METHOD OF DETERMINING OVERLAY ERROR
    1.
    发明申请
    METHOD OF DETERMINING OVERLAY ERROR 审中-公开
    确定重叠错误的方法

    公开(公告)号:WO2010130516A1

    公开(公告)日:2010-11-18

    申请号:PCT/EP2010/054820

    申请日:2010-04-13

    CPC classification number: G03F7/70633

    Abstract: A method of determining an overlay error in which asymmetry of a first order of a diffraction pattern is modeled as being a weighted sum of harmonics. Both the first order harmonic and higher order harmonics are non-negligible and weights for both are calculated. The weights are calculated using three or more of sets of superimposed patterns using a least mean square method.

    Abstract translation: 一种确定重叠误差的方法,其中衍射图案的一阶的不对称性被建模为加权和谐和。 一阶谐波和高次谐波都不可忽略,两者的权重都被计算出来。 使用最小均方法,使用三个或更多个叠加图案来计算权重。

    BREATH COLLECTION DEVICE AND METHOD
    2.
    发明申请
    BREATH COLLECTION DEVICE AND METHOD 审中-公开
    肠道收集装置和方法

    公开(公告)号:WO2009147576A3

    公开(公告)日:2010-05-14

    申请号:PCT/IB2009052219

    申请日:2009-05-27

    CPC classification number: A61B5/097

    Abstract: The present invention relates to a simple, efficient and accurate breath collection device and a corresponding method for collecting the breath of a patient for analysis. The device comprises a gas mixture container (1) containing a gas mixture for inhalation by the patient, and a breathing unit (2) containing an inlet (21) connected to said gas mixture container (1) for letting in gas from the gas mixture container (1), an outlet (22) for letting out gas exhaled by the patientand a breathing element (23) for inhaling gas from the inlet (21) and exhaling gas to the outlet (22). The gas mixture container (1) contains a gas mixture containing a predetermined set of volatile organic compounds (VOC) markers.

    Abstract translation: 本发明涉及一种简单,有效和准确的呼吸收集装置和用于收集患者呼吸以进行分析的相应方法。 所述装置包括含有用于由患者吸入的气体混合物的气体混合物容器(1)和包含连接到所述气体混合物容器(1)的入口(21)的呼吸单元(2),用于从气体混合物 容器(1),用于排出患者呼出的气体的出口(22)和用于从入口(21)吸入气体的呼吸元件(23)并将气体排出到出口(22)。 气体混合容器(1)含有含有预定的挥发性有机化合物(VOC)标记物的气体混合物。

    A SUBSTRATE, AN INSPECTION APPARATUS, AND A LITHOGRAPHIC APPARATUS
    3.
    发明申请
    A SUBSTRATE, AN INSPECTION APPARATUS, AND A LITHOGRAPHIC APPARATUS 审中-公开
    基板,检查装置和平面设备

    公开(公告)号:WO2010025950A1

    公开(公告)日:2010-03-11

    申请号:PCT/EP2009/006473

    申请日:2009-09-07

    CPC classification number: G03F7/70683 G03F7/70625 G03F7/70633 Y10T428/24802

    Abstract: A target for measuring an overlay error or a critical dimension of a substrate comprises a grating. In one example, lines of the grating are arranged at an angle of about 45° with respect to edges of the target. As a consequence, the diffraction order of the grating reflection has its sub-maxima not aligned along the line on which the other diffraction orders are positioned, and overlap of intensity with other diffraction orders is reduced

    Abstract translation: 用于测量衬底的重叠误差或临界尺寸的目标包括光栅。 在一个示例中,光栅的线相对于目标的边缘以约45°的角度布置。 因此,光栅反射的衍射级具有其沿着其它衍射级所在的线不对准的亚极大值,并且强度与其它衍射级的重叠减少

    GRID PATTERN DETERMINATION SYSTEM
    4.
    发明申请
    GRID PATTERN DETERMINATION SYSTEM 审中-公开
    网格图案确定系统

    公开(公告)号:WO2008104922A1

    公开(公告)日:2008-09-04

    申请号:PCT/IB2008/050669

    申请日:2008-02-25

    Abstract: An apparatus (195) for retrieving a grid pattern of a plurality of spots (113, 114) on a substrate (111) of a sensor carrier (110), wherein the plurality of spots (113, 114) comprise a plurality of reference spots (113) arranged for identifying the grid pattern based on an image of at least the plurality of reference spots (113, 114), the apparatus (195) comprising a first determination unit (163) adapted for performing a coarse gridding procedure for determining coarse information regarding the grid pattern based on an analysis of the image of the plurality of reference spots (113), and a second determination unit (165) adapted for performing a fine gridding procedure for determining the grid pattern based on the determined coarse information regarding the grid pattern.

