公开(公告)号：WO2009023484A3

公开(公告)日：2009-07-02

申请号：PCT/US2008072266

申请日：2008-08-06

Applicant: HONEYWELL INT INC ,  LU SON T ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A

Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A

IPC: G01F1/68 ,  B32B27/34 ,  B81B7/00 ,  B81C1/00

CPC classification number: G01F1/6845 ,  G01F1/6842 ,  Y10T29/49002

Abstract: A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.

Abstract translation: 流量传感器系统及其制造方法。 提供衬底，包括其上形成流量传感器的检测器晶片。 然后可以将一个或多个壳体配置在其壁形成流动通道的基底上。 流动通道以允许流动通道将热量传递直接耦合到流量传感器的方式直接在基底上制造，以便在流量传感器制造期间不需要两种或更多种不同类型的牺牲层 衬底，并且其中壳体与流体测量耦合以提供流量传感器。

公开(公告)号：WO2008089121A3

公开(公告)日：2008-12-18

申请号：PCT/US2008050963

申请日：2008-01-14

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E

Inventor： HIGASHI ROBERT E

IPC: G01L21/10 ,  G01L11/00

CPC classification number: G01L21/10 ,  G01L11/002

Abstract: A system for determining a gas pressure or gauging a vacuum in a hermetically sealed enclosure. One or more heater structures and one or more temperature sensor structures situated on a substrate may be used in conjunction for measuring a thermal conductivity of a gas in the enclosure. Each heater has significant thermal isolation from each sensor structure. Electronics connected to each heater and sensor of their respective structures may provide processing to calculate the pressure or vacuum in the enclosure. The enclosure may contain various electronic components such as bolometers.

Abstract translation: 用于确定气密压力或测量密封外壳中的真空的系统。 位于基底上的一个或多个加热器结构和一个或多个温度传感器结构可以联合使用以测量外壳中的气体的热导率。 每个加热器都与每个传感器结构有很大的热隔离。 连接到各个结构的每个加热器和传感器的电子设备可以提供处理以计算外壳中的压力或真空。 外壳可能含有各种电子元件，如辐射热测量计。

公开(公告)号：WO2007070336A3

公开(公告)日：2007-06-21

申请号：PCT/US2006/046715

申请日：2006-12-07

Applicant: HONEYWELL INTERNATIONAL INC. ,  COLE, Berrett, E. ,  HIGASHI, Robert, E. ,  BARTELS, James ,  PLANER, Norm ,  SWENSON, Gregg

Inventor： COLE, Berrett, E. ,  HIGASHI, Robert, E. ,  BARTELS, James ,  PLANER, Norm ,  SWENSON, Gregg

IPC: G01J1/42 ,  H01J47/00

Abstract: A light detector (11) having spaced electrodes (15, 16) preset by pins (18, 19) or a spacer within a sealed enclosure (12) . The detector may have a MEMS structure that is separate from the sealing of the enclosure. Further, the detector may have a lens (14) for the transmission of light onto the elements. The lens may be coated to affect the amount of light admitted into the enclosure. Light detectable by the sensor may be ultra-violet.

公开(公告)号：WO2005067047A3

公开(公告)日：2006-01-05

申请号：PCT/US2004042583

申请日：2004-12-08

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

IPC: G01J5/20 ,  G02B5/28 ,  H01L27/00 ,  H01L27/146 ,  H01L31/0203 ,  H01L31/0216

CPC classification number: G01J5/20 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14649 ,  H01L27/16 ,  H01L31/0203 ,  H01L31/02162 ,  H01L2924/0002 ,  Y10T428/24355 ,  H01L2924/00

Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.

Abstract translation: 在两片晶片之间的接合密封的周边周边上具有相加体积的集成真空包装。 增加的空间体积可以是从顶部晶片的内表面蚀刻材料。 该晶片可以具有通气孔，其可以在泵离开气体和空气之后被密封以将真空保持在两个晶片之间的体积内。 顶部晶片的内表面可以具有抗反射图案。 此外，抗反射图案可以在顶部晶片的外表面上。 两个晶片之间的密封可以是环状的并且具有间隔物材料。 此外，它可以具有可延展的材料，例如焊料，以补偿晶片的两个相对表面之间的任何平坦度变化。

公开(公告)号：WO2008100838A3

公开(公告)日：2009-01-08

申请号：PCT/US2008053538

申请日：2008-02-11

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E

Inventor： HIGASHI ROBERT E

IPC: B81B3/00

CPC classification number: B81B3/0081 ,  B01L3/5027 ,  B01L3/502707 ,  B01L2200/14 ,  B01L2300/0627 ,  B01L2300/0816 ,  B01L2300/1827 ,  B81B2201/051 ,  B81B2201/058 ,  G01N30/6095 ,  G01N2030/025

Abstract: Embodiments of the invention relate to a fluid containment structure for a micro analyzer comprising one or more shelled thermal structures in contact with a thermally isolated component of the analyzer and wherein the shelled thermal structure comprises a conformal film and also comprises three walls of a channel and the thermally isolated component forms the fourth wall.

Abstract translation: 本发明的实施例涉及一种用于微分析器的流体容纳结构，其包括与分析仪的热隔离部件接触的一个或多个外壳热结构，并且其中所述带壳热结构包括保形膜，并且还包括三个通道壁和 热隔离部件形成第四壁。

公开(公告)号：WO2007025100A2

公开(公告)日：2007-03-01

申请号：PCT/US2006/033173

申请日：2006-08-25

Applicant: HONEYWELL INTERNATIONAL INC. ,  GU, Yuandong ,  COLE, Barrett, L. ,  HIGASHI, Robert, E.

Inventor： GU, Yuandong ,  COLE, Barrett, L. ,  HIGASHI, Robert, E.

IPC: G01N25/48 ,  G01N33/00

CPC classification number: G01N25/4846 ,  G01N33/004 ,  Y02A50/244

Abstract: A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating. Methods of sensing carbon dioxide and humidity are also disclosed.

Abstract translation: 气体传感器用于检测气体样品中的一种或多种气体。 气体传感器包括基板，包括用于感测二氧化碳的氧化镧的固体电解质层，与固体电解质层热耦合的加热元件，以及耦合到加热元件和固体电解质层的控制器。 控制器加热加热元件使得固体电解质层达到操作。 还公开了检测二氧化碳和湿度​​的方法。

公开(公告)号：WO2007025001A1

公开(公告)日：2007-03-01

申请号：PCT/US2006/033001

申请日：2006-08-23

Applicant: HONEYWELL INTERNATIONAL INC. ,  HIGASHI, Robert, E. ,  SATREN, Ernest, A.

Inventor： HIGASHI, Robert, E. ,  SATREN, Ernest, A.

IPC: G01F1/684

CPC classification number: G01F1/6845 ,  G01F1/6847 ,  H01L2224/81801 ,  Y10T29/49004

Abstract: A method of thermally coupling a flow tube or like component to a thermal sensor comprises bonding the component to the thermal sensor such that thermally conductive portions formed on the component are thermally coupled to corresponding sensing/heating elements disposed on the thermal sensor. The method can be employed to form a capillary mass flow sensor system. Thermally conductive portions, such as metal bands, can be formed on the outer surface of a capillary tube for bonding with corresponding resistive heat sensing and heating elements disposed on the substrate of a micro mass flow sensor. Bonding metal pads can be formed on the sensor surface preparatory to solder bonding the tube metal bands to the resistive sensing and heating elements.

Abstract translation: 将流管或类似部件热耦合到热传感器的方法包括将部件接合到热传感器，使得形成在部件上的导热部分热耦合到布置在热传感器上的对应的感测/加热元件。 该方法可用于形成毛细管质量流量传感器系统。 可以在毛细管的外表面上形成诸如金属带的导热部分，以与布置在微质量流量传感器的基底上的相应的电阻式热感测和加热元件接合。 粘结金属焊盘可以形成在传感器表面上，准备将管金属带焊接到电阻感测和加热元件。

公开(公告)号：WO2005071715A3

公开(公告)日：2005-09-22

申请号：PCT/US2004042270

申请日：2004-12-15

Applicant: HONEYWELL INT INC ,  BARETT COLE E ,  HIGASHI ROBERT E

Inventor： BARETT COLE E ,  HIGASHI ROBERT E

IPC: C01B31/02 ,  C30B29/60 ,  H01L21/00

CPC classification number: C30B29/605 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/742 ,  Y10T428/30

Abstract: A structure having a substrate, patterned metal layer and a catalyst island formed on the metal layer. The surface of the substrate upon which the metal layer is formed may be oxidized. As an illustrative example, the metal may be HfN and the catalyst island may be iron, nickel, or the like. The resulting structure may be placed in an environment having a carbon-containing gas, a temperature between 500 and 1200 degrees C, and an electric field. A nanotube may grow from the catalyst island. A method including the combining of hafnium and nitrogen may be used to make the nanotube growing structure.

Abstract translation: 具有形成在金属层上的基板，图案化金属层和催化剂岛的结构。 形成有金属层的基板的表面可能被氧化。 作为说明性实例，金属可以是HfN，催化剂岛可以是铁，镍等。 所得结构可以放置在具有含碳气体，温度在500至1200℃之间的电场和电场中。 纳米管可以从催化剂岛生长。 可以使用包括铪和氮的组合的方法来制造纳米管生长结构。

公开(公告)号：WO2005067084A3

公开(公告)日：2005-09-15

申请号：PCT/US2004042798

申请日：2004-12-08

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E ,  WOOD ROLAND A ,  REZACHEK TOM M ,  NWESTROM-PEITSO KAREN M ,  NGUYEN KHAH Q

Inventor： HIGASHI ROBERT E ,  WOOD ROLAND A ,  REZACHEK TOM M ,  NWESTROM-PEITSO KAREN M ,  NGUYEN KHAH Q

IPC: H01M8/00 ,  H01M8/02 ,  H01M8/04 ,  H01M8/10 ,  H01M8/24

CPC classification number: H01M8/1023 ,  H01M8/0247 ,  H01M8/04089 ,  H01M8/1004 ,  H01M8/1011 ,  H01M8/1039 ,  H01M8/241 ,  H01M2250/30 ,  Y02B90/18 ,  Y02E60/523 ,  Y10T156/1056 ,  Y10T156/1062

Abstract: A fuel cell, fuel cell array and methods of forming the same are disclosed. The fuel cell can be made by forming a first aperture defined by a first aperture surface through a first electrode layer and forming a second aperture defined by a second aperture surface through a second electrode layer. A proton exchange membrane is laminated between the first electrode layer and the second electrode layer. At least a portion of the first aperture is at least partially aligned with the second aperture.

Abstract translation: 公开了一种燃料电池，燃料电池阵列及其形成方法。 燃料电池可以通过形成由第一孔表面限定的第一孔通过第一电极层并形成通过第二电极层由第二孔表面限定的第二孔制成。 质子交换膜层压在第一电极层和第二电极层之间。 第一孔的至少一部分至少部分地与第二孔对准。

公开(公告)号：WO2007143464A3

公开(公告)日：2008-12-04

申请号：PCT/US2007069939

申请日：2007-05-30

Applicant: HONEYWELL INT INC ,  WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

Inventor： WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

IPC: G01J3/42

CPC classification number: G01J5/12 ,  G01J3/42 ,  G01J3/4532 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/40 ,  G01J2005/0077

Abstract: A radiation sensor (200) that can operate in the THz regime comprising: a micro antenna (206), which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining. of a silicon wafer; a thermally isolated microstructure (215); a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

Abstract translation: 一种能够以太赫兹状态工作的辐射传感器（200），包括：微天线（206），其可以包括通过微加工制造的薄介电薄膜上的二维图案化薄膜金属化。 的硅晶片; 热分离微结构（215）; 用于将来自微天线的能量耦合到微结构的耦合机构，所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。