公开(公告)号：WO03100119A8

公开(公告)日：2005-05-26

申请号：PCT/DE0301510

申请日：2003-05-09

Applicant: SIG TECHNOLOGY LTD ,  LITZENBERG MICHAEL ,  LEWIN FRANK ,  MUELLER HARTWIG ,  VOGEL KLAUS ,  ARNOLD GREGOR ,  BEHLE STEPHAN ,  LUETTRINGHAUS-HENKEL ANDREAS ,  BICKER MATTHIAS ,  KLEIN JUERGEN

Inventor： LITZENBERG MICHAEL ,  LEWIN FRANK ,  MUELLER HARTWIG ,  VOGEL KLAUS ,  ARNOLD GREGOR ,  BEHLE STEPHAN ,  LUETTRINGHAUS-HENKEL ANDREAS ,  BICKER MATTHIAS ,  KLEIN JUERGEN

IPC: B05D7/24 ,  B08B7/00 ,  B08B9/42 ,  B29C49/42 ,  B65D23/02 ,  B65G29/00 ,  C03C17/00 ,  C23C14/04 ,  C23C14/50 ,  C23C14/56 ,  C23C16/04 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  C23C16/511 ,  C23C16/54 ,  B65G47/84

CPC classification number: C23C16/4409 ,  B05D1/62 ,  B08B7/00 ,  B08B9/426 ,  B29C49/421 ,  B29C2049/4221 ,  B29C2791/001 ,  B65D23/02 ,  B65G29/00 ,  B65G2201/0244 ,  C23C14/046 ,  C23C14/505 ,  C23C14/56 ,  C23C16/045 ,  C23C16/401 ,  C23C16/455 ,  C23C16/458 ,  C23C16/511 ,  C23C16/54 ,  H01J37/32733

Abstract: The method and device are used for plasma treatment of work pieces. The work piece (5) is inserted into an at least partially evacuatable chamber (17) of a treatment station (3) and the work piece is positioned inside the treatment station by a retaining element (46). The work piece is impinged upon by the retaining element in such a way that the work piece is guided in the direction of a longitudinal axis of a cavity such that the position thereof can be altered. The work piece is then pressed against a seal with a mouth piece thereof in a treatment position.

Abstract translation: 该方法和设备被用于工件的等离子体处理。 工件（5）是在至少部分地抽真空的室（17）到一个处理站（3）和工件用于通过保持构件（46）定位在所述处理工位内。 工件由保持构件，使得所述工件在一Kavitätenlängsachse的方向在位置可变地引导采取行动。 工件被压，此外，用针对一个密封件的定位开口区域的处理。

公开(公告)号：WO0144538A9

公开(公告)日：2001-10-25

申请号：PCT/EP0012493

申请日：2000-12-14

Applicant: TETRA LAVAL HOLDINGS & FINANCE ,  MOORE RODNEY ,  LUETTRINGHAUS HENKEL ANDREAS ,  HOFFMANN PATRIK

Inventor： MOORE RODNEY ,  LUETTRINGHAUS-HENKEL ANDREAS ,  HOFFMANN PATRIK

IPC: C23C16/448

CPC classification number: C23C16/4481

Abstract: The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same at practical processable temperatures, the invention provides that a number of filling packages (2) are stacked in an elongated essentially vertical column (1) that can be cooled. In addition, an inlet tube (3), which is inserted into the column (1) from the exterior, and a gas outlet connection (6), which leads to the exterior, are secured in the upper area of said column (1). Devices (26) are also provided for measuring the temperature, the pressure and the amount of the exiting gas mixture. In addition, a distribution cup (29) which spans the cross-section of the column (1) and which is provided with gas flow-through openings (38) is placed underneath the inner discharge end (4) of the inlet tube (3).

Abstract translation: 公开的是用于生产HMDSO和氧的混合气体的装置，所述工艺气体产生。 因此，大量处理气体可以去除连续生产和实际加工的温度下与这样的设备，根据它提供的是，在细长的，垂直设置的大致可制冷柱的本发明（1）的几个Füllpackungen（2）被布置成一个在另一个的上面，即在 塔的上部（1）从外部引入所述塔（1）的入口喷嘴（3）和（6）是固定的，在向外导向气体出口装置（26），用于测量打印机和量的温度 提供离开的气体混合物。 接着，入口配件（3）被安装（1）跨越扩散器壳（29）与气体通流开口（38）的柱的横截面的内出口端（4）之下。