公开(公告)号：WO2012054145A1

公开(公告)日：2012-04-26

申请号：PCT/US2011/050566

申请日：2011-09-06

Applicant: CYMER, INC. ,  HOU, Kai-chung ,  SANDSTROM, Richard, L. ,  PARTLO, William, N. ,  BROWN, Daniel, J.w. ,  FOMENKOV, Ifor, V.

Inventor： HOU, Kai-chung ,  SANDSTROM, Richard, L. ,  PARTLO, William, N. ,  BROWN, Daniel, J.w. ,  FOMENKOV, Ifor, V.

IPC: H01S3/00

CPC classification number: H01S3/117 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0064 ,  H01S3/076 ,  H01S3/0812 ,  H01S3/2232 ,  H01S3/2383 ,  H05G2/005 ,  H05G2/008

Abstract: As disclosed herein, in a first aspect, a device may comprise; an oscillator producing a light output on a beam path; a target material for interaction with Light on the beam path at an irradiation site; a beam delay on the beam path the beam delay haying a beam folding optical arrangement; and a switch positioned along the beam, path and Interposed between the oscillator and the beam delay; the switch closable to divert at. least a portion of light on the beam path from the beam path, the switch having close time, t 1 and the beam path having a Length, L 1 . along the path from the switch to the irradiation site; with t 1 1 , where e is the speed of light on the path, to protect the oscillator.

Abstract translation: 如本文所公开的，在第一方面中，一种装置可以包括： 在光束路径上产生光输出的振荡器; 用于在照射部位的光束路径上与光相互作用的目标材料; 在光束路径上的波束延迟，波束延迟具有光束折叠光学布置; 和沿着光束路径定位的开关，并且介于振荡器和光束延迟之间; 开关可以转向。 来自光束路径的光束路径上的光的至少一部分，开关具有接近的时间t1，并且光束路径具有长度L1。 沿着从切换到照射场所的路径; 与t1 1，其中e是路径上的光速，以保护振荡器。

公开(公告)号：WO2011162903A1

公开(公告)日：2011-12-29

申请号：PCT/US2011/037793

申请日：2011-05-24

Applicant: CYMER, INC. ,  HOU, Kai-chung ,  SANDSTROM, Richard, L ,  PARTLO, William, N. ,  BROWN, Daniel, J.W. ,  FOMENKOV, Igor, V.

Inventor： HOU, Kai-chung ,  SANDSTROM, Richard, L ,  PARTLO, William, N. ,  BROWN, Daniel, J.W. ,  FOMENKOV, Igor, V.

IPC: H01S3/00

CPC classification number: H01S3/0078 ,  G03F7/70033 ,  G03F7/70175 ,  G03F7/70908 ,  G03F7/70933 ,  H01S3/076 ,  H01S3/1055 ,  H01S3/117 ,  H01S3/2232 ,  H05G2/008

Abstract: A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ 1 and λ 2 , with λ 1 ≠ λ 2 ; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ 1 ; a main pulse seed laser generating a laser output having wavelength, λ 2 ; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Abstract translation: 本文描述了一种可以包括具有包括波长λ1和λ2的增益带的光放大器的装置， ？2; 具有用于将预脉冲输出调谐到波长λ1的调谐模块的预脉冲种子激光器; 产生具有波长λ2的激光输出的主脉冲种子激光器; 以及用于将预脉冲输出和主脉冲输出引导到通过光放大器的公共路径上的光束组合器。

公开(公告)号：WO2012050685A1

公开(公告)日：2012-04-19

申请号：PCT/US2011/050565

申请日：2011-09-06

Applicant: CYMER, INC. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  BROWN, Daniel, J.w. ,  FOMENKOV, Igor, V.

Inventor： PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  BROWN, Daniel, J.w. ,  FOMENKOV, Igor, V.

IPC: A61N5/06

CPC classification number: G21K5/00 ,  G03F7/70033 ,  H01S3/117 ,  H01S3/2232 ,  H01S3/2308 ,  H05G2/008

Abstract: A device is disclosed, herein which may comprise a droplet generator producing droplets of target material; a sensor providing an. intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the. intercept time signal; a. laser source responsive to a trigger signal to produce a laser pulse-; and a system controlling said delay circuit to provide a. trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light -pulse which is not focused on a droplet.

Abstract translation: 本文公开了一种装置，其可以包括产生目标材料的液滴的液滴发生器; 传感器提供。 当液滴到达预选位置时截获时间信号; 与所述传感器耦合的延迟电路，所述延迟电路产生从所述传感器延迟的触发信号。 拦截时间信号; 一个。 激光源响应于触发信号以产生激光脉冲; 以及控制所述延迟电路以提供a的系统。 触发信号从截取时间延迟第一延迟时间，以产生聚焦在液滴上的光脉冲和从截取时间延迟第二延迟时间的触发信号，以产生不聚焦在液滴上的光脉冲 。

公开(公告)号：WO2007053335A2

公开(公告)日：2007-05-10

申请号：PCT/US2006/041107

申请日：2006-10-20

Applicant: CYMER, INC. ,  ERSHOV, Alexander, I. ,  PARTLO, William, N. ,  BROWN, Daniel, J.W. ,  FOMENKOV, Igor, V. ,  BERGSTEDT, Robert, A. ,  SANDSTROM, Richard, L. ,  LALOVIC, Ivan

Inventor： ERSHOV, Alexander, I. ,  PARTLO, William, N. ,  BROWN, Daniel, J.W. ,  FOMENKOV, Igor, V. ,  BERGSTEDT, Robert, A. ,  SANDSTROM, Richard, L. ,  LALOVIC, Ivan

IPC: G11C8/00

CPC classification number: H01S3/225 ,  G03F7/70583 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/03 ,  H01S3/034 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/10092 ,  H01S3/105 ,  H01S3/2251 ,  H01S3/2333

Abstract: A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage wherein the output of the seed laser oscillator passes through the amplifying gain medium of the ring power amplification stage at least two times per loop.

Abstract translation: 一种方法和装置可以包括线变窄的脉冲准分子或分子氟气放电激光系统，其可以包括种子激光振荡器，其产生包括可以包括第一气体放电准分子或分子氟激光室的脉冲的激光输出光束的输出; 第一振荡器腔内的线窄模块; 在第二气体放电准分子或分子氟激光室中包含放大增益介质的激光放大级，其接收种子激光振荡器的输出并放大种子激光振荡器的输出，以形成激光系统输出，该激光系统输出包括：激光输出光束 脉冲，其可以包括环形功率放大级，其中种子激光振荡器的输出通过环形功率放大级的放大增益介质至少每循环两次。

公开(公告)号：WO2007021406A3

公开(公告)日：2007-02-22

申请号：PCT/US2006/027015

申请日：2006-07-12

Applicant: CYMER, INC. ,  JACQUES, Robert, N. ,  PARTLO, William, M. ,  BROWN, Daniel, J.W.

Inventor： JACQUES, Robert, N. ,  PARTLO, William, M. ,  BROWN, Daniel, J.W.

IPC: H01S3/22 ,  H01S3/097

Abstract: A method and apparatus are disclosed for controlling bandwidth in a multi- portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first' laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset.