘，该表面具有一个或多个气体流动开口，该气体流动开口被配置为向表面提供气体流。 表面包括分布在表面上的一个或多个真空通道。 真空通道允许真空从中抽出。 在该方法中，衬底可以靠近卡盘表面支撑，衬底的后表面足够靠近卡盘表面，气体和真空流可以以间隔的关系保持衬底背面和卡盘表面。 通过气体流动开口将气流提供给卡盘表面，并通过一个或多个真空通道抽真空。 衬底沿着基本上垂直于衬底表面的方向移动。

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