    Abstract translation: 一种用于检索传感器载体(110)的衬底(111)上的多个点(113,114)的网格图案的装置(195),其中所述多个点(113,114)包括多个参考点 (113),被布置为基于至少所述多个参考点(113,114)的图像来识别所述网格图案,所述设备(195)包括第一确定单元(163),所述第一确定单元(163)适于执行用于确定粗略的粗网格化过程 基于对多个参考点(113)的图像的分析的关于网格图案的信息,以及第二确定单元(165),其适于基于所确定的粗略信息来执行用于确定网格图案的精细网格化过程 网格图案。

    IDENTIFICATION SYSTEM
    5.
    发明申请
    IDENTIFICATION SYSTEM 审中-公开
    识别系统

    公开(公告)号:WO2008096318A2

    公开(公告)日:2008-08-14

    申请号:PCT/IB2008050424

    申请日:2008-02-06

    CPC classification number: G01N21/6452 G01N21/278 G01N2021/6441

    Abstract: A two-dimensional sensor array or sensor carrier (110), comprising a substrate (111) and a plurality of spots (113, 114) formed on the substrate (111), wherein the plurality of spots (113, 114) comprise at least one reference spot (113) arranged for encoding identification information for identification of said two- dimensional sensor-array.

    Abstract translation: 一种二维传感器阵列或传感器载体(110),包括衬底(111)和形成在所述衬底(111)上的多个点(113,114),其中所述多个点(113,114)至少包括 一个参考点(113),其被设置用于对用于识别所述二维传感器阵列的识别信息进行编码。

    OPTICAL DISC DRIVE AND METHOD FOR PREPROCESSING A DISC READ OUT SIGNAL
    6.
    发明申请
    OPTICAL DISC DRIVE AND METHOD FOR PREPROCESSING A DISC READ OUT SIGNAL 审中-公开
    光盘驱动器和用于预处理光盘读出信号的方法

    公开(公告)号:WO2008044169A2

    公开(公告)日:2008-04-17

    申请号:PCT/IB2007/054028

    申请日:2007-10-04

    Abstract: The present invention discloses an optical drive and a method for preprocessing a disc readout signal r k of an optical drive on the basis of a set of low-pass filters. The cutoff frequency f c of the filters wk, more particularly, can be set within the optical bandwidth, which improves the Viterbi detection performance in the case of high speed drive operations. Three types of filters are described, in which a Type I shaping filter performs best given a limited hardware cost for the bit detector. Compared to other more advanced noise- whitening techniques, it is only speed dependent and requires little prior knowledge of the channel and noise, thus cheap and easy to design. The invention can be applied in connection with optical disc drives, in particular when high frequency noises are dominant, for example, in the case of high speed operations.

    Abstract translation: 本发明公开了一种用于基于一组低通滤波器来预处理光盘驱动器的盘读出信号的光驱动器和方法。 滤波器wk的截止频率f c c可以在光学带宽内设置,这提高了在高速驱动操作的情况下的维特比检测性能。 描述了三种类型的滤波器,其中在给定位检测器的有限硬件成本的情况下,I型整形滤波器性能最佳。 与其他更先进的噪声美白技术相比,它只是速度依赖性,并且对通道和噪声几乎没有先前的了解,因此便宜且易于设计。 本发明可以与光盘驱动器结合使用,特别是当高频噪声占主导地位时,例如在高速操作的情况下。

    A READING DEVICE FOR A RECORD CARRIER
    7.
    发明申请
    A READING DEVICE FOR A RECORD CARRIER 审中-公开
    用于记录载体的读取装置

    公开(公告)号:WO2006067696A3

    公开(公告)日:2007-02-22

    申请号:PCT/IB2005054258

    申请日:2005-12-15

    CPC classification number: G11B7/1369 G11B7/1353 G11B7/14

    Abstract: The invention provides an efficient reading device in which, even if one radiation beam should fail, no information is lost and the information can still be read out without time-consuming recurring operations. The present invention solves this problem by providing a reading device (Fig. 5A) and a means (Fig. 4) for forming read-out spots (A, B, C, D, E) that are built up by multiple radiation beams from the radiation source (4). This has the advantage that each read-out spot will have energy contributions from different radiation beams and, should one radiation beam break down, the intensity of some of the read-out spots may indeed diminish, but the information can still be read out thanks to the contributions from other radiation beams.

