Abstract:
High performance thin-film, transistors entirely processed at temperatures not exceeding 150°C, using amorphous multi component dielectrics based on t.he mixture of high band gap and high dielectric constant ( K) materials are presented in this invention. The invention relates to the use of sputtered or ink jet printed mixed dielectric materials such as Ta2O5 with SiO2 or Al2O3 or HfO2 with SiO2 or Al2O3. These multicomponent dielectrics allow producing amorphous dielectrics to be introduced in high stable electronic devices with low leakage currents, while preserving a high dielectric constant. This results in producing thin film transistors with remarkable electrical properties, such as the ones produced based on Ga-In-Zn oxide as channel layers and where the dielectric was the combination of the mixture Ta2O5:SiO2, exhibiting field- effect mobility exceeding 35 cm2 V-1 s-1, close to 0 V turn- on voltage, on/off ratio higher than 106 and subthreshold slope below 0.24 V dec-1.
Abstract translation:本发明提出了使用基于高带隙和高介电常数(K)材料的混合物的非晶多组分电介质,在不超过150℃的温度下完全加工的高性能薄膜。 本发明涉及使用溅射或喷墨印刷的混合电介质材料,例如具有SiO 2或Al 2 O 3或HfO 2的Ta 2 O 5与SiO 2或Al 2 O 3。 这些多组分电介质允许产生非晶电介质,以便在具有低泄漏电流的高稳定电子器件中引入,同时保持高的介电常数。 这导致产生具有显着电性能的薄膜晶体管,例如基于Ga-In-Zn氧化物作为沟道层产生的薄膜晶体管,并且其中电介质是混合物Ta 2 O 5:SiO 2的组合,显示场效应迁移率超过35cm 2 V-1 s-1,接近0 V导通电压,开/关比高于106,亚阈值斜率低于0.24 V dec-1。
Abstract:
It is describes a material in the form of lithium fluoride powder containing colour centres and the method for its preparation, by the formation of colour centres based on irradiating the powder with synchrotron radiation (light). The method involves mechanically reducing the size of the particles that form the LiF powder and the formation of colour centres therein by its exposure to synchrotron radiation. The so activated powder, which maintains the transparency characteristics of the original material if exposed to sunlight, can find wide use as an additive both in common printing inks and in pigments used in the artistic field to be used for the formation of marks on artefacts for anti-counterfeiting/identification purposes.
Abstract:
High performance thin-film, transistors entirely processed at temperatures not exceeding 150°C, using amorphous multi component dielectrics based on t.he mixture of high band gap and high dielectric constant ( K) materials are presented in this invention. The invention relates to the use of sputtered or ink jet printed mixed dielectric materials such as Ta2O5 with SiO2 or Al2O3 or HfO2 with SiO2 or Al2O3. These multicomponent dielectrics allow producing amorphous dielectrics to be introduced in high stable electronic devices with low leakage currents, while preserving a high dielectric constant. This results in producing thin film transistors with remarkable electrical properties, such as the ones produced based on Ga-In-Zn oxide as channel layers and where the dielectric was the combination of the mixture Ta2O5:SiO2, exhibiting field- effect mobility exceeding 35 cm2 V-1 s-1, close to 0 V turn- on voltage, on/off ratio higher than 106 and subthreshold slope below 0.24 V dec-1.
Abstract translation:本发明提出了使用基于高带隙和高介电常数(K)材料的混合物的非晶多组分电介质,在不超过150℃的温度下完全加工的高性能薄膜。 本发明涉及使用溅射或喷墨印刷的混合电介质材料,例如具有SiO 2或Al 2 O 3或HfO 2的Ta 2 O 5与SiO 2或Al 2 O 3。 这些多组分电介质允许产生非晶电介质,以便在具有低泄漏电流的高稳定电子器件中引入,同时保持高的介电常数。 这导致产生具有显着电性能的薄膜晶体管,例如基于Ga-In-Zn氧化物作为沟道层产生的薄膜晶体管,并且其中电介质是混合物Ta 2 O 5:SiO 2的组合,显示场效应迁移率超过35cm 2 V-1 s-1,接近0 V导通电压,开/关比高于106,亚阈值斜率低于0.24 V dec-1。
Abstract:
It is describes a material in the form of lithium fluoride powder containing colour centres and the method for its preparation, by the formation of colour centres based on irradiating the powder with synchrotron radiation (light). The method involves mechanically reducing the size of the particles that form the LiF powder and the formation of colour centres therein by its exposure to synchrotron radiation. The so activated powder, which maintains the transparency characteristics of the original material if exposed to sunlight, can find wide use as an additive both in common printing inks and in pigments used in the artistic field to be used for the formation of marks on artefacts for anti-counterfeiting/identification purposes.
Abstract:
High performance thin-film, transistors entirely processed at temperatures not exceeding 150°C, using amorphous multi component dielectrics based on τ.he mixture of high band gap and high dielectric constant ( K) materials are presented in this invention. The invention relates to the use of sputtered or ink jet printed mixed dielectric materials such as Ta 2 O 5 with SiO 2 or Al 2 O 3 or HfO 2 with SiO 2 or Al 2 O 3 . These multicomponent dielectrics allow producing amorphous dielectrics to be introduced in high stable electronic devices with low leakage currents, while preserving a high dielectric constant. This results in producing thin film transistors with remarkable electrical properties, such as the ones produced based on Ga-In-Zn oxide as channel layers and where the dielectric was the combination of the mixture Ta 2 O 5 :SiO 2 , exhibiting field- effect mobility exceeding 35 cm 2 V -1 s -1 , close to 0 V turn- on voltage, on/off ratio higher than 10 6 and subthreshold slope below 0.24 V dec -1 .
Abstract translation:提出了使用基于τ高混合带隙和高介电常数(K)材料的非晶多组分电介质在温度不超过150℃完全处理的高性能薄膜晶体管 在本发明中。 本发明涉及溅射或喷墨印刷的混合电介质材料如Ta 2 O 5与SiO 2或Al 2 O 3的用途, 2 0 3或HfO 2:其中SiO 2或Al 2 O 3: /子>。 这些多组分电介质允许将非晶电介质引入具有低漏电流的高稳定电子器件中,同时保持高介电常数。 这导致生产具有显着电性能的薄膜晶体管,例如基于Ga-In-Zn氧化物制成的薄膜晶体管作为沟道层,并且其中电介质是混合物Ta 2 O 5:SiO 2 2,其场效应迁移率超过35cm 2·V -1 -1 s -1 sup> 接近于0V的导通电压,开/关比高于10-6,亚阈值斜率低于0.24V dec--1 sup>。 p>