Abstract:
According to one embodiment of the present invention, equipment for manufacturing a semiconductor comprises: a cleansing chamber in which a cleansing of a substrate takes place; an epitaxial chamber in which an epitaxial process of forming an epitaxial layer on the substrate takes place; and a transfer chamber, to a side of which the cleansing chamber and the epitaxial chamber are connected, comprising a substrate handler for transferring the substrate of which the cleansing process is completed to the epitaxial chamber, wherein the cleansing chamber is an arrangement type which is performed with respect to a plurality of substrates.
Abstract:
According to one embodiment of the present invention, equipment for manufacturing a semiconductor comprises: a cleansing chamber in which a cleansing of a substrate takes place; an epitaxial chamber in which an epitaxial process of forming an epitaxial layer on the substrate takes place; and a transfer chamber, to a side of which the cleansing chamber and the epitaxial chamber are connected, comprising a substrate handler for transferring the substrate of which the cleansing process is completed to the epitaxial chamber, wherein the cleansing chamber comprises a reaction chamber, which is connected to a side of the transfer chamber and in which a reaction process with respect to the substrate takes place, and a heating chamber, which is connected to the side of the transfer chamber and in which a heating process with respect to the substrate takes place, wherein the reaction chamber and the heating chamber are loaded vertically.
Abstract:
Disclosed herein is an apparatus for generating hydrogen by steam reforming. The apparatus comprises: a casing having provided in the central portion thereof a combustion section for producing high-temperature reaction heat; a flame guide provided such that it forms the outer wall of the combustion section while a space is provided outside thereof; a plurality of catalytic tubes arranged concentrically with respect to the combustion section in the space outside the flame guide; a feed supply manifold disposed at one side of the inside of the casing so as to distribute a feed supplied from the outside of the apparatus to each of the catalytic tubes; a reformate manifold connected with one end of each of the catalytic tubes so as to discharge a reformate obtained by the reforming reaction to the outside of the apparatus; and a support member which consists of an inner ring plate formed at one side of the inside of the casing and an outer ring plate disposed concentrically around the outer circumference of the inner ring plate and which has formed at the boundary between the inner and outer ring plates tube holes into which one end of each of the catalytic tubes is inserted. In the hydrogen generating apparatus, the structure of the support member supporting the plurality of catalytic tubes is simply divided into the inner ring plate and the outer ring plate, such that the expansion and shrinkage of the support member by thermal stress can be efficiently compensated for. As a result, deformation and breakdown of the support member caused by thermal stress can be prevented, thus improving the overall durability and stability of the hydrogen generating apparatus.
Abstract:
Disclosed herein is a hydrogen generating apparatus for producing hydrogen from a hydrocarbon feed through a steam reforming reaction, in which a pressure drop device is installed between a feed distributor and each of reactor tubes in order to prevent the feed from being unevenly distributed to the reactor tubes. In the hydrogen generating apparatus, the pressure drop device for artificially dropping the supply pressure of the feed is installed between the feed distributor and each of the reactor tubes which are concentrically arranged with respect to a heat source. Accordingly, if the feed is unevenly distributed, the pressure drop device can suppress an abnormal temperature rise in some of the reactor tubes to induce the smooth production of hydrogen and to greatly improve the operational safety of the hydrogen generating apparatus.
Abstract:
A plasma display apparatus includes a data driver and a plasma display panel having a first address electrode and a second address electrode. The data driver is configured to initiate a change in a voltage value of a first data signal supplied to the first address electrode at a first initiation time, and to initiate a change in a voltage value of a second data signal supplied to the second address electrode at a second, different initiation time. Each of the data signals gradually changes from a first data voltage to a second data voltage during a respective first period, maintains at the second data voltage during a respective second period, and gradually changes from the second data voltage to a third data voltage during a respective third period.
Abstract:
The present invention relates to the urban roadway system and accompanying underground railway system, which provide the efficient use of limited constructible areas of the congested cities, and also relates to the traffic flow control system capable of the effective control of vehicular movements through the roadways. In the whole or partial areas of a city, the roadway network is constructed and connected in the honeycomb-like net structure. Compared with a typical tetragonal city, the hexagonal city of the present invention can reduce 22% of road extent, 63% of road area and 30% of constructible area in total, and the traffic flow can be improved enormously. The present invention also proves that the hexagonal roadway system enables vehicles to move in average 75% less time without meeting stop-signals by the synchronized signal system for traffic flow controls
Abstract:
The present invention provides a virtual lecture method and device using a technique of synthesizing virtual lecture room presentation screens by lecturer image extraction using chromakey or the like. According to the virtual lecture method and device, the invention enables: an image of a lecturer lecturing to be photographed by a camera, and then only the image of the lecturer is separately extracted by using a technique such as chromakey or the like; lecture materials of the lecturer and the image of the lecturer extracted by the technique such as chromakey or the like are to be naturally synthesized in real time, with the background of a previously stored virtual lecture room such that the lecture materials and the image of the lecturer are not separated, thereby remarkably increasing the efficiency of a lecture since the attention of audience can be drawn; time, which is necessary for preparing for the lecture, can saved since a separate manual editing step by a skilled editor is not required; and synthesized screens are to be recorded and stored as lecture files such that the lecture files can be easily provided to other audiences later.
Abstract:
The present invention provides a hydrogen generator for generating hydrogen through a steam-reforming process using hydrocarbons as a raw material and a method of operating the same, and, more particularly, provides a hydrogen generator for generating hydrogen through a steam reforming process, which can be stably operated because water is introduced into the hydrogen generator in the form of single phase vapor, and which can achieve high thermal efficiency using a proper heat exchanging method, and to a method of operating the same. According to the present invention, there is provided a heat exchanger network, in which heat necessary for a reforming reaction are obtained by the heat exchange of high-temperature exhaust gas or reformed gas, and in which, in a water gas converting reaction and a PSA reaction conducted at low temperatures compared to the reforming reaction, heat exchange is performed by low-temperature air or water, and the heat-exchanged air and the residual gas in the PSA reaction are used as a heat supply source for the reforming reactor together with fuel hydrocarbons, thereby minimizing the thermal loss of the hydrogen generator.
Abstract:
Disclosed herein is a hydrogen generating apparatus for producing hydrogen from a hydrocarbon feed through a steam reforming reaction, in which a pressure drop device is installed between a feed distributor and each of reactor tubes in order to prevent the feed from being unevenly distributed to the reactor tubes. In the hydrogen generating apparatus, the pressure drop device for artificially dropping the supply pressure of the feed is installed between the feed distributor and each of the reactor tubes which are concentrically arranged with respect to a heat source. Accordingly, if the feed is unevenly distributed, the pressure drop device can suppress an abnormal temperature rise in some of the reactor tubes to induce the smooth production of hydrogen and to greatly improve the operational safety of the hydrogen generating apparatus.
Abstract:
A virtual studio posture correction machine using a 3-dimensional real-time character and graphic technology is provided. The machine mixes and displays images captured by a camera together with a character or background in 3-dimensional images using a chroma key, so a dancing person can dance or learn dancing while viewing his or her own posture together with the character's posture using the machine.