    Abstract translation: 本发明提供了一种有效的读取装置,其中即使一个辐射束发生故障,也不会丢失任何信息,并且仍然可以读出信息而不需要耗费时间的循环操作。 本发明通过提供一种用于形成由多个辐射束构成的读出点(A,B,C,D,E)的读取装置(图5A)和装置(图4)来解决这个问题, 辐射源(4)。 这具有的优点是,每个读出的点将具有来自不同辐射束的能量贡献,并且如果一个辐射束分解,一些读出点的强度可能确实减小,但是仍然可以读出信息 对其他辐射束的贡献。

    DEVICE AND METHOD FOR ENCODING A SECONDARY INFORMATION OF A SECONDARY CHANNEL INTO A CHANNEL DATA STREAM OF A PRIMARY CHANNEL
    9.
    发明申请
    DEVICE AND METHOD FOR ENCODING A SECONDARY INFORMATION OF A SECONDARY CHANNEL INTO A CHANNEL DATA STREAM OF A PRIMARY CHANNEL 审中-公开
    将二级信道的二次信息编码到主信道的信道数据流中的装置和方法

    公开(公告)号:WO2005104120A3

    公开(公告)日:2006-02-16

    申请号:PCT/IB2005051270

    申请日:2005-04-19

    CPC classification number: G11B20/00086 G11B2020/1249

    Abstract: The present invention relates to a device in a corresponding method for encoding a secondary information (r) of a secondary channel into a channel data stream (3) of a primary channel, said channel data stream (3) comprising at least two symbol rows of channel symbols one-dimensionally evolving along a first direction (t) and aligned with each other along a second direction (r), said two directions constituting a two-dimensional lattice of symbol positions. To provide a device and a method for encoding which can be used in a two-dimensional storage system, it is proposed that the device comprises: - a primary encoder (11) for encoding a primary information (1) into said primary channel data stream (3) of said primary channel, - a secondary encoder (12) for encoding said secondary information (2) into a secondary channel data stream (6) for embedding into the recorded signal of said primary channel data stream (3) and - a parameter modulation means (13) for varying a recording parameter (7) for one or more symbol rows based on said secondary information around an average value (9) using a variation parameter (5), said recording parameter (7) being used for recording said primary channel data stream (3) on a record carrier (21), said variations being made such that said average value (9) remains substantially constant and that said modulations can be detected by a decoding device, said secondary information being encoded into said variations.

    Abstract translation: 本发明涉及用于将辅助信道的辅助信息(r)编码为主信道的信道数据流(3)的相应方法中的装置,所述信道数据流(3)包括至少两个符号行 通道符号沿着第一方向(t)一维地演变并沿着第二方向(r)彼此对准,所述两个方向构成符号位置的二维网格。 为了提供可以在二维存储系统中使用的编码装置和方法,提出该装置包括:主编码器(11),用于将主信息(1)编码成所述主信道数据流 (3), - 用于将所述辅助信息(2)编码为辅助信道数据流(6)的次级编码器(12),用于嵌入到所述主信道数据流(3)的记录信号中, - 参数调制装置(13),用于使用变化参数(5)基于围绕平均值(9)的所述辅助信息来改变用于一个或多个符号行的记录参数(7),所述记录参数(7)用于记录 所述主信道数据流(3)在记录载体(21)上,所述变化使得所述平均值(9)保持基本上恒定,并且所述调制可由解码装置检测,所述次信息被编码到所述 变异 秒。

    DC-CONTROLLED ENCODING FOR OPTICAL STORAGE SYSTEM
    10.
    发明申请
    DC-CONTROLLED ENCODING FOR OPTICAL STORAGE SYSTEM 审中-公开
    用于光存储系统的直流控制编码

    公开(公告)号:WO2005101404A1

    公开(公告)日:2005-10-27

    申请号:PCT/IB2005/051158

    申请日:2005-04-08

    Abstract: A loss of performance of slicer adaptation at high capacities due to the mismatch between the exact bits used in the computation of the RDS for the DC-control on the one hand and the often erroneous threshold decisions that are preliminarily made based on the HF waveform on the other hand, is resolved by performing a new method of DC­- control at the encoder: the RDS is modified such that it is not based on the exact channel bits, but on the threshold decisions from a synthetic HF signal waveform that is generated based on a nominal MTF (modulation transfer function) or its IRF (impulse response function) of the channel. In this way, the impact of the erroneous threshold decisions in the receiver are already taken into account at the encoder, and the slicer control is no longer negatively affected thereby.

    Abstract translation: 由于用于直流控制的RDS的计算中使用的精确位与一般基于HF波形预先进行的错误阈值判定之间的不匹配,导致高容量的限幅器适应性能丧失 另一方面,通过在编码器处执行DC控制的新方法来解决:RDS被修改为使得其不基于确切的信道位,而是基于从基于生成的合成HF信号波形的阈值决定 在标称MTF(调制传递函数)或其IRF(脉冲响应函数)的信道上。 以这种方式,在编码器处已经考虑了接收器中的错误阈值判定的影响,并且限幅器控制不再受到负面影响。

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